In photolithography process, resolution enhancement techniques such as optical proximity correction (OPC) and phase shift mask (PSM) have been applied to improve resolution. Especially, sub-resolution assist feature (SRAF) is one of the most important OPC to enhance image quality including depth of focus (DOF). However, imaging performance of the mask could be varied with the diffraction order amplitude changed by inserting SRAF. Therefore, in this study, we investigated the imaging properties and process margin of attenuated PSM with SRAF. Reflectivities of attenuated PSMs at 13.5 nm were 3, 6, 9% and simulation was performed by $PROLITH^{TM}$. As a result, aerial image properties and DOF as well as diffraction efficiency were improved by increasing the reflectivity of attenuated PSM. Additionally, printed critical dimension variations depending on SRAF width and space error were also reduced for attenuated PSM with high reflectivity. However, SRAF could be printed when reflectivity of attenuated PSM is high enough. In conclusion, optimization of reflectivity of attenuated PSM and SRAF to prevent side-lobe from being printed is needed to be considered.

In order to protect the patterned mask from contamination during lithography process, pellicle has become a critical component for Extreme Ultraviolet (EUV) lithography technology. According to EUV pellicle requirements, the pellicle should have high EUV transmittance and robust mechanical property. In this study, silicon nitride, which is well-known for its remarkable mechanical property, was used as a pellicle membrane material to achieve high EUV transmittance. Since long silicon wet etching process time aggravates notching effect causing stress concentration on the edge or corner of etched structure, the remaining membrane is prone to fracture at the end of etch process. To overcome this notching effect and attain high transmittance, we began preparing a rather thick (200 nm) $SiN_x$ membrane which can be stably manufactured and was thinned into 43 nm thickness with HF wet etching process. The measured EUV transmittance shows similar values to the simulated result. Therefore, the result shows possibilities of HF thinning processes for $SiN_x$ EUV pellicle fabrication.

LED (Light Emitting Diode) lighting is gaining more and more market penetration as one of the global warming countermeasures. LED is the next generation of fusion source composed of epi/chip/packaging of semiconductor process technology and optical/information/communication technology. LED has been applied to the existing industry areas, for example, automobiles, TVs, smartphones, laptops, refrigerators and street lamps. Therefore, LED makers have been striving to achieve the leading position in the global competition through development of core source technologies even before the promotion and adoption of LED technology as the next generation growth engine with eco-friendly characteristics. However, there has been a point of view on the cost compared to conventional lighting as a large obstacle to market penetration of LED. Therefore, companies are developing a Chip-Scale Packaging (CSP) LED technology to improve performance and reduce manufacturing costs. In this study, we perform patent analysis associated with Flip-Chip CSP LED and flow chart for promising technology forecasting. Based on our analysis, we select key patents and key patent players to derive the business strategy for the business success of Flip-Chip CSP PKG LED products.

A seam carving based micro-crack detection method is proposed which aims at detecting the micro-crack regions in heterogeneously textured surface of polycrystalline solar cells. By calculating the seam which is a connected path of low energy pixels in the image, the micro-crack regions can be detected. Experimental results show that the proposed seam carving based micro-crack detection method has superior efficiency in detecting the micro-crack without background noise pixels and the algorithm's computation time is less than the conventional algorithm.

It was the electrical properties of ZnS treated by the annealing in a vaccum and an atmosphere conditions to reseached the leakage current effect of semiconductor devices. Most samples were shown the non-linear with unipolar properties, but the ZnS annealed at $100^{\circ}C$ in a vaccum was only observed no leakage current in a range of -20 V< voltage < 15 V. The crystallinity of ZnS with no leakage current was improved and optical property was also improved. Because the ambipolar characteristics and low leakage currents originated from the extension effect of a depletion width by electron-hole combination in the depletion layer.

It has increased several decades in the field of Indium Tin Oxide (ITO) transparent thin film, However, a major problem with this ITO thin film application is high cost compared with other transparent thin film materials[1]. So far, in order to overcome this disadvantage, we show that a transparent ITO/Ag/i-ZnO multilayer thin film electrode would be more cost-effective and it has not only highly transparent but also conductive properties. The aim of this research has therefore been to try and establish how ITO/Ag/i-ZnO multilayer thin film would be more effective than ITO thin film. Herein, we report the properties of ITO/Ag/i-ZnO multilayer thin film by using optical spectroscopic method and measuring sheet resistance. At a certain total thickness of thin film, sheet resistance of ITO/Ag/i-ZnO multilayer was drastically decreased than ITO layer approximately $40{\Omega}/{\Box}$ at same visible light transmittance. (minimal point $5.2{\Omega}/{\Box}$). Tendency, which shows lowly sheet resistive in a certain transmittance, has been observed, hence, it should be suitable for transparent electrode device.

In this paper, a new background subtraction algorithm for video based fence monitoring surveillance systems is proposed. We adopt the sampling based background subtraction technique and focus on the two main issues: handling highly dynamic environment and handling the flickering nature of pulse based IR (infrared) lamp. Natural scenes from fence monitoring system are usually composed of several dynamic entities such as swaying trees, moving water, waves and rain. To deal with such dynamic backgrounds, we utilize the confidence factor for each background value of the input image. For the flickering IR lamp, the original sampling based technique is extended to handle double background models. Experimental results revealed that our method works well in real fence monitoring surveillance systems.

This paper suggests the sensor-less speed control of PMSM (Permanent Magnet Synchronous Motor) without the position sensor of oil-free air compressor. It estimated d and q axis back electro motive force using Back-EMF (Electro motive Force) observer to control sensor-less speed of PMSM. Also it used the method that tracks the information of rotor position and speed using PLL (Phase Locked Loop) based on estimated d and q axis Back-EMF. The sensor-less speed control of PMSM for oil air compressor application is carried out with the introduced rotor position and speed tracking method. In this paper, the experimental characterization of the sensor-less drive is provided to verify the accuracy of the estimated position and the performance of sensor-less control is analyzed by results obtained from the experiment. Moreover, the potential of PMSM sensor-less drive in industrial application such as compressor drive is also examined.

We have fabricated silver nanowire (AgNW) films as a stretchable and transparent electrode on polydimethylsiloxane (PDMS) substrates using a spray coater. Inherently, they show poor surface roughness and stretchability. To tackle it, we have employed a conductive polymer, poly (3,4-ethylenedioxythiophene) : Poly(styrene sulfonate) (PEDOT : PSS). PEDTO : PSS solution is mixed with AgNWs or spin-coated on the AgNW film. Compared with AgNW film only, PEDOT : PSS film only, and polymer-mixed AgNW films, the AgNW/polymer bilayer films exhibit much better surface roughness and stretchability. It is found that spray-coating of AgNWs on uncured PDMS and spin-coating of PEDOT : PSS solution on the AgNW films enhance the surface roughness of electrodes. Such a bilayer structure also provides a stable resistance under tensile strain due to the fact that each layer acts as a detour route for carriers. With this structure, we have obtained the peak-to-peak roughness ($R_{pv}$) as low as 76.8nm and a moderate increase of sheet resistance (from $10{\Omega}/{\Box}$ under 0% strain to $30{\Omega}/{\Box}$ under 40% strain).

Electric power in large devices is controlled by digital circuits, such as switching mode power supply. This kind of power circuits require accurate current sensor for power distribution. We studied characteristics of shunt resistor, which has many advantages for commercial application compared to Hall-effect current sensor. We applied ceramic package to the shunt resistor. Ceramic package has good thermal conductivity compared to plastic package, and this point is important for space requirement in Printed Circuit Board (PCB). Another advantage of the ceramic package is that surface mount technology (SMT) can be used for production. Our experimental results showed that the ceramic packaged resistor showed about 50% lower temperature than the plastic packaged one. Burning point and frequency characteristics are also discussed.

Recently, the major trends of NIL are high throughput and large area patterning. For UV NIL, if it can be proceeded in the non-vacuum environment, which greatly simplifies tool construction and greatly shorten process times. However, one key issue in non-vacuum environment is air bubble formation problem. In this paper, numerical analysis of bubble defect of UV NIL is performed. Fluent, flow analysis focused program was utilized and VOF (Volume of Fluid) skill was applied. For various resist-substrate and resist-mold angles, effects of velocity inlet and residual layer thickness of resist on bubble defect formation were investigated. The numerical analyses show that the increases of velocity inlet and residual layer thickness can cause the bubble defect formation, however the decreases of velocity inlet and residual layer thickness take no difference in the bubble defect formation.

This paper proposes an object tracking system based on keypoints using homography in mobile environments. The proposed system is based on markerless tracking, and there are four modules which are recognition, tracking, detecting and learning module. Recognition module detects and identifies an object to be matched on current frame correspond to the database using LSH through SURF, and then this module generates a standard object information. Tracking module tracks an object using homography information that generate by being matched on the learned object keypoints to the current object keypoints. Then update the window included the object for defining object's pose. Detecting module finds out the object based on having the best possible knowledge available among the learned objects information, when the system fails to track. The experimental results show that the proposed system is able to recognize and track objects with updating object's pose for the use of mobile platform.

This paper proposes an object tracking system according to reliability assessment of learning in mobile environments. The proposed system is based on markerless tracking, and there are four modules which are recognition, tracking, detecting and learning module. Recognition module detects and identifies an object to be matched on current frame correspond to the database using LSH through SURF, and then this module generates a standard object information that has the best reliability of learning. The standard object information is used for evaluating and learning the object that is successful tracking in tracking module. Detecting module finds out the object based on having the best possible knowledge available among the learned objects information, when the system fails to track. The experimental results show that the proposed system is able to recognize and track the reliable objects with reliability assessment of learning for the use of mobile platform.