Improvement of Sealing Property of Electrostatic Chuck by Applying Polysilazane Sealant
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Choi, Jaeyoung
(Department of Energy Engineering, Dankook University)
Park, Hyunsu (Department of Energy Engineering, Dankook University) Son, Min Kyu (R&D Center, YMC Co., Ltd) Jeong, Chang-oh (R&D Center, YMC Co., Ltd) Kim, Woo-Byoung (Department of Energy Engineering, Dankook University) |
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