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High Conductive Transparent Electrode of ITO/Ag/i-ZnO by In-Line Magnetron Sputtering Method  

Kim, Sungyong (Department of Electronics Engineering, Gachon University)
Kwon, Sangjik (Department of Electronics Engineering, Gachon University)
Publication Information
Journal of the Semiconductor & Display Technology / v.14, no.3, 2015 , pp. 33-36 More about this Journal
Abstract
It has increased several decades in the field of Indium Tin Oxide (ITO) transparent thin film, However, a major problem with this ITO thin film application is high cost compared with other transparent thin film materials[1]. So far, in order to overcome this disadvantage, we show that a transparent ITO/Ag/i-ZnO multilayer thin film electrode would be more cost-effective and it has not only highly transparent but also conductive properties. The aim of this research has therefore been to try and establish how ITO/Ag/i-ZnO multilayer thin film would be more effective than ITO thin film. Herein, we report the properties of ITO/Ag/i-ZnO multilayer thin film by using optical spectroscopic method and measuring sheet resistance. At a certain total thickness of thin film, sheet resistance of ITO/Ag/i-ZnO multilayer was drastically decreased than ITO layer approximately $40{\Omega}/{\Box}$ at same visible light transmittance. (minimal point $5.2{\Omega}/{\Box}$). Tendency, which shows lowly sheet resistive in a certain transmittance, has been observed, hence, it should be suitable for transparent electrode device.
Keywords
ITO/Ag/i-ZnO; ITO; Ag; Sputtering; Sheet Resistance;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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