• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.17 no.5
• /
• pp.1196-1202
• /
• 2013

This paper have analyzed the change of breakdown voltage for channel doping concentration and device parameters of double gate(DG) MOSFET using two dimensional potential model. The low breakdown voltage becomes the obstacle of power device operation, and breakdown voltage decreases seriously by the short channel effects derived from scaled down device in the case of DGMOSFET. The two dimensional analytical potential distribution derived from Poisson's equation have been used to analyze the breakdown voltage for device parameters such as channel length, channel thickness, gate oxide thickness and channel doping concentration. Resultly, we could observe the breakdown voltage has greatly influenced on device dimensional parameters as well as channel doping concentration, especially the shape of Gaussian function used as channel doping concentration.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.16 no.4
• /
• pp.793-798
• /
• 2012

In this paper, dependence of subthreshold current has been analyzed for doping distribution and channel structure of double gate(DG) MOSFET. The charge distribution of Gaussian function validated in previous researches has been used to obtain potential distribution in Poisson equation. Since DGMOSFETs have reduced short channel effects with improvement of current controllability by gate voltages, subthreshold characteristics have been enhanced. The control of current in subthreshold region is very important factor related with power consumption for ultra large scaled integration. The deviation of threshold voltage has been qualitatively analyzed using the changes of subthreshold current for gate voltages. Subthreshold current has been influenced by doping distribution and channel dimension. In this study, the influence of channel length and thickness on current has been analyzed according to intensity and distribution of doping.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2014.02a
• /
• pp.239.2-239.2
• /
• 2014

태양전지의 전면전극과 웨이퍼의 접촉저항은 태양전지의 효율을 저하시키는 원인이 된다. 전면전극과 웨이퍼의 접촉저항을 감소시키는 공정으로써 선택적 에미터 도핑이 널리 적용되고 있다. 선택적 에미터 도핑은 태양전지의 전면전극 하부에 고농도 도핑을 함으로써 전극과 웨이퍼의 접촉저항을 감소시켜 태양전지의 효율상승을 유도한다. 이러한 선택적 에미터 도핑은 주로 고가의 레이저 장비가 요구 되어 생산단가가 높으며 웨이퍼의 구조적 손상을 야기한다. 본 연구에서는 고가의 레이저 장비를 플라즈마 제트 장치로 대체함으로써 생산단가를 낮추고자 한다. 도펀트가 도포된 웨이퍼에 플라즈마 제트를 조사하면 플라즈마 전류 흐름에 의한 저항 열이 발생한다. 발생된 열에 의해 도펀트가 웨이퍼에 확산되어 도핑된다. 플라즈마 제트로 구성된 선택적 에미터 도핑 장비 개발을 위한 기초 특성을 조사한다. 플라즈마 제트의 전류량의 변화에 따른 웨이퍼의 온도 특성과 도포된 도펀트 용재의 인산 함유량에 따른 도핑 깊이를 조사한다. 또한 선택적 에미터 도핑의 생산성을 향상시키기 위해 다중 채널 플라즈마 제트 장치를 구성하여 특성을 조사한다. 각 채널의 플라즈마 제트의 선폭과 전류량이 적절한 균일도를 갖도록 한다. 도핑 프로파일은 이차 이온 질량분석법을 통해 분석한다.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.21 no.4
• /
• pp.789-794
• /
• 2017

Subthreshold current model is presented using analytical potential distribution of junctionless cylindrical surrounding-gate (CSG) MOSFET and threshold voltage shift is analyzed by this model. Junctionless CSG MOSFET is significantly outstanding for controllability of gate to carrier flow due to channel surrounded by gate. Poisson's equation is solved using parabolic potential distribution, and subthreshold current model is suggested by center potential distribution derived. Threshold voltage is defined as gate voltage corresponding to subthreshold current of $0.1{\mu}A$, and compared with result of two dimensional simulation. Since results between this model and 2D simulation are good agreement, threshold voltage shift is investigated for channel dimension and doping concentration of junctionless CSG MOSFET. As a result, threshold voltage shift increases for large channel radius and oxide thickness. It is resultingly shown that threshold voltage increases for the large difference of doping concentrations between source/drain and channel.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.18 no.3
• /
• pp.651-656
• /
• 2014

This paper analyzed the change of subthreshold swing for channel doping of asymmetric double gate(DG) MOSFET. The subthreshold swing is the factor to describe the decreasing rate of off current in the subthreshold region, and plays a very important role in application of digital circuits. Poisson's equation was used to analyze the subthreshold swing for asymmetric DGMOSFET. Asymmetric DGMOSFET could be fabricated with the different top and bottom gate oxide thickness and bias voltage unlike symmetric DGMOSFET. It is investigated in this paper how the doping in channel, gate oxide thickness and gate bias voltages for asymmetric DGMOSFET influenced on subthreshold swing. Gaussian function had been used as doping distribution in solving the Poisson's equation, and the change of subthreshold swing was observed for projected range and standard projected deviation used as parameters of Gaussian distribution. Resultly, the subthreshold swing was greatly changed for doping concentration and profiles, and gate oxide thickness and bias voltage had a big impact on subthreshold swing.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.19 no.2
• /
• pp.401-406
• /
• 2015

The change of subthreshold swing for channel length of asymmetric double gate(DG) MOSFET has been analyzed. The subthreshold swing is the important factor to determine digital chracteristics of transistor and is degraded with reduction of channel. The subthreshold swing for channel length of the DGMOSFET developed to solve this problem is investigated for channel thickness, oxide thickness, top and bottom gate voltage and doping concentration. Especially the subthreshold swing for asymmetric DGMOSFET to be able to be fabricated with different top and bottom gate structure is investigated in detail for bottom gate voltage and bottom oxide thickness. To obtain the analytical subthreshold swing, the analytical potential distribution is derived from Possion's equation, and Gaussian distribution function is used as doping profile. As a result, subthreshold swing is sensitively changed according to top and bottom gate voltage, channel doping concentration and channel dimension.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
• /
• 2012.10a
• /
• pp.835-837
• /
• 2012

In this paper, we have been analyzed conduction path by device parameter of double gate(DG) structure that have top gate and bottom gate. The Possion equation is used to analytical. The change of conduction path have been investigated for various channel lengths, channel thickness and gate oxide thickness using this model, given that these parameters are very important in design of DGMOSFET. The optimum channel doping concentration is determined as the deviation of conduction path is considered according to channel doping concentration.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
• /
• 2000.05a
• /
• pp.470-473
• /
• 2000

The metal-oxide-semiconductor field-effect transistor(MOSFET) has undergone many changes in the last decade in response to the constant demand for increased speed, decreased power, and increased patting density. The devices are scaled down day by day. Therefore, This paper investigates how MOSFET structures influence on transport properties in according to change of channel length and bias and, observes impact ionization between the drain and the gate. This paper proposes three models, i.e., conventional MOSFET, LDD MOSFET and EPI MOSFET. The gate lengths are 0.3$\mu\textrm{m}$ 0.15$\mu\textrm{m}$, 0.075$\mu\textrm{m}$ and scaling factor is λ = 2. We have presented MOSFET's characteristics such as I-V characteristic, impart ionization, electric field, using the TCAD. We have analyzed the adaptive channel and doping influences

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
• /
• 2022.10a
• /
• pp.121-122
• /
• 2022

In this paper, the device performance with the structure of Nanosheet FET (NSFET) and FinFET is simulated through a three-dimensional device simulator. Current-voltage characteristics of NSFET and FinFET were simulated with respect to channel doping concentrations, and the performance such as threshold voltage and subthreshold swing extracted from the current-voltage characteristics was compared. NSFET flows more drain current and has a higher threshold voltage in current-voltage characteristics depending on channel doping concentration than that of FinFET. The subthreshold voltage swing (SS) of NSFET is steeper than that of FinFET

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
• /
• 2006.05a
• /
• pp.861-864
• /
• 2006

In this paper conduction phenomena have been considered for nano structure double gate MOSFET, using the analytical model. The Possion equation is used to obtain the analytical model. The conduction mechanisms to have an influence on current conduction are thermionic emission and tunneling current, and subthreshold swings of this paper is compared with those of two dimensional simulation to verify this model. The deviation of current path and the influence of current path on subthreshold swing have been considered according to the dimensional parameters of double gate MOSFET, i.e. gate length, gateoxide thickness, channel thickness. The optimum channel doping concentration is determined as the deviation of conduction path is considered according to channel doping concentration.