• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.1
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• pp.15-22
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• 2002

This paper introduces a compensating system for machining error, which is resulted from chucking with separated jaws. In machining the chucked cylindrical workpiece, the deterioration of machining accuracy, such as out-of-roundness is inevitable due to the variation of the radial compliance of the chuck workpiece system which is caused by the position of jaws with respect to the direction of the applied force. To compensate the chucking compliance induced error, firstly roundness profile of workpiece due to chucking compliance after machining needs to be predicted. Then using this predicted profile, the compensated tool feed trajectory can be generated. And by synchronizing the cutting tool feed system with workpiece rotation, the chucking compliance induced error can be compensated. To satisfy the condition that the cutting tool feed system must provide high speed and high position accuracy, brushless linear DC motor is used. In this study, firstly through the force-deflection experiment in workpiece chucked lathe, the variation of radial compliance of chuck workpiece system is obtained. Secondly using the mathematical equation and cutting experiment result, the predicted profile of workpiece and its compensation tool trajectory are generated. Thirdly the configuration of compensation system using linear motor is introduced, and to improve the system performance, PID controller is designed. Finally the tracking performance of system is examined by experiment. Through the real cutting experiment, roundness is significantly improved.

• Journal of the Korean institute of surface engineering
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• v.49 no.6
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• pp.567-574
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• 2016

We have analyzed chemical properties of polysiloxane and polysilazane films, respectively, as sealing materials for electrostatic chuck (ESC) and have investigated the possibility of polysilazane as an alternative sealant to polysiloxane. It has been revealed that Si-O with organic bonding ($Si-CH_3$) existed in polysiloxane films compared to only pure Si-O bonding in polysilazane films. The sealing property of polysilazane has been found outstanding even in a short time of application. In the polysiloxane films containing $H_2O$, pin holes have been found possibly due to $CO_2$ gas evolution, and low adhesion with Si substrate has been observed after heat stress test in connection with the existence of organic bonding. After acid resistance test in 0.5 vol.% HF, 68 wt.% $HNO_3$, and 37 wt.% HCl solution, polyilazane films have shown a longer survival times. Compared to the conventional polysiloxane sealant, polysilazane is expected as a new sealing material because of good thermal and chemical stability.

• Journal of the Semiconductor & Display Technology
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• v.19 no.4
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• pp.46-50
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• 2020

In this research, the attractive force of Coulomb type electrostatic chuck(ESC), which consisted of alumina dielectric, on glass substrate was studied by using the finite element analysis. The attractive force is caused by the high electrical resistance which occurs in contact region between glass substrate and dielectric layer. This research tries the simple geometrical modeling of ESC and glass substrate with air gap. The influences of the applied voltage, and air gap are investigated. When alumina dielectric with 1014 Ω·cm, 1.5 kV voltage, and 0.01 mm air gap were applied, electrostatic force in this work reached to 4 gf/㎠. This results show that the modeling of air gap is essential to derive the attractive force of the ESC.

• Korean Journal of Materials Research
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• v.19 no.2
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• pp.68-72
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• 2009

This study investigated dry etching of acrylic in capacitively coupled $SF_6$, $SF_6/O_2$ and $SF_6/CH_4$ plasma under a low vacuum pressure. The process pressure was 100 mTorr and the total gas flow rate was fixed at 10 sccm. The process variables were the RIE chuck power and the plasma gas composition. The RIE chuck power varied in the range of $25{\sim}150\;W$. $SF_6/O_2$ plasma produced higher etch rates of acrylic than pure $SF_6$ and $O_2$ at a fixed total flow rate. 5 sccm $SF_6$/5 sccm $O_2$ provided $0.11{\mu}m$/min and $1.16{\mu}m$/min at 25W and 150W RIE of chuck power, respectively. The results were nearly 2.9 times higher compared to those at pure $SF_6$ plasma etching. Additionally, mixed plasma of $SF_6/CH_4$ reduced the etch rate of acrylic. 5 sccm $SF_6$/5 sccm $CH_4$ plasma resulted in $0.02{\mu}m$/min and $0.07{\mu}m$/min at 25W and 150W RIE of chuck power. The etch selectivity of acrylic to photoresist was higher in $SF_6/O_2$ plasma than in pure $SF_6$ or $SF_6/CH_4$ plasma. The maximum RMS roughness (7.6 nm) of an etched acrylic surface was found to be 50% $O_2$ in $SF_6/O_2$ plasma. Besides the process regime, the RMS roughness of acrylic was approximately $3{\sim}4\;nm$ at different percentages of $O_2$ with a chuck power of 100W RIE in $SF_6/O_2$ plasma etching.

• Food Science of Animal Resources
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• v.33 no.5
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• pp.633-639
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• 2013

This study was performed to investigate the physicochemical properties of striploin (m. longissimus dorsi), chuck tender (m. supraspinatus) and eye of round (m. semitendinosus) of Holstein steer beef produced from different fattening groups (18, 21, 24 mon-old). The intramuscular fat contents were significantly higher in striploin (9.14%) and eye of round (4.31%) from 24 mon-old groups when compared to the same cuts (6.53% and 2.63%) from 18 mon-old groups, respectively. Three muscles from 18 mon-old group had significantly higher moisture contents (%) than those from the other groups (p<0.05). The protein contents were significantly higher in chuck tender (19.39%) and eye of round (21.09%) from 24 mon-old group than 18- and 21 mon-old groups (p<0.05). There were not significantly different in collagen contents among three fattening groups. In meat color, striploin, chuck tender and eye of round from 21 mon-old group had significantly higher CIE $L^*$ (41.77), $a^*$ (20.98) and $b^*$ (10.87) values than those from the other groups (p<0.05). Warner-Bratzler shear force values (WBS) for three muscles were significantly lower in 24 mon-old group than the other groups (p<0.05). The oleic acids (C18:1n9) contents of three muscles from 24 mon-old group were highest (p<0.05) among three groups. Total contents of MUFA were significantly higher and total contents of PUFA including arachidonic acids (C20:4n6) were significantly lower in chuck tender and eye of round muscles from 24 mon-old group (p<0.05).

• Food Science of Animal Resources
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• v.33 no.6
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• pp.708-714
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• 2013

This study was performed to investigate the influence of age on the physicochemical properties of strip loin (m. longissimus lumborum), chuck tender (m. supraspinatus), and eye of round (m. semitendinosus) of Hanwoo cows. Hanwoo cows (n=126; 24-194 mon; live weight, 270-500 kg) were slaughtered and three muscles were obtained according to 3 age groups (G1, < 5 years old; G2, 6-8 years old; G3, > 9 years old). The chuck tender had significantly higher protein contents in G3 than in G1 or G2 (p<0.05). For strip loin and chuck tender, G1 had significantly higher intramuscular fat contents than G3 (p<0.05). The chuck tender had significantly higher $b^*$ (yellowness) values for G2 than for G1 (p<0.05). The three muscles had significantly higher cooking loss (%) and lower WHC (%) in G3 than in G1 or G2 (p<0.05). WBS values of strip loin were significantly higher in G3 than in the other groups (p<0.05). The three muscles had higher C18:1n9 in G1 than that in the other groups. The total content of saturated fatty acids was significantly higher in G3 than in G1 for all 3 muscles (p<0.05). Regarding free amino acid contents, G1 had significantly higher contents of threonine, alanine, valine, methionine, phenylalanine, leucine, and lysine in the strip loin than G2 or G3 (p<0.05). In conclusion, young cow beef were higher in the WHC, intramuscular fat and free amino acids contents, whereas old cow beef had higher cooking loss and WBS (p<0.05).

• Food Science of Animal Resources
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• v.36 no.1
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• pp.68-76
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• 2016

This study was conducted to investigate the meat quality and sensory properties of 12 major cuts from 10 Hanwoo bulls (25-32 mon of age) after they were aged at 2℃ for 0, 7, 14, and 21 d. Protein content (%) was between 19.17 and 22.50%. Intramuscular fat content ranged from 2.79 to 8.39%. The collagen content of the chuck roll, chuck tender, and short plate muscles was higher (1.97-2.04%) than that of the striploin muscles (1.48%) (p<0.05). CIE lightness (L*) values increased with an increase in aging days for tenderloin, loin, chuck roll, oyster blade, short plate, top sirloin, and eye of round muscles (p<0.05). Most muscles, except the short plate, showed no significant changes in redness CIE (a*) and yellowness (b*) color values during aging. The tenderloin, loin, and striploin showed significantly higher water holding capacity (58.60-62.06%) than that of chuck roll and short plate (53.86-57.07%) muscles (p<0.05). The Warner-Bratzler shear force values of most muscles decreased significantly as the aging period increased (p<0.05), exception the tenderloin. The chuck tender muscles showed the highest cooking loss, whereas tenderloin muscle showed the lowest (p<0.05). The tenderloin muscle had the longest sarcomere length (SL) (3.67-3.86 μm) and the bottom round muscle had the shortest SL (2.21-2.35 μm) (p<0.05). In the sensory evaluation, tenderness and overall-likeness scores of most muscles increased with increase in aging days. The tenderloin and oyster blade showed relatively higher tenderness and overall-likeness values than did the other muscles during the aging period. No significant differences were noted in juiciness and flavor-likeness scores among muscles and aging days.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.193-193
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• 1999

• Journal of computational fluids engineering
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• v.8 no.4
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• pp.41-49
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• 2003

This study presents a numerical model to analyze dynamic thermal behavior of a hot chuck designed for flip-chip bonders. The hot chuck of concern is a heater which has been specifically developed for accomplishing high-speed and ultra-precision soldering. The characteristic features are radiative heat source and the heating tool made of a material of high thermal diffusivity. A physical modeling has been conducted for the network of heat transport. A simplified finite volume model is deviced to simulate time-dependent thermal behavior of the heating tool on which soldering is achieved. The reliability of the proposed numerical model is verified experimentally. A series of numerical tests illustrate the usefulness of the numerical model in design analysis.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.10 no.3
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• pp.73-78
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• 2011

This study contains to theory and analysis research for the stress and the translation of an expand disk that fix a ring gear for tooth profile machining. The stress of the expand disk is analysed by the finite element method(FEM) to calculate design parameters. From the analysis results, the stress of the expand shows a linear tendency under various fixing force. This results show that the expand disk have a elastic characteristics as a disk spring. The maximum stress was observed on under side in split section of the expand disk. It is verified that the analysis results are useful to calculate design parameters of the expand disk.