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http://dx.doi.org/10.5012/bkcs.2003.24.2.183

Additive Fabrication of Patterned Multi-Layered Thin Films of Ta2O5 and CdS on ITO Using Microcontact Printing Technique  

Lee, Jong-Hyeon (Department of Chemistry and Bk21-School of Molecular Science, Sungkyunkwan University)
Woo, Soo-Yeun (Department of Chemistry and Bk21-School of Molecular Science, Sungkyunkwan University)
Kwon, Young-Uk (Department of Chemistry and Bk21-School of Molecular Science, Sungkyunkwan University)
Jung, Duk-Young (Department of Chemistry and Bk21-School of Molecular Science, Sungkyunkwan University)
Publication Information
Bulletin of the Korean Chemical Society / v.24, no.2, 2003 , pp. 183-188 More about this Journal
Abstract
The micro-patterning of multi-layered thin films containing CdS and $Ta_2O_5$ layers on ITO substrate with various structures was successfully obtained by combining three different techniques: chemical solution depositions, sol-gel, and microcontact printing (μCP) methods using octadecyltrichlorosilane (OTS) as the organic thin layer template. $Ta_2O_5$ layer was prepared by sol-gel casting and CdS one obtained by chemical solution deposition, respectively. Parallel and cross patterns of multi-layers with $Ta_2O_5$ and CdS films were fabricated additively by successive removal of OTS layer pre-formed. This study presents the designed architectures consisting of the two types of feature having horizontal dimensions of 170 ㎛ and 340 ㎛ with constant thickness ca. 150 nm of each deposited materials. The thin film lay-out of the cross-patterning is composed of four regions with chemically different layer compositions, which are confirmed by Auger electron microanalysis.
Keywords
Patterned thin films; Micro-contact printing; Multi-layer deposition; $Ta_2O_5$; CdS;
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