Browse > Article
http://dx.doi.org/10.5050/KSNVN.2004.14.1.064

Dynamics of a Micro Three-axis Ring Gyroscope Considering Electrode Effects  

김창부 (인하대학교 기계공학부)
강태민 (인하대학교 대학원 기계공학과)
Publication Information
Transactions of the Korean Society for Noise and Vibration Engineering / v.14, no.1, 2004 , pp. 64-72 More about this Journal
Abstract
In this paper. we analyse and present electro-mechanical dynamic characteristics of a micro-machined vibrating silicon ring gyroscope which can measure angular velocities about three orthogonal axes. The ring gyroscope has a ring connected to the gyroscope main body by support-ligaments which are arranged with cyclic symmetry. The natural modes of its vibration can be distinguished into the in-plane motion and the out-of-plane motion which are coupled by the gyro-effect due to the rotation of the gyroscope main body. The motions of the ring are electro-statically derived. sensed and balanced by electrodes. The equations of motion are formulated. The measuring method of angular velocities by force-to-rebalance is presented. The dynamic characteristics of a ring gyroscope are calculated and compared.
Keywords
Ring Gyroscope; Three-axis; Angular Velocity; Cyclic Symmetry; Electrode; In-plane Motion; Out-of-plane Motion; Natural Mode;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 김창부, 최상현. 2002. "마이크로 3축 링 자이로스코프의 동역학," 한국소음진동공학회논문집, 제12권, 제12호, pp. 1001-1009.   과학기술학회마을   DOI   ScienceOn
2 Yazdi, N., Ayazi, F. and Najafi, K., 1998. "Micromachined Inertial Sensors," Proc. IEEE, Vol. 86, No. 8, pp. 1640-1659.   DOI   ScienceOn
3 Putty, M. W., 1995. "A Micromachined Vibrating Ring Gyroscope," Ph. D. Thesis, University of Michigan, Ann Arber.
4 Putty, M. W. and Najafi, K., 1994. "A Micromachined Vibrating Ring Gyroscope," Tech. Dig. Solid-state Sensor and Actuator Workshop, Hilton Head Island, SC, pp. 213-220.
5 Gallacher, B. J., Burdess, J. S., Harris, A. J. and McNie, M. E., 2001. "Principles of a Three-axis Vibrating Gyroscope," IEEE Transactions on Aerospace and Electronic Systems, Vol. 37, No. 4, pp. 1333-1343.   DOI   ScienceOn
6 Eley, R., Fox, C. H. J. and McWilliam, S., 2000. "Coriolis Coupling Effects on the Vibration of Rotation Rings," Journal of Sound and Vibration, Vol. 238, No. 3, pp. 459-480.   DOI   ScienceOn