Accurate temperature measurement is a key factor to implement the rapid thermal processing(RTP). A temperature estimation method using acoustic wave has been proposed to overcome the inaccuracy and contamination problem of the previous methods. The proposed method, however, may suffer from the offset and low resolution problem since it is implemented in the time domain. This paper presents a temperature estimation method using the phase detection of acoustic wave. Based on the frequency domain approach, the proposed technique increases the resolution of the measured temperature and reduces the effect of noise. We investigate the performance of the proposed method via experiments.

A low-cost, large area, random, maskless texturing scheme independent of crystal orientation is expected to significantly impact terrestrial photovoltaic technology. We investigated silicon surface microstructures formed by reactive ion etching (RIE) in Multi-Hollow cathode system. Desirable texturing effect has been achieved when radio-frequency (rf) power of about 20 Watt per one hollow cathode glow is applied for our RF Multi-Hollow cathode system. The black silicon etched surface shows almost zero reflectance in the visible region as well as in near IR region. The etched silicon surface is covered by columnar microstructures with diameters from 50 to 100 nm and depth of about 500 nm. We have successfully achieved 11.7% efficiency of mono-crystalline silicon solar cell and 10.2% multi-crystalline silicon solar cell.

In this study, microscale, high-performance, solenoid-type RF chip inductors were investigated. The size of the RF chip inductors fabricated in this work was 1.0${\times}$0.5${\times}$0.5㎣. 96% $Al_2$ $O_3$and I-type were used as the material and shape of the core, respectively. The copper (Cu) wire with 6 turns was employed as the coils. The diameter (40${\mu}{\textrm}{m}$) and position (middle) of the coil and the length (0.35mm) of solenoid were determined by a high-frequency structure simulator (HFSS) to maximize the performance of the inductors. High frequency characteristics of the inductance (L) and quality-factor (Q) of developed inductors were measured using an RF Impedance/Material Analyzer (HP4291B with HP16193A test fixture). The inductors developed have inductances of 10.8nH and quality factors of 25.2 to 50 over the frequency ranges of 250MHz to l GHz, and show results comparable to those measured for the inductors prepared by CoilCraf $t^{Tm}$ . The simulated data predicted the high-frequency data of the L and Q of the inductors developed well.l.

In this paper, electrical characteristics of inductively coupled plasma in an electrodeless fluorescent lamp were investigated using a Langmuir probe with a variation of argon gas pressure. The RF output was applied in the range of 5 ∼ 50 (W) at 13.56 (MHz). The internal plasma voltage of the chamber and the probe current were measured while varying the supply voltage to the Langmuir probe in the range of -100 (V) ∼+100 (V). When the pressure of argon gas was increased, electric current was decreased. There was a significant electric current increase from l0W to 30 〔W〕. Also, when the RF power was increased, electron density was increase. This implies that this method can be used to find an optimal RF rower for efficient light illumination in an electrodeless fluorescent lamp.

This paper is to investigate how partial discharge pulse signal can flow in 6.6㎸ motor stator windings. Pulse propagation is experimentally analyzed in stator windings using a variety of frequency-domain techniques. The experiments were performed on two stator windings in the laboratory. Spectrum analyzer(9KHz to 3㎓) with tracking generator(100kHz to 3㎓) was used. Sweep time of the tracking generator was looms. The frequency spectrum of the response signal was detected by active FET probe(1㎓). The active FET probe has a flat amplitude response up to 1㎓ without high frequency attenuation. The stator winding acts as a low-pass filter below 600KHz, the high-frequency components being highly declined. The resonance peaks show about 1.1MHz and 2MHz in low frequency of No. 1 and No. 2 stator windings, respectively. This low-frequency range indicates that attenuation is low. The peaks of partial discharge magnitude show about 900MHz, 1.6MHz in No. 1 stator winding and about 800KHz, 1.4MHz in No. 2 stator winding.

A novel dual beam heterodyne Laser Doppler Vibrometer (LDV) in conjunction with FM demodulators, which utilizes a residual beam to eliminate the perturbationdue due to the vibrometer body vibration without any external reference surface, has been developed. Residual laser beam from the beam splitter is used to pick up the vibration of damper, which is mounted in the vibrometer, and combined with reference beam at the photodetector. The output signal of this detector and main signal are processed to extract the object vibration, using a least mean square adaptive algorithm. It is shown experimentally that the body vibration of 1-5 Hz can be effectively removed from the measured signal using DSP technology to extract unperturbed 100 Hz original signal.

A varactor diode was utilized in order to expand variable range of the natural oscillation frequency of an active phased-array antenna. We have conformed experimentally that the variable range of the natural oscillation frequency was expanded about three times in the oscillator controlled by the varactor diode. When frequency difference was given to the oscillators in the two elements antenna system, phase difference was appeared between the oscillators. The 2-, 3-, 5-elements patch antenna array was composed for the beam scanning experiments. All the above patch antennas showed good phased array characteristics. The experimental results are as follows that the scanning angle of the 2-elements array antenna is 28.6$^{\circ}$, the 3-elements array antenna is 29.4$^{\circ}$, and the 5-elements array antenna is 26.2$^{\circ}$.

In this paper, we presents the characteristics of the new electrode structure in an AC Plasma Display Panel(PDP) that can generate dual mode discharges with a combination of short-gap and long-gap discharges. The experiment results show that the discharge voltage of the new electrode structure is mainly determined by short-gap discharge and the luminous efficiency is improved by 20% compared with the conventional electrode structure. The improvement of luminous efficiency is mainly caused by higher VUV generation and broader distribution from Ole ICCD camera measurements.

In this paper, we describe a unique self oscillating and mixing (SOM) down-converter design using a modified defected ground structure (DGS). The proposed SOM converter is consisted of self-oscillator, which can produce negative resistance and select resonance frequency, RF matching circuit, and IF low pass filter. As the advantage of this SOM converter can mix LO and RF signals as well as inducing LO signal with only one active device. it is designed as a simple structure and the low cost. Also, there is easy advantage to be applied in RFIC/MMIC technology because it offers excellent phase noise performance in spite of using micro-strip structure. The LO signal for the proposed SOM converter is designed at 1㎓ and RF frequency was chosen to be 800MHz. The achieved conversion loss and phase noise performances of the implemented SOM converter are 15㏈ and -95dBc/Hz at 100KHz offset frequency respectively. The equivalent circuit parameters for DGS are extracted by using a three dimensional EM simulator and simple circuit analysis method.