• ETRI Journal
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• 제42권4호
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• pp.468-479
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• 2020

The proposed AI processor architecture has high throughput for accelerating the neural network and reduces the external memory bandwidth required for processing the neural network. For achieving high throughput, the proposed super thread core (STC) includes 128 × 128 nano cores operating at the clock frequency of 1.2 GHz. The function-safe architecture is proposed for a fault-tolerance system such as an electronics system for autonomous cars. The general-purpose processor (GPP) core is integrated with STC for controlling the STC and processing the AI algorithm. It has a self-recovering cache and dynamic lockstep function. The function-safe design has proved the fault performance has ASIL D of ISO26262 standard fault tolerance levels. Therefore, the entire AI processor is fabricated via the 28-nm CMOS process as a prototype chip. Its peak computing performance is 40 TFLOPS at 1.2 GHz with the supply voltage of 1.1 V. The measured energy efficiency is 1.3 TOPS/W. A GPP for control with a function-safe design can have ISO26262 ASIL-D with the single-point fault-tolerance rate of 99.64%.

• 대한전자공학회논문지SD
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• 제42권5호
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• pp.47-54
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• 2005

본 논문에서는 Crosstalk에 의한 coupling capacitance의 변화량, ${\Delta}Cc$이 기본값인 Cc보다 더 커질 수 있음을 제안한 테스트 회로를 이용하여 실험적으로 증명하였다. 또한 ${\Delta}Cc$가 Aggressive line의 위상에 매우 의존함을 보였으며 위상이 같은 경우보다 반대인 경우에 ${\Delta}Cc$가 크게 됨을 보였다. 실험 결과의 타당성을 검증을 위해 HSPICE 시뮬레이션을 수행하여 실험치와 잘 맞음을 나타내었다.

• 마이크로전자및패키징학회지
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• 제27권1호
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• pp.17-24
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• 2020

As an interconnect scaling faces a technical bottleneck, the device stacking technologies have been developed for miniaturization, low cost and high performance. To manufacture a stacked device structure, a vertical interconnect becomes a key process to enable signal and power integrities. Most bonding materials used in stacked structures are currently solder or Cu pillar with Sn cap, but copper is emerging as the most important bonding material due to fine-pitch patternability and high electrical performance. Copper bonding has advantages such as CMOS compatible process, high electrical and thermal conductivities, and excellent mechanical integrity, but it has major disadvantages of high bonding temperature, quick oxidation, and planarization requirement. There are many copper bonding processes such as dielectric bonding, copper direct bonding, copper-oxide hybrid bonding, copper-polymer hybrid bonding, etc.. As copper bonding evolves, copper-oxide hybrid bonding is considered as the most promising bonding process for vertically stacked device structure. This paper reviews current research trends of copper bonding focusing on the key process of Cu-SiO₂ hybrid bonding.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2011년도 추계학술발표대회
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• pp.9-9
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• 2011

The transfer of nano-science accomplishments into technology is severely hindered by a lack of understanding of barriers to nanoscale manufacturing. The NSF Center for High-rate Nanomanufacturing (CHN) is developing tools and processes to conduct fast massive directed assembly of nanoscale elements by controlling the forces required to assemble, detach, and transfer nanoelements at high rates and over large areas. The center has developed templates with nanofeatures to direct the assembly of carbon nanotubes and nanoparticles (down to 10 nm) into nanoscale trenches in a short time (in seconds) and over a large area (measured in inches). The center has demonstrated that nanotemplates can be used to pattern conducting polymers and that the patterned polymer can be transferred onto a second polymer substrate. Recently, a fast and highly scalable process for fabricating interconnects from CMOS and other types of interconnects has been developed using metallic nanoparticles. The particles are precisely assembled into the vias from the suspension and then fused in a room temperature process creating nanoscale interconnect. The center has many applications where the technology has been demonstrated. For example, the nonvolatile memory switches using (SWNTs) or molecules assembled on a wafer level. A new biosensor chip (0.02 $mm^2$) capable of detecting multiple biomarkers simultaneously and can be in vitro and in vivo with a detection limit that's 200 times lower than current technology. The center has developed the fundamental science and engineering platform necessary to manufacture a wide array of applications ranging from electronics, energy, and materials to biotechnology.

• 한국재료학회지
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• 제16권9호
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• pp.571-577
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• 2006

We fabricated thermal evaporated 10 nm-Ni/(poly)Si and 10 nm-Ni/1 nm-Ir/(poly)Si films to investigate the thermal stability of nickel monosilicide at the elevated temperatures by rapid annealing them at the temperatures of $300{\sim}1200^{\circ}C$ for 40 seconds. Silicides for salicide process was formed on top of both the single crystal silicon actives and the polycrystalline silicon gates. A four-point tester is used for sheet resistance. Scanning electron microscope and field ion beam were employed for thickness and microstructure evolution characterization. An x-ray diffractometer and an auger depth profile scope were used for phase and composition analysis, respectively. Nickel silicides with iridium on single crystal silicon actives and polycrystalline silicon gates showed low resistance up to $1200^{\circ}C$ and $800^{\circ}C$, respectively, while the conventional nickel monosilicide showed low resistance below $700^{\circ}C$. The grain boundary diffusion and agglomeration of silicides led to lower the NiSi stable temperature with polycrystalline silicon substrates. Our result implies that our newly proposed Ir added NiSi process may widen the thermal process window for nano CMOS process.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.10-10
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• 2008

Silicide is inevitable for CMOSFETs to reduce RC delay by reducing the sheet resistance of gate and source/drain regions. Ni-silicide is a promising material which can be used for the 65nm CMOS technologies. Ni-silicide was proposed in order to make up for the weak points of Co-silicide and Ti-silicide, such as the high consumption of silicon and the line width limitation. Low resistivity NiSi can be formed at low temperature ($\sim500^{\circ}C$) with only one-step heat treat. Ni silicide also has less dependence of sheet resistance on line width and less consumption of silicon because of low resistivity NiSi phase. However, the low thermal stability of the Ni-silicide is a major problem for the post process implementation, such as metalization or ILD(inter layer dielectric) process, that is, it is crucial to prevent both the agglomeration of mono-silicide and its transformation into $NiSi_2$. To solve the thermal immune problem of Ni-silicide, various studies, such as capping layer and inter layer, have been worked. In this paper, the Ni-silicide utilizing Pd stacked layer (Pd/Ni/TiN) was studied for highly thermal immune nano-scale CMOSFETs technology. The proposed structure was compared with NiITiN structure and showed much better thermal stability than Ni/TiN.

• 한국화재소방학회논문지
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• 제26권1호
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• pp.74-79
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• 2012

본 논문은 2011년 개정된 "감지기 형식승인 및 검정기술기준"에 적합한 단독경보형 감지기 개발에 관한 연구이다. 변경된 내용의 가장 큰 특징은 전원이다. 10년 이상 사용 가능한 단독경보형 감지기를 개발하기 위해 나노전력기술이 사용된 저전력 마이크로컨트롤러를 사용하였다. 마이크로컨트롤러의 슬립모드를 활용하고, 저전력의 전원감시부, 열감지부 및 연기감지부를 제작하여 저전력 단독경보형 감지기를 개발하였다. 특히, 비화재보를 줄이기 위해 단독경보형 감지기는 열연 복합식으로 개발되었다. 사용자는 딥스위치를 이용하여 열감지모드 또는 열 연기감지모드로 동작형태를 선택할 수 있다. 마이크로컨트롤러가 지원하는 RS-485 통신기능을 활용하여 유선으로 단독경보형 감지기 간에 통신이 가능하도록 하였다. 이로써 화재발생시 보다 넓은 지역까지 경보를 알릴 수 있고 비화재보를 줄인 열연 복합식 단독경보형 감지기를 개발하였다.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2004년도 하계종합학술대회 논문집(2)
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• pp.371-374
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• 2004

In this paper, Ni Germane-silicide formed on undoped $Si_{0.8}Ge_{0.2}$ as well as source/drain dopants doped $Si_{0.8}Ge_{0.2}$ was characterized by the four-point probe for sheet resistance. x-ray diffraction (XRD), x-ray photoelectron spectroscopy (XPS) and field emission scanning electron microscope (FESEM). Low resistive NiSiGe is formed by one step RTP (Rapid thermal processing) with temperature range at $500{\~}700^{\circ}C$. To enhance the thermal stability of Ni Germane-silicide, Ni/Co/TiN structure with different Co concentration were studied in this work. Low sheet resistance was obtained by Ni/Co/TiN structure with high Co concentration using 2-step RTP and it almost keeps the same low sheet resistance even after furnace annealing at $650^{\circ}C$ for 30 min.

• 대한전자공학회논문지SD
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• 제45권11호
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• pp.1-7
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• 2008

본 연구에서는 양자 현상을 고려한 나노미터 MuGFET의 C-V 특성을 분석하기 위하여 2차원 Poisson-$Schr{\ddot{o}}dinger$ 방정식을 self-consisnt하게 풀 수 있는 시뮬레이터를 구현하였다. 소자 시뮬레이터를 이용하여 양자 현상으로 인한 소자크기와 게이트 구조에 따른 게이트-채널 커패시턴스 특성을 분석하였다. 소자의 크기가 감소할수록 단위 면적당 게이트-채널 커패시턴스는 증가하였다. 그리고 게이트 구조가 다른 소자에서는 게이트-채널 커패시턴스가 유효게이트 수가 증가할수록 감소하였다. 이런 결과를 실리콘 표면의 전자농도 분포와 인버전 커패시턴스로 설명하였다 또한 인버전 커패시턴스로부터 소자의 크기 및 게이트 구조에 따른 inversion-layer centroid 길이도 계산하였다.

• 한국전기전자재료학회논문지
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• 제18권4호
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• pp.285-296
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• 2005

Reduced pressure chemical vapor deposition technology has been used to study SiGe heterostructure epitaxy and device issues, including SiGe relaxed buffers, proper control of Ge component and crystalline defects, two dimensional delta doping, and their influence on electrical properties of devices. From experiments, 2D profiles of B and P presented FWHM of 5 nm and 20 nm, respectively, and doses in 5×10/sup 11/ ∼ 3×10/sup 14/ ㎝/sup -2/ range. The results could be employed to fabricate SiGe/Si heterostructure field effect transistors with both Schottky contact and MOS structure for gate electrodes. I-V characteristics of 2D P-doped HFETs revealed normal behavior except the detrimental effect of crystalline defects created at SiGe/Si interfaces due to stress relaxation. On the contrary, sharp B-doping technology resulted in significant improvement in DC performance by 20-30 ％ in transconductance and short channel effect of SiGe HMOS. High peak concentration and mobility in 2D-doped SiGe heterostructures accompanied by remarkable improvements of electrical property illustrate feasible use for nano-sale FETs and integrated circuits for radio frequency wireless communication in particular.