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A Study on Attractive Force Characteristics of Glass Substrate Using Alumina Electrostatic Chuck by Finite Element Analysis  

Lee, Jae Young (Mechatronics Engineering, Graduate School of Korea University of Technology and Education)
Jang, Kyung Min (Koreatech Industry University Cooperation Foundation)
Min, Dong Kyun (Department of Mechatronics Engineering, Korea University of Technology and Education)
Kang, Jae Gyu (Sunic System Co. Ltd)
Sung, Gi Hyun (Sunic System Co. Ltd)
Kim, Hye Dong (Sunic System Co. Ltd)
Publication Information
Journal of the Semiconductor & Display Technology / v.19, no.4, 2020 , pp. 46-50 More about this Journal
Abstract
In this research, the attractive force of Coulomb type electrostatic chuck(ESC), which consisted of alumina dielectric, on glass substrate was studied by using the finite element analysis. The attractive force is caused by the high electrical resistance which occurs in contact region between glass substrate and dielectric layer. This research tries the simple geometrical modeling of ESC and glass substrate with air gap. The influences of the applied voltage, and air gap are investigated. When alumina dielectric with 1014 Ω·cm, 1.5 kV voltage, and 0.01 mm air gap were applied, electrostatic force in this work reached to 4 gf/㎠. This results show that the modeling of air gap is essential to derive the attractive force of the ESC.
Keywords
Electrostatic Chuck; Coulomb Type; Electrostatic Force; Maxwell stress tensor; Finite Element Analysis;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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