We fabricated the monolayers onto QCM by self-assembly using viologen, which has been widely used as electron acceptor. A gold electrode of the QCM was cleaned by piranha solution and prepared the ethanol-acetonitrile(1:1) solution with 2 m mol/l viololgen compounding of pure hi gas. We determined the time dependence to resonant frequency shift during self-assembly process and the electrochemical behavior of the self-assembled viologen monolayers by cyclic voltammetry. With increasing scan rate, the redox peak current of the viologen increased linearly. This was signified that the redox reaction was reversible. The EQCM measurements revealed the anions transfer during redox reactions, respectively. From the EQCM data, the well-defined shape peaks were nearly equal charges by cyclic voltammetry.

We investigated accelerated soft error rate(ASER) in 8M static random access memory(SRAM) cells. The effects on ASER by well structure, operational voltage, and cell transistor threshold voltage are examined. The ASER decreased exponentially with respect to operational voltage. The chips with buried nwell1 layer showed lower ASER than those either with normal well structure or with buried nwell1 + buried pwell structure. The ASER decreased as the ion implantation energy onto buried nwell1 changed from 1.5 MeV to 1.0 MeV. The lower viscosity of the capping layer also revealed lower ASER value. The decrease in the threshold voltage of driver or load transistor in SRAM cells caused the increase in the transistor on-current, resulting in lower ASER value. We confirmed that in order to obtain low ASER SRAM cells, it is necessary to also the buried nwell1 structure scheme and to fabricate the cell transistors with low threshold voltage and high on-current.

Most high-k materials are well known not to be etched easily, Some problems such as low etch rate poor sidewall angle, plasma damage, and process complexity were emerged from the high-density DRAM fabrication. Chemical mechanical polishing (CMP) by a damascene process was proposed to pattern this high-k material was polished with some commercial silica slurry as a function of pH variation. Sufficient removal rate with adequate selectivity to realize the pattern mask of tera-ethyl ortho-silicate (TEOS) film for the vertical sidewall angle were obtained. The changes of X-ray diffraction pattern and dielectric constant by CMP process were negligible. The planarization was also achieved for the subsequent multi-level processes. Our new CMP approach will provide a guideline for effective patterning of high-k material by CMP technique.

In this study, composite materials were put to dry interfacial treatment by use of plasma technology It has been presented that the optimum parameters for the best wettability of the samples at the time of generation of plasma were oxygen atmosphere, 0.1 Torr of system pressure, 100 W of discharge power, and 3 minutes of discharge time. The decrease in surface potential of charged samples by corona discharge indicates that the amount of accumulated electrical charges reduces and the charges that have been injected lessen rapidly when the duration of UV irradiation increases. The surface resistivity and the tensile strength of plasma treated samples, a longer UV irradiation time resulted in decreased insulation.

This Paper describes a dual bands PD measurement method which has two different bandwidths. The one bandwidth is 0.5 - 2 GHz and the other is 1 - 2GHz. This method is used for GIS diagnosis. In the experiment, it shows that the ratios between two PD quantities in dual bands depend on the defect types and gas pressures. The variations of ratios in different pressures are more sensitive than ones in defect types. And These ratios increase with increasing SF6 gas pressures. As these ratios give us additive information of PD we can analyze the defect type as well as risk assessment for the GIS reliably. Therefore the above result shows that these ratios are one of parameters for diagnosing GIS.

A potential transformer(PT) has ratio error and phase angle error. Precise measurement of the errors of PT can be achieved using high voltage capacitance bridge, high voltage capacitor and low voltage capacitor. The uncertainty for this method is evaluated and found to be $20{\times}10^{-6}$ in both ratio error and phase angle error. The values measured for PT using the method are well consistent with the those measured for same PT in NMIA(National Measurement Institute of Australia) within the corresponding uncertainty.

The resonances that contain the information on the properties of the scattering target can be used for target reconstruction approaches. The inverse scattering theory for the resonances has been applied to the problems of the scattering for a spherical, cylindrical dielectric objects and dielectrically coated conductors, shown reasonable results. Though by using this method the thickness and the dielectric constants of the target can be obtained from a determination of the spacing and of the widths of the scattering resonances, the radius of the target should be given. In this paper, we suggest the improved inverse theory combined with the resonance scattering theory to obtain the radius in addition to the dielectric constant of the target. The applications of this method for scattering problems of electromagnetic waves from cylindrical targets were accomplished, and it shows its validity.

This paper presents a torsional micromirror detached from PZT actuators (TMD), whose rotational motion is achieved by push bars in the PZT actuators detached from the micromirror. The push bar mechanism is intended to reduce the bending, tensile and torsional constraints generated by the conventional bending bar mechanism, where the torsional micromirror is attached to the PZT actuators (TMA). We have designed, fabricated and tested prototypes of TMDs for single-axis and dual-axis rotation, respectively. The single-axis TMD generates the static rotational angle of $6.1^{\circ}$ at 16 VDC, which is 6 times larger than that of single-axis TMA, $0.9^{\circ}$. However, the rotational response curve of TMD shows hysteresis due to the static friction between the cover and the push bar in the PZT actuator. We have shown that 63.2% of the hysteresis is due to the static friction caused by the initial contact force of the PZT actuaor. Without the initial contact force, the rotational response curve of TMD shows linear voltage-angle characteristics. The dual-axis TMD generates the static rotational angles of $5.5^{\circ}$ and $4.7^{\circ}$ in x-axis and y-axis, respectively at 16 VDC. The measured resonant frequencies of dual-axis TMD are $2.1\pm0.1$ kHz in x-axis and $1.7\pm0.1$ kHz in y-axis. The dual-axis TMD shows stable operation without severe wear for 21.6 million cycles driven by 16 Vp-p sinusoidal wave signal at room temperature.

In whole world consciousness of environment maintenance have increased very quickly for the end of the 20th century. To use and disuse toxic substances have been controled at the field of industry. Also the field of lighting source belong to environmental control. And in the future the control will be strong. In radiational mechanism of fluorescence lamp mercury is the worst environmental problem and root. In the mercury free lighting source system the Xe gas lamp is one type. And the Ne:Xe and Ne:Ar mixed gas lamp improve firing voltage of Xe gas lamp. Purpose of this study is to understand ideal mixing-ratio of Ne:Xe and Ne:Ar gas by electron temperature and electron density for mercury free lamp. Before ICP was designed, basic parameters of plasma, which are electron temperature and electron density, were measured and calculated by single-Langmuir probe. Property of electron temperature and electron density were confirmed by changing ratio of Ne:Xe and Ne:Ar.