마이크로 3축 링 자이로스코프의 동역학

Dynamics of a Micro Three-Axis Ring Gyroscope

  • 발행 : 2002.11.01

초록

In this paper, we analyse and present mechanical dynamic characteristics of a micro-machined vibrating silicon ring gyroscope which can measure rates of turn about three orthogonal axes. The ring gyroscope has a ring connected to the gyroscope main body by support-ligaments which are arranged with cyclic symmetry. The natural modes of its vibration can be distinguished into the in-plane motion and the out-of-plane motion which are coupled by the gyro-effect due to the rotation of the gyroscope main body. (omitted)

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