Feedback Controller Design for a In-plane Gimbaled Micro Gyroscope Using H-infinity and State Weighted Model Reduction Techniques

In this paper, presented is a feedback control loop, for an in-plane gimbaled micro gyroscope based on methodology and state weighted model reduction technique. The micro gyroscope is the basic inertial sensors. To improve the performances such as stability, wide dynamic range, bandwidth and especially robustness, it is necessary to design a feedback control loop, which must be robust, because the manufacturing process errors can be large. Especially, to obtain wide bandwidth, the feedback controller is indispensable, because the gyroscope is high Q factor system and has small open loop bandwidth. Moreover, the feedback controller reduces the effect...