Diamond thin films have been deposited on the silicon substrate by inductively coupled radio frequency plasma enhanced chemical vapor deposition system. The morphological features of thin films depending on methane concentration and deposition time have been studied by scanning electron microscopy and Raman spectroscopy. The diamond particles deposited uniformly on silicon substrate($10{\times}10[mm^2]$) at the pressure of 1[torr], a methane concentration of 1[%], a hydrogen flow rate of 60[sccm], a substrate temperature of $840\{sim}870[^{\circ}C]$, an input power of 1[kw], and a deposition time of 1[hour]. With increasing deposition time, the diamond particles grew, and than about 3 hours have passed, the graphitic phase carbon thin film with "cauliflower-like" morphology deposited on the diamond thin films.

We investigated the maximum controllable current characteristics of the CB-BRT (Corrugated p-Base-Base Resistance Controlled Thyristor), which suppresses the snap-back effectively and increases the maximum controllable current(MCC) by employing the corrugated p-base. Experimental result shows that, when compared with conventional BRT, the MCC of the CB-BRT exhibits good stability on various process parameters. The MCC of the CB-BRT is larger than that of the conventional BRT by 50%, and the variation of the MCC in CB-BRT, caused by variation of the process parameters, is only 20% of that of the conventional BRT.

The degradation process of silicone rubber was investigated by leakage current monitoring in Inclined-Plane method. DAS (Data Acquisition System) with 12-bit, 8-channel A/D converter was prepared. Average current, cumulative charge, current waveform and the number of peak pulses were measured on-line. And, FFT (Fast Fourier Transform) analysis was performed with stored current waveform. Besides, maximum erosion depth was measured in order to use as the indicator of the degradation process. So, the results of leakage current components and maximum erosion depth measurements were compared to find one or more components which have trends of changing similarly to that of erosion process. The result suggests that the ratio of peak current to r.m.s. current, harmonic contents and the number of peak pulses are well corresponding with the degradation process.

This paper describes partial discharge phenomenon with SF6gas pressures in insulation consisting of insulation paper and SF6 gas. We made the specimens with SF6 gas gaps which exist between aramid papers and electrodes and calculated the electric field intensity in the these gaps. We measured the partial discharge inception voltages and the AC breakdown voltages with the test method of IEC 60060-2 and did the partial discharge degradation experiments with a constant voltage. According to gas pressures, the breakdown voltages in SF6gas gaps were calculated by Paschen's law. And these results showed the ability applying partial discharge inception voltages evaluation to Paschen's law and the relationship between the PD quantities occurring insulation breakdown and PD occurring area.

A compact size high voltage pulse generator with nanosecond rise time has been designed and investigated experimentally. The inductance of a pulse generator can be reduced by fixing the Marx generator and pulse forming network components into a single cylindrical unit. As a result, nanosecond rise time about $8{\sim}10[ns]$ and pulse width of several hundred [ns] can be obtained from a modified Marx pulse generator. And parametric studies showed that the rise time of the output pulse was depended little on the change of the load resistance and the charging capacitance while, the pulse width of the output pulse was depended greatly upon the change of the load resistance and the charging capacitance. The theoretical showed the possibility to design the laboratory-size pulse generator very fast rising time and a proper pulse width by minimizing stray inductance and varying resistance and capacitance.

A conventional electrolyzing cell has been made by an ion exchange membrane inbetween parallel plate electrodes. A low dc voltage is applied to the electrodes for electrolyzing and the efficiency is remained in low. in this study, a novel electrolyzing cell with a pair of slit-type third electrodes installed inbetween parallel plate electrodes has been proposed and investigated experimentally. And pulse power wa supplied to between each electrodes. This slit type of third electrodes can concentrate the strong electric fields at the every its edges to accelerate the electrolyzing powers, and to generate oxygen bubble discharges for generating oxidants. And moreover the slits eliminate the space charge limiting action and the temperature of the water by leaking out through the slits from electrolyzing region to outside of the main electrode region. As a result, it was found that a strong electorzed water of pH 2.8 and pH 10.5 and oxidants dissolved water of 1 [ppm] in acidic water were obtained with a tap water fed at the electric current of 2 [A], which however were several times higher oxidant and ion concentration quantity compared with the conventional cell.

Mechanical properties of electroplated gold microstructures were determined from the micromachined beam structures. Cantilever and bridge beam structures of different length were fabricated by electroplating-surface micromachining technique, which is specially designed to realize an anchor structure close to an ideal fixed-boundary condition. Fabricated beams were electrostatically excited and their resonance frequencies were measured by optical system composed of laser displacement meter with dynamic signal analyzer. Young's modulus and mean residual stress were calculated from the measured frequencies of microbeams. In addtion, stress gradient was measured using deformation of released cantilever beam structure.