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Analysis of Crosstalk-Induced Variation of Coupling Capacitance between Interconnect lines in High Speed Semiconductor Devices  

Ji Hee-Hwan (Dept. of Electronics Engineering, Chungnam National Univ.)
Han In-Sik (Dept. of Electronics Engineering, Chungnam National Univ.)
Park Sung-Hyung (MagnaChip Semiconductor, Inc.)
Kim Yong-Goo (MagnaChip Semiconductor, Inc.)
Lee Hi-Deok (Dept. of Electronics Engineering, Chungnam National Univ.)
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Abstract
In this paper, novel test patterns and on-chip data are presented to indicate that the variation of coupling capacitance, ${\Delta}Cc$ by crosstalk can be larger than static coupling capacitance, Cc. It is also shown that ${\Delta}Cc$ is strongly dependent on the phase of aggressive lines. for anti-phase crosstalk ${\Delta}Cc$ is always larger than Cc while for in-phase crosstalk ${\Delta}Cc$ is smaller than Cc. HSPICE simulation shows good agreement with the measurement data.
Keywords
Crosstalk; Interconnect; Coupling capacitance; Nano-CMOS;
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