We fabricated switch module of ATM(Asynchronous Transfer Mode) exchange system with MCM-C(MultiChip Module Co-fired) technology and measured its electrical characteristics. Green tape was used as substrate and Au/Ag paste was used to form the interconnect layers. The via holes were made by drill and filled with metal paste usign screen method. After manufacturing the substrate, chips and passive components were assembled on the substrate. In electrical test, the module showed the output signal of 46.9MHz synchronized with input signal. In the view of substrate size reduction, the area of MCM switch module was 35% of conventional hybrid switch module.

We report the effects of etch process parameters on the ohmic contact formation in the plasma etching of GaN. Planar inductively coupled plasma system with $CH_4/H_2/Ar$gas chemistry has been used as etch reactor. The contact resistance and the specific contact resistance have been investigated using transfer length method as a function of RF bias power and %Ar gas concentration in total flow rate. AES(Auger electron spectroscopy) analysis revealed that the etched GaN has nonstoichiometric Ga rich surface and was contaminated by carbon and oxygen. Especially large amount of carbon was detected at the sample etched for high bias power (or voltage) condition, where severe degradation of contact resistance was occurred. We achieved the low ohmic contact of $2.4{\times}10^{-3} {\Omega}cm^2$ specific contact resistance at the input power 400 W, RF bias power 150 W, and working pressure 10mTorr with 10 sccm $CH_4$, 15 sccm H2, 5 sccm Ar gas composition.

Many successful developments and microscopic studies have been made on the high quality insulating materials. However, a little attention have given to the macroscopic interface in HV(High Voltage) insulating systems. In this study, AC interfacial breakdown strength and V-t characteristic of the interface between Epoxy/EPDM(ethylene propylene diene terpolymer) are investigated. Electrode system is designed to reduce the charges from electrodes and to have the tangential potentials along the interface between Epoxy/EPDM by FEM(finite elements method). The AC breakdown strength is observed when HV is given to the interface. It is shown that AC interfacial breakdown strength is improved by increasing interfacial pressure and oiling. In particular, it was saturated at certain interfacial pressure level. V-t characteristic is able to extend to the life time of the interface between Epoxy/EPDM. Oiling also plays a good roll in prolongation of the life time.

We have grown vertically aligned carbon nanotubes in a large area of Co-Ni codeposited Si substrates by the thermal CVD usign $C_2H_2$ gas. Since the discovery of carbon nanotubes, growth of carbon nanotubes has been achieved by several methods such as laser vaporization, arc discharge, and pyrolysis. In particular, growth of vertically aligned nanotubes is important to flat panel display applications. Recently, vertically aligned carbon nanotubes have been grown on glass by PECVD. Aligned carbon nanotubes can be also grown on mesoporous silica and Fe patterned porous silicon using CVD. In this paper, we demonstrate that carbon nanotubes can be vertically aligned on catalyzed Si substrate when the domain density of catalytic particles reaches a certain value. We suggest that steric hindrance between nanotubes at an initial stage of the growth forces nanotubes to align vertically and each nonotubes are grown in bundle.

The inhibiting effects of electrical treeing and insulation properties of LDPE contained with treeing inhibitors was studied under radiation environment. Barbituric acid and its derivatives were selected as treeing inhibitors. The inception voltage and growth of tree, AC breakdown strength, volume resistivity, high frequency capacitance, and dissipation factor were observed as a function of dose(up to 1000 kGy). And also, measurements of thermo-luminescence(TL), and gel content were carried out. Crosslinked low density polyethylene(XLPE) contained with treeing inhibitors shows better insulation characteristics such as electrical tree propagation, AC breakdown strength, and volume resistivity than those of pure LDPE. The most effective treeing inhibitor was found on the barbituric acid contained XLPE.

In this paper, the new LIGBT structures with trap injection are proposed to improve switching characteristics of the conventional SOI LIGBT. The Simulations are performed in order to investigate the effects of the positiion, whidth and concentration of trap injection region with a reduced minority carrier lifetime using 2D device simulator MEDICI. Their electrical characteristics are analyzed and the optimum design parameters are extracted. As a result of simulation, the turn off time for the model A with the trap injection is $0.78\mus$. These results indicate the improvement of about 2 times compared with the conventional SOI LIGBT because trap injection prevents minority carriers which is stored in the n-drift region during turn off switching. The latching current is $1.5\times10^{-4}A/\mum$ and forward blocking voltage is 168V which are superior to those of conventional structure. It is shown that the trap injection is very effective to reduce the turn off time with a little increasing of on-state voltage drop if its design and process parameters are optimized.

Nowadays, ozone is mainly utilized for water treatment and home equipments. Although the demand for ozone is increasing, the ozone yield of silent discharge type ozonizer is low. Therefore, it is expected to improve the energy efficiency and ozone yield of an ozonizer. In this paper, a new ozone generation system is proposed. The 60[Hz] three-phase voltage is applied to three-phase superposed discharge type ozonizer(3PSDO) which has three electrodes(central, internal and external electrodes). There is no discharge pause time when three-phase voltage is applied due to 120-degree phase difference of applied voltage. The synergy effect of the three-phase superposed discharge type ozonizer is investigated by comparing with the three sort of single-phase discharge type ozonizer(1PDO). So, three-phase superposed discharge type ozonizer is able to obtain high ozone yield, and optimize discharge space, because this can increase the discharge power at low applied voltage.

This paper presents Pspice modeling methods for spark gaps and ZnO varistors and describes the application for the two-stage surge suppression circuit which was composed of the nonlinear components. The simulation modelings of nonlinear components were conducted on the basis of the voltage and current curves measured by the impulse current with the time-to-crest of $1~50 \mus$ and the impulse voltage with the rate of the time-to-crest of 10, 100 and 1000 V/\mus$. The firing voltages of the spark gap increased with increasing the rate of the time-to-crest of impulse voltage and the measured data were in good agreement with the simulated data. The I-V curves of the ZnO varistor were measured by applying the impulse currents of which time-to-crests range from 1 to $50 \mus$ and peak amplitudes from 10 A to 2 kA. The simulation modeling was based on the I-V curves replotted by taking away the inductive effects of the test circuit and leads. The meximum difference between the measured and calculated data was of the order of 3%. Also the two-stage surge suppression circuit made of the spark gap and the ZnO varistor was investigated with the impulse voltage of $10/1000\mus$$mutextrm{s}$ wave shape. The overall agreement between the theoretical and experimental results seems to be acceptable. As a consequence, it was known that the proposed simulation techniques could effectively be used to design the surge suppression circuits combined with nonlinear components.

This paper describes the design, fabrication and experiments of surface-micromachined aluminum micromirror array with hidden pin-joints. Instead of the conventional elastic spring components as connection between mirror plate and supporting structure, we used pin-joint composed of pin and staples to support the mirror plate. The placement of pin-joint under the mirror plate makes large active surface area possible. These flexureless micromirrors are driven by electrostatic force. As the mirror plate has discrete deflection angles, the device can be ap;lied to adaptive optics and digitally-operating optical applications. Four-level metal structural layers and semi-cured photoresist sacrificial layers were used in the fabrication process and sacrificial layers were removed by oxygen plasma ashing. Static characteristics of fabricated samples were measured and compared with modeling results.