• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.11b
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• pp.37-43
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• 2002

In this paper, we analyse and present mechanical dynamic characteristics of a micro-machined vibrating silicon ring gyroscope which can measure angular velocities about three orthogonal axes. The ring gyroscope has a ring connected to the gyroscope main body by support-ligaments which are arranged with cyclic symmetry. The natural modes of its vibration can be distinguished into the in-plane motion and the out-of-plane motion which are coupled by the gyro-effect due to the rotation of the gyroscope main body. The equations of motion, the response to angular velocities, and the relationships between the natural modes of vibration are derived and compared with the previous studies for the design of a micro three-axis ring gyroscope.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.12 no.12
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• pp.1001-1009
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• 2002

In this paper, we analyse and present mechanical dynamic characteristics of a micro-machined vibrating silicon ring gyroscope which can measure angular velocities about three orthogonal axes. The ring gyroscope has a ring connected to the gyroscope main body by support-ligaments which are arranged with cyclic symmetry. The natural modes of its vibration can be distinguished into the in-plane motion and the out-of-plane motion which are coupled by the gyro-effect due to the rotation of the gyroscope main body. The equations of motion, the response to angular velocities, and the relationships between the natural modes of vibration are derived and compared with the previous studies for the design of a micro three-axis ring gyroscope.

• Journal of Electrical Engineering and Technology
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• v.12 no.1
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• pp.385-395
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• 2017

A new digitized decoupled dual-axis micro dynamically tuned gyroscope with three equilibrium rings (TMDTG) is proposed which can eliminate the constant torque disturbance (CTD) caused by the double rotation frequency of a driving shaft with a micro dynamically tuned gyroscope with one equilibrium ring (MDTG). A mechanical and kinematic model of the TMDTG is theoretically analyzed and the structure parameters are optimized in ANSYS to demonstrate reliability. By adjusting the thickness of each equilibrium ring, the CTD can be eliminated. The digitized model of the TMDTG system is then simulated and examined using MATLAB. Finally, a digitized prototype based on FPGA is created. The gyroscope can be dynamically tuned by adjusting feedback voltage. Experimental results show the TMDTG has good performance with a scale factor of $283LSB/^{\circ}/s$ in X-axis and $220LSB/^{\circ}/s$ in Y-axis, respectively. The scale factor non-linearity is 0.09% in X-axis and 0.13% in Y-axis. Results from analytical models, simulations, and experiments demonstrate the feasibility of the proposed TMDTG.

• Journal of KSNVE
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• v.11 no.1
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• pp.132-140
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• 2001

The vibratory gyroscope can effectively measure the angular velocity as the oscillating and position-sensing mode are exactly tuned. The veering Phenomenon impedes the exact tuning, which is caused by the mode coupling of two modes. In this paper, the gyroscope's structure with two frames is introduced to minimize the veering phenomenon that destabilizes the tuning process of oscillating and position-sensing mode. Experimental results show that the Proposed structure can achieve the mode intersection without veering phenomenon.

• 제어로봇시스템학회:학술대회논문집
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• 2002.10a
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• pp.39.4-39
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• 2002

This paper presents a design and implementation of a PID feedback control loop for micro gyroscope. The feedback control loop improves the gyroscope performance such as linearity, bandwidth, and bias stability for micro gyroscope which is basically a high-Q system and exhibits a low performance with an open loop control. The designed and implemented feed-back control loop is applied to the SNU-Bosch MEMS gyroscope to demonstrate the improvement with the feedback control loop. The bandwidth is improved to 60Hz from 25Hz of open loop control. The linearity becomes 0.5% from 1%. The bias stability is improved to 0.03 deg/sec from 0.06 deg/sec.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.14 no.1
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• pp.64-72
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• 2004

In this paper. we analyse and present electro-mechanical dynamic characteristics of a micro-machined vibrating silicon ring gyroscope which can measure angular velocities about three orthogonal axes. The ring gyroscope has a ring connected to the gyroscope main body by support-ligaments which are arranged with cyclic symmetry. The natural modes of its vibration can be distinguished into the in-plane motion and the out-of-plane motion which are coupled by the gyro-effect due to the rotation of the gyroscope main body. The motions of the ring are electro-statically derived. sensed and balanced by electrodes. The equations of motion are formulated. The measuring method of angular velocities by force-to-rebalance is presented. The dynamic characteristics of a ring gyroscope are calculated and compared.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.11a
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• pp.970-976
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• 2003

In this paper, we analyse and present electro-mechanical dynamic characteristics of a micro-machined vibrating silicon ring gyroscope which can measure angular velocities about three orthogonal axes. The ring gyroscope has a ring connected to the gyroscope main body by support-ligaments which are arranged with cyclic symmetry. The natural modes of its vibration can be distinguished into the in-plane motion and the out-of-plane motion which are coupled by the gyro-effect due to the notation of the gyroscope main body. The motions of the ring are electro-statically derived, sensed and balanced by electrodes. The equations of motion are formulated. The scheme of angular velocities sensing by force-to-rebalance method is presented. The dynamic characteristics of a ring gyroscope are calculated and compared.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.11a
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• pp.312.1-312
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• 2002

In this paper, we analyse and present mechanical dynamic characteristics of a micro-machined vibrating silicon ring gyroscope which can measure rates of turn about three orthogonal axes. The ring gyroscope has a ring connected to the gyroscope main body by support-ligaments which are arranged with cyclic symmetry. The natural modes of its vibration can be distinguished into the in-plane motion and the out-of-plane motion which are coupled by the gyro-effect due to the rotation of the gyroscope main body. (omitted)

• 제어로봇시스템학회:학술대회논문집
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• 2002.10a
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• pp.39.3-39
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• 2002

In this paper, presented is a feedback control loop, for an in-plane gimbaled micro gyroscope based on methodology and state weighted model reduction technique. The micro gyroscope is the basic inertial sensors. To improve the performances such as stability, wide dynamic range, bandwidth and especially robustness, it is necessary to design a feedback control loop, which must be robust, because the manufacturing process errors can be large. Especially, to obtain wide bandwidth, the feedback controller is indispensable, because the gyroscope is high Q factor system and has small open loop bandwidth. Moreover, the feedback controller reduces the effect...

• Transactions of the Korean Society of Mechanical Engineers A
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• v.27 no.11
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• pp.1840-1848
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• 2003

This paper presents the structural analysis and optimum design of a vertical micro-gyroscope with decoupled 2 degrees of freedom (DOF), driven by electrostatic force. Simplified beam models were presented to derive the structural stiffness of the driving spring of the U shape and the sensing spring of I shape. A finite element analysis (FEA) was performed to validate each derivation. A total mass and a polar mass moment of inertia were also obtained and used in calculating the resonance frequency at each mode of the 2 DOF. The resonance frequencies of the total system were calculated using the proposed models and it has been found that they were in excellent agreement with those of the FEA. Finally, the developed analysis program was then linked to an optimum design module, and an optimum design of the micro-gyroscope was successfully performed.