Micromirrors Driven by Detached Piezoelectric Microactuators For Low-voltage and Wide-angle Rotation

This paper presents a torsional micromirror detached from PZT actuators (TMD), whose rotational motion is achieved by push bars in the PZT actuators detached from the micromirror. The push bar mechanism is intended to reduce the bending, tensile and torsional constraints generated by the conventional bending bar mechanism, where the torsional micromirror is attached to the PZT actuators (TMA). We have designed, fabricated and tested prototypes of TMDs for single-axis and dual-axis rotation, respectively. The single-axis TMD generates the static rotational angle of $6.1^{\circ}$ at 16 VDC, which is 6 times larger than that of single-axis TMA, $0.9^{\circ}$. However, the rotational response curve of TMD shows hysteresis due to the static friction between the cover and the push bar in the PZT actuator. We have shown that 63.2% of the hysteresis is due to the static friction caused by the initial contact force of the PZT actuaor. Without the initial contact force, the rotational response curve of TMD shows linear voltage-angle characteristics. The dual-axis TMD generates the static rotational angles of $5.5^{\circ}$ and $4.7^{\circ}$ in x-axis and y-axis, respectively at 16 VDC. The measured resonant frequencies of dual-axis TMD are $2.1\pm0.1$ kHz in x-axis and $1.7\pm0.1$ kHz in y-axis. The dual-axis TMD shows stable operation without severe wear for 21.6 million cycles driven by 16 Vp-p sinusoidal wave signal at room temperature.

저전압 대회전을 위한 분리된 압전 구동기에 의한 미소거울