Ultraviolet (UVA)-emissive BaSiO₃:Ce³⁺ phosphor was astonishingly reproducible by vacuum-sintering at a high temperature through a simple solid-state reaction method. It was conveniently formed in BaSiO₃ phases. The compound showed the UVA emission and the UV-VUV excitation due to 5d-4f transitions from Ce³⁺ ions: emission peak at 380 nm with a 56 nm width. Its temperature dependence and vacuum UV excitability were examined for practical application as an excimer discharge lamp, which showed the high thermal stability (80% at 100℃) and the strong VUV excitations at 145 nm and 172 nm.

Cases and studies on the selection method of CTQ are relatively active, but there are few cases or studies on the selection method of CTP which is important in the device industry. In fact, many companies simply select and manage CTP from the point of contact based on their experience and intuition. The purpose of this study is to present an evaluation model and a mathematical decision model for rational and systematic CTP selection to improve the process quality of semiconductor equipment lines. In the evaluation model, AHP (Analytic Hierarchy Process) analysis technique was applied to show objective and quantitative figures, and Fuzzy decision-making model was used to solve the ambiguity and uncertainty in the decision-making process. Decision Value (DV) was presented. The subjects were 22 process factors managed in the Plating Process that the representative equipment line can do. As a result, the evaluation model proposed in this study can support more efficient and effective decision-making for process quality improvement by more objectively measuring the problem of subjective CTP selection in manufacturing sites.

Electric Vehicle industry requires high technologies to stabilize apparatuses for the Coolant heater manufacturing. Vibrations of Leak Machine are one of the most critical factors for causing delivered of the defective product or poor inspection, which are the main reasons of the defects. In this study, the structure of the Leak Machine was analyzed through the experiment and the computer simulation to investigate the main reasons of the vibrations, and further to alter the design for the improved stability. And that design alterations were applied to the machine to identify the effects of those alterations. The result of the study shows that design alterations of the Leak Machine can effectively suppress about 97.8% of the vibrations, and further can improving the Inspection precision of the Coolant heater.

As the size of semiconductor devices decreases, the etching pattern becomes very narrow and a deep high aspect ratio process becomes important. The cryogenic etching process enables high aspect ratio etching by suppressing the chemical reaction of reactive ions on the sidewall while maintaining the process temperature of -100℃. ESC is an important part for temperature control in cryogenic etching equipment. Through the cooling path inside the ESC, liquid nitrogen is used as cooling water to create a cryogenic environment. And since the ESC directly contacts the wafer, it affects the temperature uniformity of the wafer. The temperature uniformity of the wafer is closely related to the yield. In this study, the cooling path was designed and analyzed so that the wafer could have a uniform temperature distribution. The optimal cooling path conditions were obtained through the analysis of the shape of the cooling path and the change in the speed of the coolant. Through this study, by designing ESC with optimal temperature uniformity, it can be expected to maximize wafer yield in mass production and further contribute to miniaturization and high performance of semiconductor devices.

In this paper, we studied smart phone RF wireless charging with 5.8-GHz microwave wireless power receiver. The dc output of the receiver connected to super capacitor and DC-DC converter for charging a smart phone. This configuration stably supplies 5V and current for charging it. Studies show that the more receivers are used at close range, the higher the received voltage values and the larger the capacity of the super capacitor, the longer the charging time. The present 5.8-GHz 1W wireless power transmission system is not enough for charging a smartphone mainly due to the lack of current of the receiver.

A 5.8-GHz 1W wireless power transmission system was used for charging a smart phone. The voltage of one RF power receiver with antenna was not enough for charging. Several power receivers for charging a smart phone was connected serially. The voltage of several RF power receivers are highly enough for charging a smart phone within 50cm. However, the lack of current from small capacitances of RF-DC converters is not suitable for charging smart phone. It means very long charging time. In this paper, the voltage multiplier circuits for RF-DC converters were analyzed to increase the current and voltage at the same time to reduce the charging time in smartphone RF wireless charging. Through the analysis of multiplier circuits, the 7-stage parallel multiplier circuit with voltage-doubler units are suitable for charging the smartphone, which supplies 5V and 700mA at 3V@5.8GHz.

Recent cleaning technologies of mask in extremely ultraviolet semiconductor processes were reviewed, focused on newly developed issues such as particle size determination or hydrocarbon and tin contaminations. In detail, critical particle size was defined and proposed for mask cleaning where nanosized particles and its various shapes would result in surface atomic ratio increase vigorously. A new cleaning model also was proposed with amphoteric behavior of electrolytically ionized water which had already shown excellent particle removing efficiency. Having its non-equilibrium and amphoteric properties, electrolyzed ion water seemed to oxidize contaminant surface selectively in nano-scale and then to lift up oxidized ones from mask surface very effectively. This assumption should be further investigated in future in junction with hydrogen bonding and cluster of water molecules.

The properties of materials which are widely used in industry fields like automobile, shipbuilding, casting, and electronics are strongly needed to have higher surface hardness, lower surface roughness, and higher compressive residual stress. As mentioned above, for the purpose of satisfying three factors, a variety of researches with respect to surface improvement have been actively studied and applied to every industry. SKD61 which is mostly used for die casting process of cold chamber method must meet a countless number of problems which are thermal, mechanical and chemical from highly specific working environment at high temperature over 600℃. Above all, in case of plunger sleeves used for die casting process, thermal fatigue has a bad effect on the surface of an inlet where molten metal is repeatedly injected. On account of it, plunger sleeves cause manufacturers to deteriorate quality of products. Therefore, in this paper, to improve the surface of an inlet of plunger sleeve, multilayer PVD coating using Ti, Cr and Mo is suggested. Furthermore, The surface characteristics such as surface roughness(Rsa, Rsq), surface hardness(HRB, HRC) and residual stress using XRD(X-ray diffractometer) of coated samples and specimens are studied and discussed.

With the recent development of various smartphone designs in the smartphone market, the use of curved cover glass has been required, and interest in curved glass production has increased. In this paper, we designed a pressurization system that simplified the size of the system using a wedge amplification mechanism for smartphone curved glass molding systems. The pressurization system consisted of a linear motor, a wedge, and a force sensor. The wedge was used to amplify the force, and the piezoelectric sensor was used to measure the force. In addition, the proposed amplification mechanism was confirmed to have an error of 1.27% through an experiment compared to the simulation, and the pressurization error of 0.76% for the pressurization profile 3,500N was verified through an experiment.

Recently, technologies for internet of things have been rapidly advanced with development of network. Also interest in smart healthcare that informs about motion information of users has been growing. In this paper, a system that is monitoring the weight on both feet by using aduino and FSR(Force Sensitive Resistor) Sensor is implemented. A 4-channel sensor driver module was implemented to measure a more accurate weight value. It is monitoring the weight on both feet by the using an application for either your PC or mobile device. Mobile applications can contribute to reducing human damage by sending messages along with location in emergency situations, such as injuries caused by falls during outdoor activities.

In this study, we studied the alternative of plasma resistant ceramic parts that constitute plasma chambers in the semiconductor dry etching process. MgO-Al₂O₃-SiO₂(MAS) glass was made of 13 types of glass using the Design Of Experiments(DOE) and the effect on thermal properties such as glass transition temperature and crystallization temperature depending on the content of each composition and etching resistance to CF₄/O₂/Ar plasma gas. MAS glass showed excellent plasma resistance and surface roughness up to 20 times higher than quartz glass. As the content of Al₂O₃ and MgO increases, the plasma resistance is improved, and it has been confirmed that it has an inverse relationship with SiO₂.

MANET(Mobile Ad Hoc Network) is the structure in which a source node communicates with a destination node by establishing a route with neighbor nodes without using the existing wired or wireless network. Therefore, the routing protocol for MANET must correspond well to changes in the channel state of moving nodes, and should have simple operation, high reliability, and no routing loop. In this paper, the simulation was perform by using a traffic model with on/off two states provided by the NS-3 network simulator. Also, the duration of the ON state and the duration of the OFF state used the traffic where inter arrival time of data is irregular by generating random values with constant, exponential distribution, and Pareto distribution. The performance of the DSDV, OLSR, and AODV protocols was compare and analyzed using the generated traffic model.

This thesis described the optical and electrical properties of the alternating current powder electroluminescent device based on Ag nanowire as a transparent electrode. The Ag nanowire electrode showed the morphology of 20 nm in diameter and 15 ㎛ in length. The transparent electroluminescent devices that were fabricated using the nanomilled ZnS : Cu, Mn phosphor by bar-coating process showed the transmittance of 67%. In order to improve the luminous efficiency, it is necessary to apply the transparent dielectric layer and increase the amount of the nanophosphor while maintaining the transmittance.

In this paper, a low-csst ECG system using a digital filter was implemented. After amplifying the analog ECG signal, it is converted into a digital signal and filtered. The developed ECG module is miniaturized by removing the analog filter element that occupies the existing volume and replacing it with a digital filter using a 3-stage Butterworth filter which is one of IIR filters. It uses a serial monitoring program with C# to check and save the ECG waveform measured on a computer screen. The ECG system using a developed digital filter in this paper uses a low-cost processor instead of an expensive, high-end processor, and its size and price are reduced by converting the analog filter to a digital filter. In addition, since the waveform of the developed ECG system is similar to the actual ECG waveform of MIT-BIU, it is considered that the existing analog filter can be replaced with the developed digital filter.

In this study, we investigated the oxygen partial pressure effect of ITO films for electrodes of oxide-based Thin-Film Transistor (TFT). Firstly, we deposited single ITO films on the glass substrate at room temperature. ITO films were prepared at the various partial pressures of oxygen gas 0-7.4% (O₂/(Ar+O₂)). As increasing oxygen on the process of film deposition, electrical properties were improved and optical transmittance increased in the visible light range (300-800 nm). For the electrode of TFT, we fabricated a TFT device (W/L=1000/200 ㎛) with ITO films as the source and drain electrode on the silicon wafer. Except for the TFT device combined with ITO film prepared at the oxygen partial pressure ratio of 7.4%, We confirmed that TFT devices with ITO films via FTS system operated as a driving device at threshold voltage (V_th) of 4V.

Various Cu ions are discharged into water from various industries, which results in a severe trouble for groundwater, soil, air, and eventually animals and humans. In this work, graphene oxide (GO) is introduced as a Cu removal absorber and the real-time monitoring method is demonstrated. The results show that GO is a very effective material to absorb Cu ions in the solution. In addition, the residual Cu ions in the solution is monitored via optical transmittance method, which well match with Inductively Coupled Plasma Mass Spectrometer (ICP-MS) analysis.

The importance of processes in cryogenic environments is increasing in a way to address problems such as critical dimension (CD) narrow and bottlenecks in micro-processing. Accordingly, in this paper, we proceed with the design and analysis of Electrostatic Chuck(ESC) and Coolant in cryogenic environments, and present optimal model conditions to provide the temperature distribution analysis of ESC in these environments and the appropriate optimal design. The wafer temperature uniformity was selected as the reference model that the operating conditions of the refrigerant of the liquid nitrogen in the doubled aluminum path were excellent. Design of simulation (DOS) was carried out based on the wheel settings within the selected reference model and the classification of three mass flow and diameter case, respectively. The comparison between factors with p-value less than 0.05 indicates that the optimal design point is when five turns of coolant have a flow rate of 0.3 kg/s and a diameter of 12 mm. ANOVA determines the interactions between the above factor, indicating that mass flow is the most significant among the parameters of interests. In variable selection procedure, Case 2 was also determined to be superior through the two-Sample T-Test of the mean and variance values by dividing five coolant wheels into two (Case 1 : 2+3, Case 2: 3+2). Finally, heat transfer analysis processes such as final difference method (FDM) and heat transfer were also performed to demonstrate the feasibility and adequacy of the analysis process.

GaOOH is obtained via hydrothermal synthesis procedure. The formed GaOOH is turned into α-Ga₂O₃ at 500℃ annealing. As the annealing temperatures increase the α-Ga₂O₃ is in part turned into β-Ga₂O₃ and fully turned into β-Ga₂O₃ after 1100℃. XPS and PL results reveal that heterojunction interface between α-Ga₂O₃ and β-Ga₂O₃ become maxim at 500℃ annealing condition, which result in the highest photocatalytic activity. The presence of heterojunction interface slows down the recombination process by separating photogenerated electron-hole pairs and thereby enhance the overall photocatalytic activity.

The TCD is used as one of the indicators for determining whether TSV Hole is defective. If the TCD is not normal size, it can lead to contamination of the CMP equipment or failure to connect the upper and lower chips. We propose a deep learning model for measuring the TCD. To verify the performance of the proposed model, we compared the prediction results of the proposed model for 2461 via holes with the CD-SEM measurement data and the prediction results of the existing model. Although the number of trainable parameters in the proposed model was about one two-thousandth of the existing model, the results were comparable. The experiment showed that the correlation between CD-SEM and the prediction results of the proposed model measured 98%, the mean absolute difference was 0.051um, the standard deviation of the absolute difference was 0.045um, and the maximum absolute difference was 0.299um on average.

When we inspect scaffold defect using sight, inspecting performance is decrease and inspecting time is increase. We need for automatically scaffold defect detection method to increase detection accuracy and reduce detection times. In this paper. We produced scaffold defect classification models using densenet, alexnet, vggnet algorithms based on CNN. We photographed scaffold using multi dimension camera. We learned scaffold defect classification model using photographed scaffold images. We evaluated the scaffold defect classification accuracy of each models. As result of evaluation, the defect classification performance using densenet algorithm was at 99.1%. The defect classification performance using VGGnet algorithm was at 98.3%. The defect classification performance using Alexnet algorithm was at 96.8%. We were able to quantitatively compare defect classification performance of three type algorithms based on CNN.

In Korea, where the world's first cloud computing development law was created, cloud service technology has been developing so far, and the industries to which artificial intelligence and big data technologies can be applied based on this are increasing. It is important for domestic and overseas cloud operators to secure many partners in order to provide optimal services to users. It is also important to systematically develop the partner's technology and discover new partners. In particular, the public, medical, and financial sectors are industrial fields that are difficult for domestic as well as global cloud service providers to expand without the help of partners. This study analyzes partner policies for industries caused by domestic regulations through domestic and foreign cases, and aims to establish partner management policies optimized for the domestic environment.

Cloud service has the characteristic that it must be always available and that it must be able to respond immediately to user requests. This study suggests a method for constructing a proactive and autonomous quality and performance management system to meet these characteristics of cloud services. To this end, we identify quantitative measurement factors for cloud service quality and performance management, define a structure for applying a time series framework to cloud service application quality and performance management for proactive management, and then use big data and artificial intelligence for autonomous management. The flow of data processing and the configuration and flow of big data and artificial intelligence platforms were defined to combine intelligent technologies. In addition, the effectiveness was confirmed by applying it to the cloud service quality and performance management system through a case study. Using the methodology presented in this study, it is possible to improve the service management system that has been managed artificially and retrospectively through various convergence. However, since it requires the collection, processing, and processing of various types of data, it also has limitations in that data standardization must be prioritized in each technology and industry.

The ball grid array is one of the packaging methods that used in high density printed circuit board. Solder void defects caused by voids in the solder ball during the BGA process do not directly affect the reliability of the product, but it may accelerate the aging of the device on the PCB layer or interface surface depending on its size or location. Void inspection is important because it is related in yields with products. The most important process in the optical inspection of solder void is the segmentation process of solder and void. However, there are several segmentation algorithms for the vision inspection, it is impossible to inspect all of images ideally. When X-Ray images with poor contrast and high level of noise become difficult to perform image processing for vision inspection in terms of software programming. This paper suggests the solution to deal with the suggested problem by means of using Mask R-CNN instead of digital image processing algorithm. Mask R-CNN model can be trained with images pre-processed to increase contrast or alleviate noises. With this process, it provides more efficient system about complex object segmentation than conventional system.

EtherCAT is an Ethernet-based fieldbus system standardized in IEC 61158 and SEMI, and widely used in the fields of factory automation, semiconductor equipment and robotics. In this paper, a real-time EtherCAT master is implemented on Linux operating systems and its performances are evaluated. To enhance the real-time capability of mainline Linux kernel, Xenomai is applied as a real-time framework and an open source EtherCAT master stack, Simple Open EtherCAT Master (SOEM), is installed on it. Unlike other studies, the real-time performance of the EtherCAT master is evaluated at the output of the network interface card, so that the evaluation results include all possible effects from the EtherCAT master system. The implemented EtherCAT master can send and receive packets up to 20KHz control frequency with low jitter, even in stressed condition.

High dynamic range (HDR) technology has been drawing attention in the field of imaging and consumer entertainment. As tools for capturing and creating HDR contents, encoding, and transmission evolve to support HDR formats, various display capabilities are being developed and increased. Hence, there is need for remapping native HDR imagery for display on lower quality legacy standard dynamic range (SDR) displays. This operation is referred to as tone mapping. In this paper, we present a sectional tone mapping method by Lenzen, and expand upon a tone mapping approach to improve temporal stability while maintaining picture quality. Compared to the existing block-based sectional tone mapping, our method uses the edge awareness-based tone mapping. We estimate the performance of the objective metric on temporal flickering. The experimental result shows that the algorithm maintains a smoother relationship between the output luminance values, and this reveals success in reducing halos and improving temporal stability with adopted edge aware filtering.