• Title/Summary/Keyword: 무접합 트랜지스터

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Characterization of gate oxide breakdown in junctionless amorphous InGaZnO thin film transistors (무접합 비정질 InGaZnO 박막 트랜지스터의 게이트 산화층 항복 특성)

  • Chang, Yoo Jin;Seo, Jin Hyung;Park, Jong Tae
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.22 no.1
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    • pp.117-124
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    • 2018
  • Junctionless amorphous InGaZnO thin film transistors with different film thickness have been fabricated. Their device performance parameters were extracted and gate oxide breakdown voltages were analyzed with different film thickness. The device performances were enhanced with increase of film thickness but the gate oxide breakdown voltages were decreased. The device performances were enhanced with increase of temperatures but the gate oxide breakdown voltages were decreased due to the increased drain current. The drain current under illumination was increased due to photo-excited electron-hole pair generation but the gate oxide breakdown voltages were decreased. The reason for decreased breakdown voltage with increase of film thickness, operation temperature and light intensity was due to the increased number of channel electrons and more injection into the gate oxide layer. One should decide the gate oxide thickness with considering the film thickness and operating temperature when one decides to replace the junctionless amorphous InGaZnO thin film transistors as BEOL transistors.

Effects of thin-film thickness on device instability of amorphous InGaZnO junctionless transistors (박막의 두께가 비정질 InGaZnO 무접합 트랜지스터의 소자 불안정성에 미치는 영향)

  • Jeon, Jong Seok;Jo, Seong Ho;Choi, Hye Ji;Park, Jong Tae
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.21 no.9
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    • pp.1627-1634
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    • 2017
  • In this work, a junctionless transistor with different film thickness of amorphous InGaZnO has been fabricated and it's instability has been analyzed with different film thickness under positive and negative gate stress as well as light illumination. It was found that the threshold voltage shift and the variation of drain current have been increased with decrease of film thickness under the condition of gate stress and light illumination. The reasons for the observed results have been explained by stretched-exponential model and device simulation. Due to the reduced carrier trapping time with decrease of film thickness, electrons and holes can be activated easily. Due to the increase of vertical channel electric field reaching the back interface with decrease of film thickness, more electrons and holes can be accumulated in back interface. When one decides the film thickness for the fabrication of junctionless transistor, the more significant device instability with decrease of film thickness should be consdered.

Electrical properties of nanoscale junctionless p-channel MuGFET at cryogenic temperature (극저온에서 나노스케일 무접합 p-채널 다중 게이트 FET의 전기적 특성)

  • Lee, Seung-Min;Park, Jong-Tae
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.17 no.8
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    • pp.1885-1890
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    • 2013
  • In this paper, the electrical properties of nanoscale junctionless p-channel MuGFET at cryogenic temperature have been analyzed experimentally. The experiment was performed using a cryogenic probe station which uses the liquid Helium. It has been observed that the drain current oscillation at low drain voltage and cryogenic temperature was more pronounced in junctionless transistor than in accumulation mode transistor. The reason for more marked oscillation is due to the smaller electrical cross section area of the inversion channel which is formed at the center of silicon film in junctionless transistor. It was also observed that the drain current and maximum transconductance were increased as the measurement temperature increased. This is resulted from the increase of hole mobility and the decrease of the threshold voltage as the measurement temperature increases. The drain current oscillation due to the quantum effects can be occurred up to the room temperature when the device size scales down to the nanometer level.

Characteristic Analysis of 4-Types of Junctionless Nanowire Field-Effect Transistor (4가지 무접합 나노선 터널 트랜지스터의 기판 변화에 따른 특성 분석)

  • Oh, Jong Hyuck;Lee, Ju Chan;Yu, Yun Seop
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2018.10a
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    • pp.381-382
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    • 2018
  • Subthreshold swings (SSs) and on-currents of four types of junctionless nanowire tunnel field-effect transistor(JLNW-TFET) are observed. Ge-Si structure for the source-channel junction has the highest drive current among Si-Si, Si-Ge, and Ge-Ge junction, and the drive current increases up to 1000 times compared to others. Minimum SS of Si-Si junction is reduced by up to 5 times more than others.

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The impact of substrate bias on the Z-RAM characteristics in n-channel junctionless MuGFETs (기판 전압이 n-채널 무접합 MuGFET 의 Z-RAM 특성에 미치는 영향)

  • Lee, Seung-Min;Park, Jong-Tae
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.18 no.7
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    • pp.1657-1662
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    • 2014
  • In this paper, the impact of substrate bias($V_{BS}$) on the zero capacitor RAM(Z-RAM) in n-channel junctionless multiple gate MOSFET(MuGFET) has been analyzed experimentally. Junctionless transistors with fin width of 50nm and 1 fin exhibits a memory window of 0.34V and a sensing margin of $1.8{\times}10^4$ at $V_{DS}=3.5V$ and $V_{BS}=0V$. As the positive $V_{BS}$ is applied, the memory window and sensing margin were improved due to an increase of impact ionization. When $V_{BS}$ is increased from 0V to 10V, not only the memory window is increased from 0.34V to 0.96V but also sensing margin is increased slightly. The sensitivity of memory window with different $V_{BS}$ in junctionless transistor was larger than that of inversion-mode transistor. A retention time of junctionless transistor is better than that of inversion-mode transistor due to low Gate Induced Drain Leakage(GIDL) current. To evaluate the device reliability of Z-RAM, the shifts in the Set/Reset voltages and current were measured.

Variation of Threshold Voltage by Programming Voltage Change of a Flash Memory Device with Ge-MONOS (Ge-MONOS 구조를 가진 플레쉬 메모리 소자의 프로그래밍 전압에 따른 문턱 전압 관찰)

  • Oh, Jong Hyuck;Yu, Yun Seop
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2019.05a
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    • pp.323-324
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    • 2019
  • For flash memory devices with Ge-MONOS(metal-Oxide-Nitride-Oxide-Silicon) structures, variations of threshold voltage with programming voltage were investigated. The programming voltage was observed in steps of 1V from 10V to 17V and programmed for 1 second. The threshold voltage from 10V to 14V was about 0.5V, which is not much different from that before programing, and the threshold voltages at 15V, 16V and 17V were 1.25V, 2.01V and 3.84V, respectively, which differed 0.75V, 1.49V and 3.44V from that before programing.

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