We perform the physical analysis such that Si/W composition ratios and phosphorus distribution change in the W/S $i_{x}$ thin films according to phosphorus concentration of polysilicon and W $F_{6}$ flow rate for the formation of WS $i_{x}$ polycide used as a gate electrode. We report that these physical characteristics have effects on the contact resistance between word line and bit line in DRAM devices. RBS measurements show that for the samples having phosphorus concentrations of 4.75 and 6.0${\times}$10$^{2-}$ atoms/㎤ in polysilicon, by applying W $F_{6}$ flow rates decreases from 4.5 to 3.5 sccm, Si/W composition ratio has increases to 2.05∼2.24 and 2.01∼2.19, respectively. SIMS analysis give that phosphorus concentration of polysilicon for both samples have decreases after annealing, but phosphorus concentration of WS $i_{x}$ thin film has increases by applying W $F_{6}$ flow rates decreases from 4.5 to 3.5 sccm. The contact resistance between word line and bit line in the sample with phosphorus concentration of 6.0 ${\times}$ 10$^{20}$ atoms/㎤ in polysilicon is lower than the sample with 4.75 ${\times}$ 10$^{20}$ atoms/㎤ After applying W $F_{6}$ flow rates decreases from 4.5 to 3.5 sccm, the contact resistance has been improved dramatically from 10.1 to 2.3 $\mu$ $\Omega$-$\textrm{cm}^2$.

Transparent conductive oxides (TCO) are necessary as front electrode for most thin film solar cell. In our paper, transparent conducting aluminum-doped Zinc oxide films (ZnO:Al) were prepared by rf magnetron sputtering on glass (Corning 1737) substrate as a variation of the deposition condition. After deposition, the smooth ZnO:Al films were etched in diluted HCI (0.5%) to examine the electrical and surface morphology properties as a variation of the time. The most important deposition condition of surface-textured ZnO films by chemical etching is the processing pressure md the substrate temperature. In low pressures (0.9mTorr) and high substrate temperatures ($\leq$$300^{\circ}C$), the surface morphology of films exhibits a more dense and compact film structure with effective light-trapping to apply the silicon thin film solar cells.

In this paper, we have studied about optimal transmission efficiency characteristics of pulse energy in a coal plant for removing environmental polluted gas. The electrical efficiency of pulse power systems depends on impedance of the reactor. To obtain high efficiency, we used MPC(Magnetic pulse compressor) as the power switch and tested their characteristics as electrode length of the reactor and charging voltage of capacitor, As results, we obtained a compressed pulse such as pulse voltage of 10㎸, rising time 200ns and pulse width of 500ns. With increasing electrode length, the load impedance was decreased but the electrical efficiency was increased.

Many toxic pesticides as aqueous-base sprays are dispensed for protection of food crops from pests into farm fields. When dispensed with conventional nozzles, a large portion of the spray is often lost by airborne drifts of droplets away and lack of deposition onto the plants due to rapid gravitational settling of droplets to the soil beneath. And target deposition efficiencies poorer than 20％ are often encountered in agricultural pesticides. An electrostatic spraying technology offers a very favorable means to increasing pesticides droplets deposition onto biological surfaces of living crops. In this paper a corona type spray nozzle, utilizing a set of corona charging devices and a pulsed droplet-charging voltage applied, has been proposed and tested its potential experimentally. As a result, it exhibits a large current deposition of aqueous pesticide sprays on the sensing target, which, however, promise to be as one of the effective electrostatic spraying nozzle.

In this paper, physical phenomena which are related to the high temperature and high pressure arc plasma generated during the fault current interruption by SF6 gas circuit breakers are reviewed. In particular, in order to analyze nozzle ablation induced by the heats transferred to the surface of the poly-tetrafluoroethylene(PTFE) nozzle through arc radiation, a governing equation for the calculation of PTFE concentration is added to the governing equations for SF6 arc Plasma analysis. The proposed method is applied to the steady state analysis of $SF_6$ arc plasma generated by direct current taking account of the nozzle ablation and the results are presented.

Efficient electrodes are devised for organic luminescent device(OLED). ITO electrode is treated with $O_2$ plasma. In order to inject hole efficiently, there is proposed the shape of anode that inserted plasma polymerized films as buffer layer between anode and organic layer using thiophene monomer. In the case of device inserted the buffer layer by using the plasma polymerization after $O_2$ plasma processing for ITO transparent electrode, since it forms the stable interface and reduce the moving speed of hole, the recombination of hole and electronic are made in the emitting layer. Therefore it realized the device capability of two times in the aspect of luminous efficiency than the device which do not be inserted the buffer layer. Experiments are limited to the device that has the structure of TPD/$AIq_3$, however, the aforementioned electrodes can similarly applied to the organic luminous device and the Polymer luminous device.

The purpose of this paper is to study the removal of nitrogen oxide(NOx) using a wire-plate type plasma reactor with magnet attached for indoor air purification. In order to produce a more effective reactor, we conducted magnetic field simulations. The results of the magnetic field simulations show that NOx can be removed more effectively. The results from the magnetic field simulation show that when 7 magnets were applied to the reactor, the magnetic flux density was at its highest amount than when using 0, 3, or 5 magnets. From the data obtained by the simulation results a plasma reactor was made and thus, several experiments were conducted. The best removal efficiency was obtained with 14 W AC power to the reactor with 5 magnets.

In this Paper, we propose a time-domain magnetic field integral equation (TD-MFIE) formulation for analyzing the transient electromagnetic response from three-dimensional (3-D) dielectric bodies. The solution method in this paper is based on the Galerkin's method that involves separate spatial and temporal testing procedures. Triangular patch basis functions are used for spatial expansion and testing functions for arbitrarily shaped 3-D dielectric structures. The time-domain unknown coefficients of the equivalent electric and magnetic currents are approximated tv a set of orthonormal basis function that is derived from the Laguerre polynomials. These basis functions are also used for the temporal testing. Numerical results computed by the proposed method are presented and compared.

This paper describes an electronic compass using micromachined X- and Y-axis micro fluxgate sensors which were perpendicularly aligned each other to measure X- and Y-axis magnetic fields respectively. The fluxgate sensor was composed of rectangular-ring shaped magnetic core and solenoid excitation(49 turns) and pick-up(46 turns) coils. Excitation and pick-up coil patterns which were formed opposite to each other wound the magnetic core alternatively to improve the sensitivity and to excite the magnetic core in an optimal condition with reduced excitation current. The magnetic core has DC effective permeability of ~1000 and coercive field of ~0.1 Oe. The magnetic core is easily saturated due to the low coercive field and closed magnetic path for the excitation field. To decrease the difference of induced second harmonic voltages from X- and Y-axis, excitation condition of 2.8 $V_{P-P}$ and 1.2 MHz square wave was selected. Excellent linear response over the range of -100 $\mu$T to +100 $\mu$T was obtained with 210 V/T sensitivity. The size of each micro fluxgate sensor excluding pad region was about 2.6${\times}$1.7 $mm^2$ and the power consumption was estimated to be 14 mW.W.