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A Digitized Decoupled Dual-axis Micro Dynamically Tuned Gyroscope with Three Equilibrium Rings

  • Xia, Dunzhu (Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University) ;
  • Ni, Peizhen (Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University) ;
  • Kong, Lun (Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University)
  • Received : 2015.09.29
  • Accepted : 2016.07.05
  • Published : 2017.01.02

Abstract

A new digitized decoupled dual-axis micro dynamically tuned gyroscope with three equilibrium rings (TMDTG) is proposed which can eliminate the constant torque disturbance (CTD) caused by the double rotation frequency of a driving shaft with a micro dynamically tuned gyroscope with one equilibrium ring (MDTG). A mechanical and kinematic model of the TMDTG is theoretically analyzed and the structure parameters are optimized in ANSYS to demonstrate reliability. By adjusting the thickness of each equilibrium ring, the CTD can be eliminated. The digitized model of the TMDTG system is then simulated and examined using MATLAB. Finally, a digitized prototype based on FPGA is created. The gyroscope can be dynamically tuned by adjusting feedback voltage. Experimental results show the TMDTG has good performance with a scale factor of $283LSB/^{\circ}/s$ in X-axis and $220LSB/^{\circ}/s$ in Y-axis, respectively. The scale factor non-linearity is 0.09% in X-axis and 0.13% in Y-axis. Results from analytical models, simulations, and experiments demonstrate the feasibility of the proposed TMDTG.

Keywords

References

  1. D.D. Shao, W.Y. Chen, W.P. Zhang, F. Cui, and Q.J. Xiao, "Virtual prototyping simulation for electrostatically suspended rotor micro gyroscope initial levitation," in Proc. Nano/Micro Engineering and Molecular systems Conference., Kaohsiung, Taiwan., Feb., 2011. pp. 9-12.
  2. X.G. Huang, W. Liu, W.Y. Chen, and W.P. Zhang, "Magnetically levitated micro gyroscope and its software realized demodulation circuit," in Proc. ICSICT., Oct., 2006. pp. 608-610.
  3. B. Fang, W.S. Chou, and L. Ding, "An optimal calibration method for a MEMS inertial measurement unit," IEEE Trans. International Journal of Advanced Robotic Systems., vol. 11, no. 14, pp. 1-14, Dec. 2013.
  4. Z.N. Qin, W.Y. Chen, F. Cui, Q.J. Xiao, and W.P. Zhang, "System-level simulation of a micromachined electrostatically suspended gyroscope," in Proc. IEEE international Conference on Nano/Micro Engineered and Molecular systems, Xiamen, China, Jan., 2010. pp. 658-661.
  5. Q. Zheng, L. L. Dong, D. H. Lee, and Z. Q. Gao, "Active disturbance rejection control for MEMS gyroscope," in Proc. American Control Conference, Washington, USA, Jun., 2008. pp. 4425-4430.
  6. D.D. Shao, W.Y. Chen, W.P. Zhang, F. Cui, and Q.J. Xiao, "Virtual prototyping simulation for electrostatically suspended rotor micro gyroscope initial levitation," in proc. 2011 6th IEEE international Conference on Nano/Micro Engineered and Molecular systems, Kaohsiung, Taiwan, Feb 2011. pp. 9-12.
  7. L.J. Jenkins, R.E. Hopkins, and K. Kumar, "Hybrid wafer gyroscope," U.S. Patent US6615681B1, Sep. 9, 2003.
  8. D.Z. Xia, C. Yu, and L. Kong, "A micro dynamically tuned gyroscope with adjustable static capacitance," IEEE Trans. Sensors., vol. 13, no. 2, pp. 2176-2195, Feb. 2013.
  9. H.N. Wang, "The double frequency vibration torque analysis of the dynamically tuned gyroscope," Chinese Journal of Space Science., vol. 3, no. 4, pp. 310-322, Oct. 1983.
  10. H.L. Cao, H. S. Li, S. R. Wang, L. B. Huang, and K.Y. Li, "A novel silicon rotor turned gyroscope," Navigation and Control., vol. 1, pp. 47-50, 2010.
  11. J. Cui, X. Z. Chi, H.T. Ding, L. T. Lin, C. Z. Yang, and G. Z. Yan, "Transient response and stability of the AGC-PI closed-loop controlled MEMS vibratory gyroscopes," IEEE Trans. Journal of Micromechanics and Microengineering., vol. 19, no. 12, pp. 1-17, Nov. 2009.
  12. A. Sharma, M.F. Zaman, and F. Ayazi, "A sub 0.20 / Hr bias drift micromechanical silicon gyroscope with automatic CMOS mode-matching," IEEE Trans. Journal of Solid-State Circuits., vol. 44, no. 5, pp. 1593-1608, May. 2009. https://doi.org/10.1109/JSSC.2009.2016996
  13. D.Z. Xia, S.L. Chen, and S.R. Wang, "Development of a prototype miniature silicon microgyroscope," IEEE Trans. Sensors., vol. 9, no. 6, pp. 4586-4605, Jun. 2009.
  14. G. Alexander, Z.Y. Gao, B. Zhou, R. Zhang, and Z.Y. Chen, "Scale factor determination of micro-machined angular rate sensors without a turntable," Tsinghua Science and Technology., vol. 11, no. 5, pp. 533-537, Oct. 2006. https://doi.org/10.1016/S1007-0214(06)70230-9
  15. A. A. Trusov, I. Chepurko, A. R. Schofield, and A. M. Shkel, "A standalone programmable signal processing unit for versatile characterization of MEMS gyroscopes," in Proc. IEEE Sensors Conference., 2007, pp. 244-247.
  16. J. W. Song, J. G. Lee, and T. Kang, "Digital rebalance loop design for a dynamically tuned gyroscope using H2 methodology," Control Engineering Practice., vol. 10, no. 10, pp. 1127-1140, Feb. 2002. https://doi.org/10.1016/S0967-0661(02)00079-5
  17. E. Arnold, and F. Nuscheler, "Compensation methods for a silicon tuning fork gyroscope," Microsyst Technol., vol. 14, no. 4-5, pp. 623-628, Oct. 2007.
  18. D. Keymeulen, C. Peay, D. Foor, A. Bakhshi, P. Withington, K. Yee, and R. Terrile, "FPGA platform for MEMS disc resonance gyroscope (DRG) control," in Proceeding of the SPIE Conference Proceedings., 2008, pp. 69590P-69590P-7.
  19. H. Li, L.Y. Cui, Z.L. Lin, and C.X. Zhang, "Analysis and optimization of dynamic measurement precision of fiber optic gyroscope," Mathmatical Problems in Engineering., vol. 2013, no. 2013, pp. 1-9, Nov. 2013.
  20. B. Yang, S.R. Wang, K.Y. Li, X. Zhu, and H.L. Cao, "Research on a new microelectromechanical hybrid gyroscope," in Proceeding of the 2010 IEEE International Conference on Information and Automation., 2010, pp. 1520-1525.