CFD Study for the Design of Coolant Path in Cryogenic Etch Chuck |
Jo, Soo Hyun
(Department of Mechanical Engineering, Myongji University)
Han, Ji Hee (Department of Industrial Management Engineering, Myongji University) Kim, Jong Oh (Department of Mechanical Engineering, Myongji University) Han, Hwi (Department of Mechanical Engineering, Myongji University) Hong, Sang Jeen (Department of Electronics Engineering, Myongji University, LINC+ Semiconductor Equipment Engineering Program, Myongji University) |
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