The Electron Temperature and Density Properties of Mixed Gases in ICP Lighting System : (Ne:Xe, Ne:Ar) |
Lee, Jong-Chan
(금호전기(주) 부설연구소)
Choi, Yong-Sung (동신대학교) Park, Dae-Hee (원광대학교) Choi, Gi-Seung (원광대 전자재료공학과) |
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