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http://dx.doi.org/10.3795/KSME-A.2003.27.11.1840

Structural Analysis and Optimum Design of a De-coupled Vertical Micro-Gyroscope  

Park, Sung-Kyoon (한양대학교 대학원 기계설계학과)
Jeong, Hee-Moon (한양대학교 대학원 기계설계학과)
Kim, Myung-Hoon (한양대학교 대학원 기계설계학과)
Kim, Hyung-Tae (한양대학교 대학원 기계설계학과)
Ha, Sung-Kyu (한양대학교 기계정보경영공학부)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.27, no.11, 2003 , pp. 1840-1848 More about this Journal
Abstract
This paper presents the structural analysis and optimum design of a vertical micro-gyroscope with decoupled 2 degrees of freedom (DOF), driven by electrostatic force. Simplified beam models were presented to derive the structural stiffness of the driving spring of the U shape and the sensing spring of I shape. A finite element analysis (FEA) was performed to validate each derivation. A total mass and a polar mass moment of inertia were also obtained and used in calculating the resonance frequency at each mode of the 2 DOF. The resonance frequencies of the total system were calculated using the proposed models and it has been found that they were in excellent agreement with those of the FEA. Finally, the developed analysis program was then linked to an optimum design module, and an optimum design of the micro-gyroscope was successfully performed.
Keywords
Micro-Gyroscope; Optimum Design; Finite Element Analysis;
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