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The Electron Temperature and Density Properties of Mixed Gases in ICP Lighting System : (Ne:Xe, Ne:Ar)  

Lee, Jong-Chan (금호전기(주) 부설연구소)
Choi, Yong-Sung (동신대학교)
Park, Dae-Hee (원광대학교)
Choi, Gi-Seung (원광대 전자재료공학과)
Publication Information
The Transactions of the Korean Institute of Electrical Engineers C / v.55, no.3, 2006 , pp. 156-160 More about this Journal
Abstract
In whole world consciousness of environment maintenance have increased very quickly for the end of the 20th century. To use and disuse toxic substances have been controled at the field of industry. Also the field of lighting source belong to environmental control. And in the future the control will be strong. In radiational mechanism of fluorescence lamp mercury is the worst environmental problem and root. In the mercury free lighting source system the Xe gas lamp is one type. And the Ne:Xe and Ne:Ar mixed gas lamp improve firing voltage of Xe gas lamp. Purpose of this study is to understand ideal mixing-ratio of Ne:Xe and Ne:Ar gas by electron temperature and electron density for mercury free lamp. Before ICP was designed, basic parameters of plasma, which are electron temperature and electron density, were measured and calculated by single-Langmuir probe. Property of electron temperature and electron density were confirmed by changing ratio of Ne:Xe and Ne:Ar.
Keywords
Inductively Coupled Plasma (ICP); Ne:Xe; Ne:Ar; Electron Temperature; Electron Density; Lighting Source;
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