Effect of Deposition Temperature on the Electrical Performance of SiZnSnO Thin Film Transistors Fabricated by RF Magnetron Sputtering (스퍼터 공정을 이용한 SiZnSnO 산화물 반도체 박막 트랜지스터의 증착 온도에 따른 특성)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.27 no.5
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- pp.282-285
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- 2014