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Film Bulk Acoustic Wave Resonator for Bandpass Filter  

김인태 (KIST 마이크로시스템센터)
박윤권 (KIST 마이크로시스템센터)
이시형 (KIST 박막기술연구센터)
이윤희 (고려대 물리학과)
이전국 (KIST 박막기술연구센터)
김남수 (충북대학 전기전자공학부)
주병권 (KIST 마이크로시스템센터)
Publication Information
The Transactions of the Korean Institute of Electrical Engineers C / v.51, no.12, 2002 , pp. 597-600 More about this Journal
Abstract
Film Bulk Acoustic wave Resonator (FBAR) using thin piezoelectric films can be made as monolithic integrated devices with compatibility to semiconductor process, leading to small size and low cost, high Q RF circuit elements with wide applications in communications area. This paper presents a MMIC compatible suspended FBAR using surface micromachining. Membrane is composed $Si_3N_4SiO_2Si _3N_4$ multi layer and air gap is about 50${\mu}{\textrm}{m}$. Firstly, We perform one dimensional simulation applying transmission line theorem to verify resonance characteristic of the FBAR. Process of the FBAR is used MEMS technology. Fabricated FBAR resonate at 2.4GHz, $K^2_{eff}$ and Q are 4.1% and 1100.
Keywords
FRAR; Piezoelectric; Surface micromachining; MMIC;
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