• Title/Summary/Keyword: LDD

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Electrical Characteristics of Poly-Si TFT`s with Improved Degradation (열화가 억제된 다결정 실리콘 박막 트랜지스터의 전기적 특성)

  • 변문기;이제혁;백희원;김동진;김영호
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.11a
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    • pp.457-460
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    • 1999
  • The effects of electrical positive stress on n-channel LDD and offset structured poly-Si TFT\`s have been systematically investigated in order to analyze the transfer curve\`s shift mechanism. It has been found that the LDD and offset regions behave as a series resistance that reduce the electric field near drain. Hot carrier effects are reduced because of these results. After electrical stress transfer curve’s shift and variation of the off-current are dependent upon the offset length rather than offset region’s doping concentration. Variation of the subthreshold slope is dependent upon offset region’s doping concentration as well as offset length.

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The Shift of Threshold Voltage and Subthreshold Current Curve in LDD MOSFET Degraded Under Different DC Stress-Biases (DC 스트레스에 의해 노쇠화된 LDD MOSFET에서 문턱 전압과 Subthreshold 전류곡선의 변화)

  • Lee, Myung-Buk;Lee, Jung-Il;Kang, Kwang-Nham
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.26 no.5
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    • pp.46-51
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    • 1989
  • The degradation phenomena induced by hot-carrier injection was studied from the shift of threshold voltage and subthreshold current curve in LDD NMOSFET degraded under different DC stress-biases. Threshold voltage shift ${Delta}V_{tex}$ defined in saturation region was separated into contri butions due to trapped oxide charge $V_{ot}$ and interface traps ${Delta}V_{it}$ generated from midgap to threshold voltage. Under th positive stress electric field (TEX>$V_g>V_d$) condition, the shift of threshold voltage was attributed to the electrons traped ar gate oxide but subthreshold swing was not negative stress electric field ($V_g) condition, holes seems to be injected positive charges so threshold voltage and subthreshold swing were increased.

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Analysis for Threshold-voltage of EPI MOSFET (EPI MOSFET의 문턱 전압 특성 분석)

  • 김재홍;고석웅;임규성;정학기;이종인
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2001.10a
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    • pp.665-668
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    • 2001
  • As reducing the physical size of devices, we can integrate more devices per the unit chip area and make its speed better. We have investigated MOSFET built on an epitaxial layer(EPI) of a heavily-doped ground plane. We compared and analyzed the characteristics of such device structure, i.e., impact ionization, electric field and I-V characteristics curve with lightly-doped drain(LDD) MOSFET. We simulated MOSFET with gate lengths from 0.10 to 0.06${\mu}{\textrm}{m}$ step 0.01${\mu}{\textrm}{m}$ in according to constant voltage scaling theory.

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Scaling theory to minimize the roll-off of threshold voltage for nano scale MOSFET (나노 구조 MOSFET의 문턱전압 변화를 최소화하기 위한 스케일링 이론)

  • 김영동;김재홍;정학기
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2002.11a
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    • pp.494-497
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    • 2002
  • In this paper, we have presented the simulation results about threshold voltage of nano scale lightly doped drain (LDD) MOSFET with halo doping profile. Device size is scaled down from 100nm to 40nm using generalized scaling. We have investigated the threshold voltage for constant field scaling and constant voltage scaling using the Van Dort Quantum Correction Model(QM) and direct tunneling current for each gate oxide thickness. We know that threshold voltage is decreasing in the constant field scaling and increasing in the constant voltage scaling when gate length is reducing, and direct tunneling current is increasing when gate oxide thickness is reducing. To minimize the roll-off characteristics for threshold voltage of MOSFET with decreasing channel length, we know u value must be nearly 1 in the generalized scaling.

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Analysis on the Threshold Voltage of Nano-Channel MOSFET (나노채널 MOSFET의 문턱전압분석)

  • 정정수;김재홍;고석웅;이종인;정학기
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.6 no.1
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    • pp.109-114
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    • 2002
  • In this paper, we have presented the simulation results ah)ut threshold voltage for Si-based MOSFETs with channel length of nano scale. We simulated the Si-based n channel MOSFETs with gate lengths from 180 to 30 nm in accordance to the constant voltage scaling theory and the lateral scaling. These MOSFETs had the lightly doped drain(LDD) structure, which is used for the reduction of electric field magnitude and short channel effects at the drain region. The stronger electric field at this region is due to scaling down. We investigated and analyzed the threshold voltage of these devices. This analysis will provide insight into some applicable limitations at the ICs and used for basis data at VLSI.

Investigation for Channel Length Influence in Si-Based MOSFET (Si-기반 MOSFET의 채널 길이에 따른 영향의 조사)

  • 정정수;심성택;장광균;정학기;이종인
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2000.10a
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    • pp.480-484
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    • 2000
  • The channel length influence of n-channel Si-based FETs is investigated by computer simulation. Using a two-dimensional hydrodynamic model, devices having various gate length are examined. We have observed the characteristics of LDD model of MOSFET by investigating of their current, voltage, electric field and impact ionization. These devices are scaled using various factors. We have analyzed I-V characteristics and the effect of impact ionization according to channel length.

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High Speed Sram Transistor Performance 향상에 관한 연구

  • NamGung, Hyeon;Hwang, Deok-Seong;Jang, Hyeong-Sun;Park, Sun-Byeong;Hong, Sun-Hyeok;Kim, Sang-Jong;Kim, Seok-Gyu;Kim, Gi-Jun;No, Yong-Han
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.11a
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    • pp.97-98
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    • 2006
  • For high performance transistor in the 0.14um generation, high speed sram is using a weak region of SCE(Short Channel Effect). It causes serious SCE problem (Vth Roll-Off and Punch-Through etc). This paper shows improvement of Vth roll-off and Ion/Ioff characteristics through high concentration Pocket implant, LDD(Light Dopped Dram) and low energy Implant to reduce S/D Extension resistance. We achieve stabilized Vth and Improved transistor Ion/Ioff performance of 10%.

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Fabrication and its characteristics of $WN_x$ self-align gate GaAs LDD MESFET ($WN_x$ Self-Align Gate GaAs LDD MESFET의 제작 및 특성)

  • 문재경;김해천;곽명현;강성원;임종원;이재진
    • Journal of the Korean Vacuum Society
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    • v.8 no.4B
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    • pp.536-540
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    • 1999
  • We have developed a refractory WNx self-aligned gate GaAs metal-semiconductor field-effect transistor(MESFET) using $SiO_2$ side-wall process. The MESFET hasa fully ion-implanted, planar, symmetric self-alignment structure, and it is quite suitable for integration. The uniform trans-conductance of 354nS/mm up to Vgs=+0.6V and the saturation current of 171mA/mm were obtained. As high as 43GHz of cut-off frequency hs been realized without any de-embedding of parasitic effects. The refractory WNx self-aligned gate GaAs MESFET technology is one of the most promising candidates for realizing linear power amplifier ICs and multifunction monolithic ICs for use in the digital mobile communication systems such as hand-held phone(HHP), personal communication system (PCS) and wireless local loop(WLL).

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Characterization of Current Drivability and Reliability of 0.3 um Inverse T-Gate MOS Compared with Those of Conventional LDD MOS (0.3 um급 Inverse-T Gate 모스와 LDD 모스의 전류구동력 및 신뢰성 특성비교)

  • 윤창주;김천수;이진호;김대용;이진효
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.30A no.8
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    • pp.72-80
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    • 1993
  • We fabricated 0.3um gate length inverse-T gate MOS(ITMOS) and conventional lightly doped drain oxide spacer MOS(LDDMOS), and studied electrical characteristics for comparison. Threshold voltage of 0.3um gate length device was 0.58 V for ITMOS and 0.6V for LDDMOS. Measured subthreshold characteristics showed a slope of 85mV/decades for both ITLDD and LDDMOS. Maximum transconductance at V S1ds T=V S1gs T=3.3V was 180mS/mm for ITMOS and 163mS/mm for LDDMOS respectively. GIDL current was observed to be 0.1pA/um for ITOMS and 0.8pA/um for LDDMOS. Substrate current of ITMOS as a function of drain current was found to be reduced by a foactor of 2.5 compared with that of LDDMOS.

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Analysis on the breakdown characteristics of ESD-protection NMOS transistors based on device simulations (소자 시뮬레이션을 이용한 ESD 보호용 NMOS 트랜지스터의 항복특성 분석)

  • 최진영;임주섭
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.34D no.11
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    • pp.37-47
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    • 1997
  • Utilizing 2-dimensional device simulations incorporating lattic eheating models, we analyzed in detail the DC breakdown characterisics of NMOS trasistors with different structures, which are commonly used as ESD protection transistors. The mechanism leading to device failure resulting from electrostatic discharge was explained by analyzing the 1st and 2nd breakdown characteristics of LDD devices. Also a criteria for more robust designs of NMOS transistor structures against ESD was suggested by examining the characteristics changes with changes in structural parameters such as the LDD doping concentration, the drain junction depth, the distance between source/drain contacts, and the source junction area.

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