Manufacturing SiNx Extreme Ultraviolet Pellicle with HF Wet Etching Process |
Kim, Ji Eun
(Department of Convergence Nanoscience, Hanyang University)
Kim, Jung Hwan (Department of Materials Science and Engineering, Hanyang University) Hong, Seongchul (Department of Materials Science and Engineering, Hanyang University) Cho, HanKu (Institute of Nano Science and Technology, Hanyang University) Ahn, Jinho (Department of Convergence Nanoscience, Hanyang University) |
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