AIN thin films are deposited on Si (100) and $SiO_2$/Si substrates by using an RF magnetron sputtering method and by changing the conditions of deposition variables, such as RF power, $N_2$/Ar flow ratio, and substrate temperature ($T_sub$). For all the deposited AIN films, XRD Peak patterns are monitored to examine the effect of deposition condition on the crystal orientation. Highly (002)-oriented AIN films are obtained at following nominal deposition conditions; RF Power : 350W, $N_2$/Ar ratio = 10/20, T$_{sub}$ : $250^{\circ}C$, and working pressure = 5mTorr, respectively. AIN-based SAW devices are fabricated using a lift-off method by varying the thickness of AIN layer. Insertion losses and side-lobe rejection levels of fabricated SAW devices are extracted from their frequency response characteristics, which are also compared in terms of AIN thickness and substrate. Relationships between the film properties of AIN films and the frequency responses of SAW devices are discussed. It is concluded from the experimental results that the (002)-preferred orientation as well as the surface roughness of AIN film may play a crucial role of determining the device performances of AIN-SAW devices.s.

Effects of thermal treatment on the structural properties of diamond-like carbon (DU) films were examined. The DLC films were deposited by using a modified filtered cathodic vacuum arc (FCVA) deposition system and by varying the negative substrate bias voltage, deposition time, and nitrogen flow rate. Thermal treatment on DLC films was performed using a rapid thermal annealing (RTA) process at $600^{\circ}C$ for 2min. Raman spectroscopy, x-ray photoemission spectroscopy (XPS), atomic force microscope (AFM), and surface profiler were used to characterize the I$_{D}$I$_{G}$ intensity ratio, sp$^3$ hybrid carbon fraction, internal stress, and surface roughness. It was found for all the deposited DLC films that the RTA-treatment results in the release of internal compressive stress, while at the same time it leds to the decrease of sp$^3$ fraction and the increase of I$_{D}$I$_{G}$ intensity ratio. It was also suggested that the thermal treatment effect on the structural property of DLC films strongly depends on the diamond-like nature (i.e., sp$^3$ fraction) of as-deposited film.ed film.

A Temperature sensor system in which the digital output signal is proportional to the operating temperature is designed. The temperature sensor system is designed by using BiCMOS technology and consists of temperature sensor, voltage-to-frequency converter and counter. The proposed temperature sensor system has error less than $1^{\circ}C$ in the temperature range $-25^{\circ}C$ to $55^{\circ}C$.

The composites were fabricated respectively 61vo1.% $\beta$ -SiC and 39vo1.% Ti $B_2$ spray-dried powders with the liquid forming additives of l2wt% $Al_2$ $O_3$＋ $Y_2$ $O_3$ by pressureless annealing at 1$700^{\circ}C$, 175$0^{\circ}C$, 180$0^{\circ}C$ for 4 hours. The result of phase analysis of composites by XRD revealed $\alpha$ -SiC(6H), Ti $B_2$, and YAG(A $l_{5}$ $Y_3$ $O_{12}$ ) crystal phase. The relative density, the Young's modulus and fracture toughness showed respectively the highest value of 92.97%, 92.88Gpa and 4.4Mpaㆍ $m^{\frac{1}{2}}$ for composites by pressureless annealing temperature 1$700^{\circ}C$ at room temperature. The electrical resistivity showed the lowest value of 8.09${\times}$10$^{-3}$ ㆍcm for composite by pressureless annealing temperature 1$700^{\circ}C$ at $25^{\circ}C$. The electrical resistivity of the SiC-Ti $B_2$ composites was all positive temperature cofficient resistance(PTCR) in the temperature ranges from $25^{\circ}C$ to $700^{\circ}C$.

The suspension insulators are subjected to harsh environment in service for a long time. Long term reliability of the insulators is required for both mechanical and electrical performances. We studied an analysing method to find out a deformation of brittle porcelain with a thermal expansion of simulation analysis and experimental results show that cement volume growths affect severely to b mechanical failure ageing.

This paper was the research of high voltage suspension insulator (400 [kN]) including pottery stone, feldspar, clay and alumina of 17 [wt%]. The slurry was fabricated after ball milling mixed raw materials. Green compacts were made by the extrusion of jiggering method and were sintered at 1300[$^{\circ}C$] for 50 [min.] in the tunnel kiln. The sintered density was reached to 97% of theoretical density, and the bending strength was 1658 [k $g_{f}$/$\textrm{cm}^2$] and hardness and fracture toughness which was measured by ICL( indentation crack length ) method were 1658 (kgf/$\textrm{cm}^2$) and 27.5 [Gpa], respectively. In measurement of tana and insulation break voltage of 400 (kN) porcelain, tan$\delta$ took some numerical value between 17${\times}$10$_{-3}$ and 61${\times}$10$_{-3}$ and insulation break voltage value was 19.9$\pm$1.4 [㎸/mm]. The test was performed to research whether the shape of pin affect a overvoltage break load or not As a consequence, when a pin was designed a pin diameter 51 [mm] with the bottom form of two-step constructed with straight in the suspension insulator, Insulator showed overvoltage break load 52 [ton] of the highest value and reflected a fine characteristic in aged deterioration test which is one of the accelerated aging test. Also it could be confirmed a fine characteristic through performing the test that electrical property of insulator was established correctly in accordance with IEC 60383-1 standards.s.

In this paper, insulations characteristics by temperature changes(＋50～-50[$^{\circ}C$]) of $SF_{6}$ gas in the experimental chamber were studied. From this result, at the low temperature, the breakdown voltage was increased with a drop of temperature and an increase of inner pressure in GIS. In addition the ability of insulation of liquid $SF_{6}$ was higher than that of the highly pressurized $SF_{6}$ gas. That is, with progress of low temperature, the main reason of breakdown was not liquefaction of $SF_{6}$ but rapid decrease of inner pressure. This study will come in greatly handy for the insulation design of GIS in a hard cold region

Ageing characteristics of RTV coating materials by corona discharge have been studied. The hydrophobicity recovery of RTV coating materials with 300${\mu}{\textrm}{m}$ thickness was identical with a bulk silicone materials. The RTV coating materials hydrophobicity has been almost lost when its were discharged during 40 seconds by corona discharge of 10㎸, and recovered after about 45 hours. The resistivity of RTV coating materials has not been recovered after 45 hours, though after 80 hours the initiation resistivity value has been recovered up to 95%. There was no critical change of compounds(such as Si and Al) on RTV surfaces by the corona discharge treatment until 100 seconds. In the test of arc erosion, it was seen that the coating sample with silicone rubber as a base material have more longer burn-out time than other samples with FRP or glass base.

This research aims to develop an indicator-free DNA chip using micro-fabrication technology. At first, we fabricated a DNA microarray by lithography technology. Several probe DNAs consisting of thiol group at their 5-end were immobilized on the gold electrodes. Then indicator-free target DNA was hybridized by an electrical force and measured electrochemically in potassium ferricyanide solution. Redox peak of cyclic-voltammogram showed a difference between target DNA and mismatched DNA in an anodic peak current. Therefore, it is able to detect various genes electrochemically after immobilization of various probe DNAs and hybridization of indicator-free DNA on the electrodes simultaneously It suggested that this DNA chip could recognize the sequence specific genes.