In these days, diesel vehicle or power plant emits $NO_X\; and SO_2$ which cause air pollution like acid-rain, ozone layer destroy and optical smoke, therefore there are many kinds of methods considered for removing them such as SCR, catalyst, plasma process, and plasma-catalyst hybrid process. T$TiO_2$ is commonly used as catalyst to remove $NO_X$ gas because it have very excellent chemical characteristic as photo catalyst. In this paper, $NO_X$ sensing characteristic of $TiO_2$ thin film deposited by R.F Magnetron sputtering is investigated. A finger shaped electrode on $Al_2$O$_3$ substrate is designed and $TiO_2$ is deposited on the electrode by the magnetron sputtering deposition system. Chemical composition of the deposited $TiO_2$ thin film is $TiO_{1.9}$ by RBS analysis. When the UV is irradiated on it with flowing air, capacitance of $TiO_2$ thin film increases, however, when NO gas is put into the system with air, it immediately decreases because of photo chemical reaction. and it monotonously decreases with increasing NO concentration.

We designed wideband HTS antennas which consists of two triangle -radiation patches using a $YBa_2Cu_3O_{7-X}$ (YBCO) superconducting thin film. The major limitation of high-Tc superconducting (HTS) microstrip antennas is the narrow bandwidth due to the high Q and thin substrate. Defining bandwidth as the frequency range over which standing wave ratio (SWR) 2:1 or less, HTS antenna bandwidths are typically 0.85 % to 1.1 %. Thus considerable effort has been focused on developing antennas for broadband operation. To calculate input impedance and design of the broadband HTS antennas a moment method technique was used. The HTS antenna fabricated in this work was designed for K-band, which is useful band for satellite to satellite communications. The bandwidth obtained was a significant 6.7 % and the other measured performance of our HTS antenna, including the bandwidth, radiation Pattern, efficiency, standing wave ratio (SWR) and return losses was reported.

For ac PDP, the lifetime should be guaranted over, 30000 hours. The lifetime is correlated with the deterioration characteristics for the weakest element in ac PDP. However, the short-term deterioration test method of the at PDP has not well developed. In this paper, a short term deterioration test method of a given element in the ac PDP is proposed. By this method, MgO deterioration characteristics are investigated. The deterioration rate is decreased with MgO thickness but it was almost saturated over 5000$\AA$.

Crowbar system is usually applied to a pulsed power system in which a capacitor bank is discharged into a load. This provides a free wheeling path for the load current and prevents the capacitor from recharging due to a reverse voltage. Usually diodes have been used as a crowbar switch, but it is not a practical system because the cost of the diodes goes up enormously with increasing the system voltage and current. This paper presents a novel protection scheme of a charging and discharging system of a 300 kJ capacitor bank using a low-cost crowbar system which consists of a crowbar switch and resistors. Triggered vacuum switch(TVS) was used for a crowbar switch, and Rogowski coil was used to determine a trigger time of TVS. When this crowbar system is applied to our pulsed power system which consists of capacitor bank($123muF$), inductor() for forming a pulse, load resistor$(100 m\Omega)$, and a closing switch, instantaneous reversal voltage of capacitor bank could be limited less than 1.8 ㎸ until capacitor bank was charred to 17 ㎸.

This paper Presents the fabrication and test of a micropump that can be applied to an implantable cerebrospinal fluid shunt system for hydrocephalus patients The proposed micropump consists of a pair of corrugated parylene diaphragm chambers and a set of nozzle and diffuser. The electromagnetic force drives the diaphragms and pumps the fluid. The static or dynamic characteristics of the fabricated devices have been obtained experimentally. The site of the micropump is $14 \times 12 \times 8mm^3$. The flow rate increase by about $3 mell/h$ was observed in the operational pressure range the micropump.

Film Bulk Acoustic wave Resonator (FBAR) using thin piezoelectric films can be made as monolithic integrated devices with compatibility to semiconductor process, leading to small size and low cost, high Q RF circuit elements with wide applications in communications area. This paper presents a MMIC compatible suspended FBAR using surface micromachining. Membrane is composed $Si_3N_4SiO_2Si _3N_4$ multi layer and air gap is about 50${\mu}{\textrm}{m}$. Firstly, We perform one dimensional simulation applying transmission line theorem to verify resonance characteristic of the FBAR. Process of the FBAR is used MEMS technology. Fabricated FBAR resonate at 2.4GHz, $K^2_{eff}$ and Q are 4.1% and 1100.

IPMC(Ionic Polymer Metal Composite)actuators were optimized for producing improved forces by changing multiple parameters including repetition of number of plating, surface electroding and additive(PVP)-treatment on reduction. The platinum electrode is deposited on the surface of the material where platinum particle stay in a dense form that appears to introduce a significant level of surface electrode resistance. Actuation tests were performed for such IPMC actuators under a low voltage. The test results show that the lower surface-electrode resistance generates higher actuation capability in the IPMC actuators. In order to investigate relaxation behavior of bending and repeatability in dry condition, the IPMC was coated by$rubber(KRATON^{TM})$to minimize the effect of water evaporation from IPMC. This actuator can be used in air with surface coating to avoid membrane drying.