A Study on Attractive Force Characteristics of Glass Substrate Using Alumina Electrostatic Chuck by Finite Element Analysis |
Lee, Jae Young
(Mechatronics Engineering, Graduate School of Korea University of Technology and Education)
Jang, Kyung Min (Koreatech Industry University Cooperation Foundation) Min, Dong Kyun (Department of Mechatronics Engineering, Korea University of Technology and Education) Kang, Jae Gyu (Sunic System Co. Ltd) Sung, Gi Hyun (Sunic System Co. Ltd) Kim, Hye Dong (Sunic System Co. Ltd) |
1 | J. S. Choi, S. J. Hong, J. Yoo, T. H. Kim, S. J. Lee, "Finite Element Analysis of Attractive Force on Coulomb Type Electrostatic Chuck" J. of The Korean Society of Mechanical Engineers, pp. 918-923, 2005.5. |
2 | H. J. Kim, Y. G. Shin, H. K. Ahn, D. W. Kim, "A study on the Holding of LED Sapphire Substrate Using Alumina Electrostatic Chuck with Fine Electrode Pattern" J. of the Korean Institute of Surface Engineering, Vol. 44, No. 4, pp. 165-171, 2011. DOI |
3 | Chih-Hung Li, Yi-Fan Chiu, Yi-Hsiuan Yu and JianZhang Chen, "Simulation studies on bipolar electrostatic chucks," 2015 10th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT), pp. 382-385, 2015. |
4 | Dae-Hyeon Kim, Kwang-sun Kim, "A Study on Electrostatic Chuck Colling by Ceramic Dielectric Material and Coolant path", Journal of the semiconductor & display technology, vol. 17, No. 3, pp. 85-89, 2018. |
5 | Dae-Hyeon Kim, Kwang-sun Kim, "Study on Coolant Passage for Improving Temperature Uniformity of the Electrostatic Chuck Surface", Journal of the semiconductor & display technology, vol. 15 no.3, pp.72-77, 2016 |
6 | Kyungmin Jang, Kwangsun Kim, "A Study on Temperature Characteristics according to Seramic Material Stacking Sequence of Electrostatic Chuck Surface", Journal of the semiconductor & display technology, pp.116-120, 2017. |