한국표면공학회지 (Journal of the Korean institute of surface engineering)

  • 제39권1호
  • /
  • Pages.9-12
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  • 2006
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  • 1225-8024(pISSN)
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  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
권호 표지

RF magnetron sputter에 의해 제조된 AZO/Ag/AZO 다층박막의 Ag 두께가 전기적 광학적 특성에 미치는 영향

Influence of Ag Thickness on Electrical and Optical Properties of AZO/Ag/AZO Multi-layer Thin Films by RF Magnetron Sputtering

  • 안진형 (한국기술교육대학교 신소재공학과) ;
  • 강태원 (국민대학교 기계.자동차공학부) ;
  • 김동원 (경기대학교 신소재공학과) ;
  • 김상호 (한국기술교육대학교 신소재공학과)
  • An Jin-Hyung (Materials Science and Engineering, Korea University of Technology and Education) ;
  • Kang Tea-Won (School of Mechanical and Automotive Engineering, Kookmin University) ;
  • Kim Dong-Won (Department of Materials Science and Engineering, Kyonggi University) ;
  • Kim Sang-Ho (Materials Science and Engineering, Korea University of Technology and Education)
  • 발행 : 2006.02.01
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초록

Al-doped ZnO(AZO)/Ag/AZO multi-layer films deposited on PET substrate by RF magnetron sputtering have a much better electrical properties than Al-doped ZnO single-layer films. The multi-layer structure consisted of three layers, AZO/Ag/AZO, the optimum thickness of Ag layers was determined to be $112{\AA}$ for high optical transmittance and good electrical conductivity. With about $1800{\AA}$ thick AZO films, the multi-layer showed a high optical transmittance in the visible range of the spectrum. The electrical and optical properties of AZO/Ag/AZO were changed mainly by thickness of Ag layers. A high quality transparent electrode, having a resistance as low as $6\;W/{\square}$ and a high optical transmittance of 87% at 550 nm, was obtained by controlling Ag deposition parameters.

키워드

참고문헌

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