In order to apply sub-resolution assist feature (SRAF) in extreme ultraviolet lithography, the maximum non-printing SRAF width and lithography process margin needs to be improved. Through simulation, we confirmed that the maximum SRAF width of 6% attenuated phase shift mask (PSM) is large compared to conventional binary intensity mask. The increase in SRAF width is due to dark region's reflectivity of PSM which consequently improves the process window. Furthermore, the critical dimension error caused by variation of SRAF width and center position is reduced by lower change in diffraction amplitude. Therefore, we speculate that the margin of SRAF application will be improved by using PSM.

Silicon wafer is one of main materials in solar cell. Micro-cracks in silicon wafer are one of reasons to decrease efficiency of energy transformation. They couldn't be observed by human eye. Also, their shape is not only various but also complicated. Accordingly, their shape classification is absolutely needed for manufacturing process quality and its feedback. The performance of typical classification techniques which is principal component analysis(PCA), neural network, fusion model to integrate PCA with neural network, and support vector machine(SVM), are evaluated using pattern features of micro-cracks. As a result, it has been confirmed that the SVM gives good results in micro-crack classification.

In this study, numerical simulations for the conjugate heat transfer of air with a heat-sink of CPU were conducted. The heat-sink consisted of many fins of cylinder shape and the effect of the number of fins on the cooling performance of the heat sink was investigated. Grid independent solutions were obtained to compare the maximum temperature of the heat-sink for various conditions. It was found that maximum temperature of the heat-sink asymptotically approached 310K as the number of fins went to infinity. The energy exchange of air with the heat-sink was found to be nearly independent on the number of fins.

QFN (Quad Flat No-leads Package) is one of the SMD (Surface Mount Device). Since there is no lead in QFN, there are many defects on solder. Therefore, we propose an efficient mechanism for QFN solder defect detection at this paper. For this, we employ Convolutional Neural Network (CNN) of the Machine Learning algorithm. QFN solder's color multi-layer images are used to train CNN. Since these images are 3-channel color images, they have a problem with applying to CNN. To solve this problem, we used each 1-channel grayscale image (Red, Green, Blue) that was separated from 3-channel color images. We were able to detect QFN solder defects by using this CNN. In this paper, it is shown that the CNN is superior to the conventional multi-layer neural networks in detecting QFN solder defects. Later, further research is needed to detect other QFN.

One of the main applications of digital image processing is the estimation of the number of certain types of objects (cells, seeds, peoples etc.) in an image. Difficulties of these counting problems depends on various factors including shape and size variation, degree of object clustering, contrast between object and background, object texture and its variation, and so on. In this paper, a new automatic colony counting algorithm is proposed. We focused on the two applications: counting the bacteria colonies on the agar plate and estimating the number of seeds from images captured by smartphone camera. To overcome the shape and size variations of the colonies, we adopted the distance transformation and peak detection approach. To estimate the reference size of the colony robustly, we also used k-means clustering algorithm. Experimental results show that our method works well in real world applications.

We investigated magnetic field, discharged voltage, and as-deposited film uniformity at facing targets sputtering (FTS) system with magnetic field type: i) concentrated and ii) distributed magnetic field type. And Al doped ZnO (AZO) films were prepared at two magnetic field type such as concentrated magnetic field type and distributed magnetic field type, respectively. Discharge voltage at the distribution type is lower than concentration type due to low magnetic flux (middle magnetic flux: Concentration 1200 G and Distribution 600 G). The films deposited at the distributed magnetic field were more uniform than concentration type. All of prepared AZO films had a resistivity of under $10^{-4}[{\Omega}{\cdot}cm]$ and a transmittance of more than 85 % in the visible range.

Extreme Ultraviolet Lithography (EUVL) is the most promising technique in the field of Next Generation Lithography (NGL) expected to be used in the 1x-nm node for High Volume Manufacturing (HVM). But there exits remaining challenges for proper defect control of EUV mask. It was considered development of EUV pellicle for protecting the EUV mask has many obstacles due to high extinction coefficient of EUV wavelength. Recently researchers in the industry of semiconductor argue about the necessity of EUV pellicle and make effort to achieve it. In this paper, we investigated that the relationship between imaging performance and transmittance of EUV pellicle quantitatively. We made in-house EUV pellicle and analyzed its imaging performance of the dependence of pellicle transmittance using Coherent Scattering Microscopy(CSM). The imaging performance of EUV mask with pellicle is affected by its transmittance and we found that the performance of EUV mask improved with higher transmittance pellicle.

In this paper, the fire engine pump is controlled and monitored by the AJAX (Asynchronous Javascript and Xml) in the web server. The embedded system with built-in system having a processor and a memory of high performance occurs many problems in transmitting the large amount of data in real time through the web server. The AJAX is different from HTML (Hyper Text Makeup Language) with java script technology and can make RIA (Rich Internet Application). It process the necessary data by using asynchronous and it take advantage of usefulness, accessibility, a fast response time. Using AJAX can build up web server with real time and monitoring that fire engine pump status, check processing pump memory in the event of fire, also remotely monitors can do. The web server system can control the fire engine pump as like the black box. The experimental results show the effectiveness and commercialize possibility.

Recently, Depending on expectancy effect and ripple effect of augmented reality, the convergence between augmented reality and culture & arts are being actively conducted. This paper proposes a learning method for effective object tracking in 3D storytelling augmented reality in cultural properties. The proposed system is based on marker-less tracking, and there are four modules that are recognition, tracking, detecting and learning module. Recognition module is composed of SURF and LSH, and then this module generates standard object information. Tracking module tracks an object using object tracking based on reliability. This information is stored in Learning module along with learned time information. Detecting module finds out the object based on having the best possible knowledge available among the learned objects information, when the system fails to track. Also, it proposes a method for robustly implementing a 3D storytelling augmented reality in cultural properties in the future.

This paper proposes a new image enhancement method for an infrared thermal image. The proposed method uses both Laplacian and Prewitt edge detectors. Without a visible light, it uses an infrared image for the edge detection. The method subtracts contour images from the infrared thermal image. It results black contours of objects in the infrared thermal image. That makes the objects in the infrared thermal image distinguished clearly. The proposed method is implemented using C language in an embedded Linux system for a high-speed real-time image processing. Experiments were conducted by using various infrared thermal images. The results show that the proposed method is successful for image enhancement of an infrared thermal image.

We have studied the structural, optical and electrical properties of IGZO thin films. The IGZO thin films were deposited on the silicon wafer by RF magnetron sputtering method. The RF power in sputtering process was varied as 15W, 30W, 45W, 60W, 75W, respectively. All of the thin films transmittance in the visible range was above 85%. XRD analysis showed that amorphous structure of the thin films without any peak. The Hall measurements in the low RF power is the high mobility above $10cm^2/V{\cdot}s$ and the low resistvity are obtained in the IGZO thin films.

Optical system needs to be aligned before its undergoing process, is usually shows coma aberrations, which occurred due to imperfection in the lens or other components results in off-axis point sources, appearing to have a tail like a comet. There are some methods to correct coma aberration. In this paper, to correct coma aberration in optical system, using a robot arm type coordinate measuring machine(CMM). CMMs are widely used to measure the form of accuracy of parts and positioning accuracy of systems. Among them, robot arm type CMM has more advantages than the others, such as its mobility and measuring range. However, robot arm type CMM has lower accuracy than cantilever type CMM. To prove robot arm type CMM's accuracy, several factors were suggested in this paper and the final measuring results were compared to a commercial cantilever type CMM. Based on this accuracy, a typical optical system was successfully aligned by using our robot arm type CMM.

This paper addresses a problem of defocus map recovery from single image. We describe a simple effective approach to estimate the spatial value of defocus blur at the edge location of the image. At first, we perform a re-blurring process using Gaussian function with input image, and calculate a gradient magnitude ratio with blurring amount between input image and re-blurred image. Then we get a full defocus map by propagating the blur amount at the edge location. Experimental result reveals that our method outperforms a reliable estimation of depth map, and shows that our algorithm is robust to noise, inaccurate edge location and interferences of neighboring edges within input image.

As the semiconductor production technology has gradually developed and intra-market competition has grown fiercer, the caliber of Si Wafer for semiconductor production has increased as well. And semiconductors have become integrated with higher density. Presently the Si Wafer caliber has reached up to 450 mm and relevant production technology has been advanced together. Electrostatic chuck is an important device utilized not only for the Wafer transport and fixation but also for the heat treatment process based on plasma. To effectively control the high calories generated by plasma, it employs a refrigerant-based cooling method. Amid the enlarging Si Wafers and semiconductor device integration, effective temperature control is essential. Therefore, uniformed temperature distribution in the electrostatic chuck is a key factor determining its performance. In this study, the form of refrigerant flow channel will be investigated for uniformed temperature distribution in electrostatic chuck.