Numerical Analysis of Effects of Velocity Inlet and Residual Layer Thickness of Resist on Bubble Defect Formation |
Lee, Woo Young
(School of Mechanical Engineering, Korea University of Technology and Education)
Kim, Nam Woong (School of Mechanical Engineering, Dongyang Mirae University) Kim, Dong Hyun (Dept. of Mechanical Engineering, Soonchunhyang University) Kim, Kug Weon (Dept. of Mechanical Engineering, Soonchunhyang University) |
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