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Influence of Ag Thickness on Electrical and Optical Properties of AZO/Ag/AZO Multi-layer Thin Films by RF Magnetron Sputtering  

An Jin-Hyung (Materials Science and Engineering, Korea University of Technology and Education)
Kang Tea-Won (School of Mechanical and Automotive Engineering, Kookmin University)
Kim Dong-Won (Department of Materials Science and Engineering, Kyonggi University)
Kim Sang-Ho (Materials Science and Engineering, Korea University of Technology and Education)
Publication Information
Journal of the Korean institute of surface engineering / v.39, no.1, 2006 , pp. 9-12 More about this Journal
Abstract
Al-doped ZnO(AZO)/Ag/AZO multi-layer films deposited on PET substrate by RF magnetron sputtering have a much better electrical properties than Al-doped ZnO single-layer films. The multi-layer structure consisted of three layers, AZO/Ag/AZO, the optimum thickness of Ag layers was determined to be $112{\AA}$ for high optical transmittance and good electrical conductivity. With about $1800{\AA}$ thick AZO films, the multi-layer showed a high optical transmittance in the visible range of the spectrum. The electrical and optical properties of AZO/Ag/AZO were changed mainly by thickness of Ag layers. A high quality transparent electrode, having a resistance as low as $6\;W/{\square}$ and a high optical transmittance of 87% at 550 nm, was obtained by controlling Ag deposition parameters.
Keywords
AZO; Ag; PET; RF magnetron sputtering; Optical transmission; Sheet resistance;
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