Mode conversion type ultrasonic rotary motor using bolt tightened Langevin type vibrator was studied. Driving frequency of the motor, displacements and elliptical trajectories at tip of the coupler were simulated by finite element analysis program (ANSYS). Speed and torque of the fabricated motor were measured as functions of input voltage and load. As results, from FEA the driving frequency of 40.8[kHz] and useful elliptical trajectories were found. Fabricated motor rotated clockwise at frequency of 38.2[kHz]. Speed and torque of the motor were increased when the input voltage was increased. Maximum speed, torque and efficiency were 75[rpm], 0.14[Nm] and 6.28[％], respectively.

The perovskite ferroelectric materials of the PZT, SBT and BST series will attract much attention for application to ULSI devices. Among these materials, the BST ($Ba_0.6$$Sr_0.4$/$TiO_3$) is widely considered the most promising for use as an insulator in the capacitors of DRAMS beyond 1 Gbit and high density FRAMS. Especially, BST thin films have a good thermal-chemical stability, insulating effect and variety of Phases. However, BST thin films have problems of the aging effect and mismatch between the BST thin film and electrode. Also, due to the high defect density and surface roughness at grain boundarys and in the grains, which degrades the device performances. In order to overcome these weakness, we first applied the chemical mechanical polishing (CMP) process to the polishing of ferroelectric film in order to obtain a good planarity of electrode/ferroelectric film interface. BST ferroelectric film was fabricated by the sol-gel method. And then, we compared the surface characteristics before and after CMP process of BST films. We expect that our results will be useful promise of global planarization for FRAM application in the near future.

Low-Pressure inductively coupled RF discharge sources have important industrial applications mainly because they can provide a high-density electrodeless plasma source with low ion energy and low power loss. In an inductive discharge, the RF power is coupled to the plasma by an electromagnetic interaction with the current flowing in a coil. In this paper, the experiments have been focussed on the electric characteristic and carried out using a single Langmuir probe. The internal electric characteristics of inductively coupled Ar RF discharge at 13.56(MHz) have been measured over a wide range of power at gas pressure ranging from 1∼70(mTorr).

A voltage transformer(VT) used for the estabilishment of high voltage national standard, has generally ratio error and phase angle error. Both errors in VT depend critically on values of external burden of VT used. Both ratio ewer and phase angle error in existence of the external burden is calculated. These calculated values are very well consistent with the experimental result. The principle and the measurement method of VT in our institute are also explained.

This paper shows property conversion of water and removing characteristics of Escherichia coli for discharge tube with $ZrO_2$ beads. At the result of the removal characteristic experiments of Escherichia coli using the discharge tube with $ZrO_2$ beads, because the electric field is also increased when input voltage is increased, the removal characteristic of Escherichia coli was appeared relation connection to input voltage. And if a passing number of test water in discharge tube with $ZrO_2$beads is increased, the removal ratio of Escherichia coli is to be increased because passing number of electric field section is increased. And if diameter of $ZrO_2$beads is increased, the removal time of Escherichia coli is to be decreased because dielectric polalization of $ZrO_2$beads. Also, the removal ratio of Escherichia coli of the discharge tube with $ZrO_2$beads. is appeared higher than the removal ratio of the discharge tube without $ZrO_2$beads. And a satulation punt of ozone and $H_2$ $O_2$generation density inner water was appeared near 60[min].

This paper deals with the effective protection method for the household electric appliances against lightning surges invading from the Power lines. Direct or induced lightning is the main cause of the breakdown of household electric appliance. The most effective protection method is to install SPDs(surge protective devices) at household electric appliances. If SPDs were not installed at most household electric appliances, it is necessary to install SPDs on the mains. Therefore the propagation aspect and protection methods of lighting surges coming into household electric appliances through the mains was experimentally investigated. The in actual-sized test circuits results of protection method for 8 household electric appliances including computer monitors and TV set could be summarized as follows: The breakdown characteristics of household electric appliances from lightning surges were significantly changed with the their input impedance. Namely, the types of input impedance are classified into infinite, resistive or inductive impedances. Especially, the monitor for computer with inductive input impedance from lightning surges was relatively weak against lightning surges. It was confirmed that the self inductance of branch circuits on the mains have protection effect for household electric appliances against lightning surges invading from the power lines. Also the varistors installed at cabinet panel or circuit-breaker were more effective than multi-tap outlet with varistors. When installed varistors in cabinet panel and multi-tap outlet together, the surge protection effect is much more excellent in technical and economical aspects.

We present a simple analytical expression of plasma density by making use of the electron density equation to study the dynamic behavior of the corona discharge plasma. It assumes that a specified voltage profile is fed through the inner conductor of the reactor chamber consisting of two coaxial conducting cylinders. The analytical description is based on the electron continuity equation with ionization and attachment by electrons. It is found that the electron density profile calculated between two coaxial cylindrical electrodes depends very sensitively on the Profile of applied voltage. The analytical expression of plasma density and its generation will provide important scaling laws in the corona discharge plasma.

The scale model grounding systems to study the behavior of grounding system in uniform soils have been designed and fabricated. Constructional details and instrumentation have been discussed. To verify the accuracy of the results obtained from the experimental tests, they have been compared with computer calculation results. Also, in order to assess the effectiveness of bonding two grounding systems, grounding grid conductors which were downsized as a scale factor of 100:1 were analyzed by using the scale model method. A profile of GPR(Grounding Potential Rise) of each case was measured. The scale model grounding system presented in this paper can be valuable tool to analyze the ground potential profile and ground resistance of practical grounding system.

On-line monitoring system(OMS) has been developed for the pumped storage generator/motor The OMS is applied to diagnosis of the PD(partial discharge) activity of stator insulation, the shorted-turn of rotor winding and the variation of the air-gap between stator and rotor. The OMS consists of DAS(data acquisition system), main server system, gateway and display PC. The DAS measures the PD, the shorted-turn and air-gap from three sensors installed on the generator/motor. The gateway controls the data which sent by DAS. The main server system saves the data, analyzes the data and conducts the diagnostic algorithm. The display PC shows the diagnostic results of partial discharge, shorted-turn and air-gap. Field tests were conducted using PDA(partial discharge analyzer). The results of the OMS and PDA measurements can be directly correlated with normalized quantity number(NQN), PD magnitude(Qm) and PD pattern.

In order to increase the coupling efficiency of the Power and Phase of the active Phase way antenna, we have fabricated the active phased-array antenna which is coupled by the transmission line, and investigated the relationship between the length of the coupling transmission line and coupling power and phase. The following three types of driving method -(1) giving the frequency difference between the two active antenna, (2) applying the input signal to the one side of the two antennas, and changing the eigen frequency of the other side antenna, (3) appling the different phase inputs to the active antennas was investigated. The experimental results showed that the interval of the antenna elements has not affected the power and the phase of the antenna.

In this paper, 2.4GHz WLAN BPF(Band Pass Filter) which has two DGS(Defected Ground Structure) unit cells was simulated and manufactured. To do this, a unit DGS resonator with resonant frequency is designed. Then the BPF for WLAN with the center frequency of 2.4GHz md the bandwidth of 200MHz is designed using two DGS resonator, finally this circuit is fabricated. We also proposed the equivalent circuit of the BPF employing two DGS resonator. The BPF with DGS was obtained experimental results with network analyzer Agilent 8510C. The measured result shows good agreement with simulated data. Experimental results show the center frequency of 2.45GHz, the insertion loss of 1.08dB, and the 3-dB bandwidth of 470MHz(19.5%). Acceding to the measured values, it is found that the fabricated DGS BPF is available for wireless LAN.