• 제목/요약/키워드: Multi-layer substrate

검색결과 247건 처리시간 0.025초

대면적 Fecralloy 코팅층의 표면 거침도 극대화를 위한 정전분무 및 열처리 공정 연구 (Electrospray and Thermal Treatment Process for Enhancing Surface Roughness of Fecralloy Coating Layer on a Large Sized Substrate)

  • 이혜문;구혜영;양상선;박다희;정수호;윤중열
    • 한국분말재료학회지
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    • 제24권1호
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    • pp.46-52
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    • 2017
  • Fecralloy coating layer with large surface area is suitable for use as a filter media for efficient removal of hot gaseous pollutants exhausted from combustion processes. For uniform preparation of a Fecralloy coating layer with large surface area and strong adhesion to substrate, electrospray coating and thermal treatment processes are experimentally optimized in this study. A nano-colloidal solution with 0.05 wt% Fecralloy nanoparticles is successfully prepared. Optimized electrospraying conditions are experimentally discovered to prepare a uniform coating layer of Fecralloy nano-colloidal solution on a substrate. Drying the electrospray coated Fecralloy nano-colloidal solution layer at $120^{\circ}C$ and subsequent heating at $600^{\circ}C$ are the best post-treatment for enhancing the adhesion force and surface roughness of the Fecralloy coating layer on a substrate. An electrospray coating system, consisting of several multi-groove nozzles, is also experimentally confirmed as a reasonable device for uniform coating of Fecralloy nano-colloid on a large area substrate.

실리콘 기판의 산화층이 다중벽 탄소나노튜브 성장에 미치는 영향 (Effect of SiO2 Layer of Si Substrate on the Growth of Multiwall-Carbon Nanotubes)

  • 김금채;이수경;김상효;황숙현;;전민현
    • 한국재료학회지
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    • 제19권1호
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    • pp.50-53
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    • 2009
  • Multi-walled carbon nanotubes (MWNTs) were synthesized on different substrates (bare Si and $SiO_2$/Si substrate) to investigate dye-sensitized solar cell (DSSC) applications as counter electrode materials. The synthesis of MWNTs samples used identical conditions of a Fe catalyst created by thermal chemical vapor deposition at $900^{\circ}C$. It was found that the diameter of the MWNTs on the Si substrate sample is approximately $5{\sim}10nm$ larger than that of a $SiO_2$/Si substrate sample. Moreover, MWNTs on a Si substrate sample were well-crystallized in terms of their Raman spectrum. In addition, the MWNTs on Si substrate sample show an enhanced redox reaction, as observed through a smaller interface resistance and faster reaction rates in the EIS spectrum. The results show that DSSCs with a MWNT counter electrode on a bare Si substrate sample demonstrate energy conversion efficiency in excess of 1.4 %.

고온초전도테이프 제작을 위한 YSZ 박막의 고속증착방법 (High speed deposition technique of YSZ film for the superconducting tape)

  • 김호섭;석동기;정준기;고락길;하홍수;송규정;염도준;박찬
    • 한국초전도ㆍ저온공학회논문지
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    • 제6권3호
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    • pp.27-32
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    • 2004
  • High temperature superconducting coated conductor has a structure of /< superconducting layer>//. The buffer layer consists of multi layer, and the architecture most widely used in RABiTS approach is CeO$_2$(cap layer)/YSZ(diffusion barrier layer)/CeO$_2$(seed layer). Evaporation technique is used for the CeO$_2$ layer and DC reactive sputtering technique is used for the YSZ layer, A chamber was set up specially for DC reactive sputtering, Detailed features are as following. A separator divided the chamber into two halves a sputtering chamber and a reaction chamber. The argon gas for sputtering target elements flows out of the cap of sputtering gun, and water vapor for reaction with depositing species spouts near the substrate. Turbo pump is connected with reaction chamber. High speed deposition of YSZ film could be achieved in the chamber. Detailed deposition conditions (temperature and partial pressure of reaction gas) were investigated for the rapid growth of high quality YSZ film.

Additive Fabrication of Patterned Multi-Layered Thin Films of Ta2O5 and CdS on ITO Using Microcontact Printing Technique

  • Lee, Jong-Hyeon;Woo, Soo-Yeun;Kwon, Young-Uk;Jung, Duk-Young
    • Bulletin of the Korean Chemical Society
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    • 제24권2호
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    • pp.183-188
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    • 2003
  • The micro-patterning of multi-layered thin films containing CdS and $Ta_2O_5$ layers on ITO substrate with various structures was successfully obtained by combining three different techniques: chemical solution depositions, sol-gel, and microcontact printing (μCP) methods using octadecyltrichlorosilane (OTS) as the organic thin layer template. $Ta_2O_5$ layer was prepared by sol-gel casting and CdS one obtained by chemical solution deposition, respectively. Parallel and cross patterns of multi-layers with $Ta_2O_5$ and CdS films were fabricated additively by successive removal of OTS layer pre-formed. This study presents the designed architectures consisting of the two types of feature having horizontal dimensions of 170 ㎛ and 340 ㎛ with constant thickness ca. 150 nm of each deposited materials. The thin film lay-out of the cross-patterning is composed of four regions with chemically different layer compositions, which are confirmed by Auger electron microanalysis.

RF magnetron sputter에 의해 제조된 AZO/Ag/AZO 다층박막의 Ag 두께가 전기적 광학적 특성에 미치는 영향 (Influence of Ag Thickness on Electrical and Optical Properties of AZO/Ag/AZO Multi-layer Thin Films by RF Magnetron Sputtering)

  • 안진형;강태원;김동원;김상호
    • 한국표면공학회지
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    • 제39권1호
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    • pp.9-12
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    • 2006
  • Al-doped ZnO(AZO)/Ag/AZO multi-layer films deposited on PET substrate by RF magnetron sputtering have a much better electrical properties than Al-doped ZnO single-layer films. The multi-layer structure consisted of three layers, AZO/Ag/AZO, the optimum thickness of Ag layers was determined to be $112{\AA}$ for high optical transmittance and good electrical conductivity. With about $1800{\AA}$ thick AZO films, the multi-layer showed a high optical transmittance in the visible range of the spectrum. The electrical and optical properties of AZO/Ag/AZO were changed mainly by thickness of Ag layers. A high quality transparent electrode, having a resistance as low as $6\;W/{\square}$ and a high optical transmittance of 87% at 550 nm, was obtained by controlling Ag deposition parameters.

Advanced Permeation Properties of Solvent-free Multi-Layer Encapsulation of thin films on Ethylene Terephthalate(PET)

  • Han, Jin-Woo;Kang, Hee-Jin;Kim, Jong-Yeon;Kim, Jong-Hwan;Han, Jung-Min;Moon, Hyun-Chan;Park, Kwang-Bum;Kim, Hwi-Woon;Seo, Dae-Shik
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.973-976
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    • 2006
  • In this paper, the inorganic multi-layer encapsulation of thin film was newly adopted to protect the organic layer from moisture and oxygen. Using the electron beam, Sputter, inorganic multi-layer thin-film encapsulation was deposited onto the Ethylene Terephthalate(PET) and their interface properties between inorganic and organic layer were investigated. In this investigation, the SiON $SiO_2$ and parylene layer showed the most suitable properties. Under these conditions, the water vapor transmission rate (WVTR) for PET can be reduced from level of $0.57g/m^2/day$ (bare substrate) to $1^{\ast}10^{-5}g/m^2/day$ after application of a SiON and $SiO_2$ layer. These results indicate that the $PET/SiO_2/SiON/Parylene$ barrier coatings have high potential for flexible organic light-emitting diode(OLED) applications.

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Co-sputtering으로 형성된 ZT/PZT/ZT 강유전체 다층막 구조의 특성에 관한 연구 (A Study on the Characteristics of ZT/PZT/ZT Ferroelectric Multi-layer Thin Films Deposited by Co-sputtering)

  • 주재현;길덕신;주승기
    • 한국세라믹학회지
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    • 제31권10호
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    • pp.1115-1122
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    • 1994
  • ZT/PZT/ZT multi-layered thin films were deposited on silicon substrate by co-sputtering method for FEMFET device application. Effects of Pb/(Zr+Ti) ratio, films thickness, annealing conditions and substrate temperature on the ferroelectric behavior of the multi-layered films were studied. The best memory device characteristics with leakage current of 2$\times$10-8 A/$\textrm{cm}^2$ and breakdown field of about 1 MV/cm could be obtained with ZT(250 $\AA$) / PZT(1000 $\AA$)/ZT(750 $\AA$) multi-layered thin film deposited at 35$0^{\circ}C$ and post-annealed at $700^{\circ}C$ for 120 sec by RTA(Rapid Thermal Annealing).

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Glass-Al2O3 복합소재를 원료로 한 LTCC 다층회로 기판의 제조 (Fabrication of LTCC Multi-layer Circuit Board made of Glass-Al2O3 Composites)

  • 곽훈;전형도;김환;이원재;신병철;김일수
    • 한국전기전자재료학회논문지
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    • 제21권6호
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    • pp.509-516
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    • 2008
  • Multi-layer circuit card for semiconductor inspection was fabricated by LTCC technology. After a proper impedance design without electrical interference, ceramic tapes with the composition of $CaO-Al_2O_3-SiO_2-B_2O_3$ glass and $Al_2O_3$ were prepared. The electrode with silver paste printed on the tape. Printed ceramic sheets were then laminated and sintered. Densities and dielectric properties were measured. The microstructure, fracture surface of the region of via and matching state of substrate-electrode were observed. The durability of plated outside electrode were examined by hardness and scratch test.

저온 동시소성 세라믹을 이용한 적층형 VCO의 설계 및 제작 (Design and Manufacture of Multi-layer VCO by LTCC)

  • 박귀남;이헌용;김지균;송진형;이동희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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    • pp.291-294
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    • 2003
  • The circuit substrate was made from the Low Temperature Cofired Ceramics(LTCC) that a $\varepsilon_\gamma$ was 7.8. Accumulated Varactor and the low noise transistor which were a Surface Mount Device-type element on LTCC substrate. Let passive element composed R, L, C with strip-line of three dimension in the multilayer substrate circuit inside, and one structure accumulate band-pass filter, resonator, a bias line, a matching circuit, and made it. Used Screen-Print process, and made Strip-line resonator. A design produced and multilayer-type VCO(Voltage Controlled Oscillator), and recognized a characteristic with the Spectrum Analyzer which was measurement equipment. Measured multilayer structure VCO is oscillation frequency 1292[MHz], oscillation output -28.38[dBm], hamonics characteristic -45[dBc] in control voltage 1.5[V], A phase noise is -68.22[dBc/Hz] in 100 KHz offset frequency. The oscillation frequency variable characteristic showed 30[MHz/V] characteristic, and consumption electric current is approximately 10[mA].

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