• JSTS:Journal of Semiconductor Technology and Science
• /
• 제14권3호
• /
• pp.263-267
• /
• 2014

Super junction trench gate power MOSFETs have been receiving attention in terms of the trade-off between breakdown voltage and on-resistance. The vertical structure of super junction trench gate power MOSFETs allows the on-resistance to be reduced compared with conventional Trench Gate Power MOSFETs. The heat release of devices is also decreased with the reduction of on-resistance. In this paper, Lattice Temperature of two devices, Trench Gate Power MOSFET and Super junction trench gate power MOSFET, are compared in several temperature circumstance with the same Breakdown Voltage and Cell-pitch. The devices were designed by 100V Breakdown voltage and measured from 250K Lattice Temperature. We have tried to investigate how much temperature rise in the same condition. According as temperature gap between top of devices and bottom of devices, Super junction trench gate power MOSFET has a tendency to generate lower heat release than Trench Gate Power MOSFET. This means that Super junction trench gate power MOSFET is superior for wide-temperature range operation. When trench etching process is applied for making P-pillar region, trench angle factor is also important component. Depending on trench angle, characteristics of Super junction device are changed. In this paper, we focus temperature characteristic as changing trench angle factor. Consequently, Trench angle factor don't have a great effect on temperature change.

• 한국전기전자재료학회논문지
• /
• 제18권7호
• /
• pp.667-674
• /
• 2005

In this paper the gate overlap length of the LDMOST is optimized for obtaining longer device lifetime. The LDMOSI device with drift region is fabricated using the $0.25\;{\mu}m$ CMOS Process. The gate overlap lengths on drift region are $0.1\;{\mu}m,\;0.4\;{\mu}m\;0.8\;{\mu}m\;and\;1.1\;{\mu}m$, respectively. The breakdown voltages, on-resistances and hot-carrier degradations of the fabricated LDMOST devices are characterized. The LDMOST device with gate overlap length of $0.4\;{\mu}m$ showed the longest on-resistance lifetime, 0.02 years and breakdown voltage of 22 V and on-resistance of $23\;m\Omega{\cdot}mm^2$.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2010년도 하계학술대회 논문집
• /
• pp.389-389
• /
• 2010

In this paper, an investigation of the benefits of gate oxide for 8" the manufacturing of Trench MOSFETs and its impact on device performance is presented. Layout dimensions of trench power MOSFETs have been continuously reduced in order to decrease the specific on-resistance, maintaining equal vertical dimensions. We discuss experimental results for devices with a pitch size down fabricated with an unconventional gate trench topology and a simplified manufacturing scheme. The fabricated Trench MOSFETs are observed the trench gate oxidation by SEM.

• JSTS:Journal of Semiconductor Technology and Science
• /
• 제4권1호
• /
• pp.27-31
• /
• 2004

Models and simulations of gate tunneling current for thinoxide MOSFETs and Double-Gate SOIs are discussed. A guideline in design of leaky MOS capacitors is proposed and resonant gate tunneling current in DG SOI simulated based on quantum-mechanicalmodels. Gate tunneling current in fully-depleted, double-gate SOI MOSFETs is characterized based on quantum-mechanical principles. The simulated $I_G-V_G$ of double-gate SOI has negative differential resistance like that of the resonant tunnel diodes.

• 한국정보디스플레이학회:학술대회논문집
• /
• 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권2호
• /
• pp.1597-1599
• /
• 2007

In TFT-LCD, mura is a defect which degrades the display quality. The resistance difference between gate lines is the main cause of H-Block mura. Two methods could eliminate this defect. A thinner gate layer or gate fan-out pattern decrease mura level. H-Block mura has been reduced after implementing the new schemes.

• 조명전기설비학회논문지
• /
• 제19권6호
• /
• pp.9-15
• /
• 2005

본 연구는 새로 고안된 부정-논리곱 논리기능을 가지는 방전 논리 게이트 플라즈마 디스플레이 패널의 논리 게이트 방전특성을 해석한 것이다. 이 방전 논리 게이트는 방전 경로에 따른 전극사이의 전압을 제어하여 논리 출력을 유도한다. 실험결과 논리 게이트의 방전특성은 두 수직전극에 인가되는 전압들의 상호관계에 영향을 받는다는 것을 알았다. 그리고 대화면 PDP에의 적용 가능성을 검토하기 위하여 전극의 선저항에 의한 방전특성을 평가한 결과, 두 수직전극들의 선저항에 의한 전압강하가 논리 게이트의 방전에 미치는 영향은 미미한 것으로 추론되었다. 실험을 통해 방전 논리 게이트를 구성하는 각 전극들의 펄스전압과 전류제한저항의 최적 값들을 구하였으며 49[V]의 최대동작마진을 얻었다.

• 조명전기설비학회논문지
• /
• 제28권12호
• /
• pp.116-123
• /
• 2014

In case of power electronics, th power loss and EMI noise of IGBT is different depends on a adopting technology with the same power rating. To reduce the EMI noise, we could increase the resistance of gate. But in this case, the power loss of IGBT is increased, In this paper, we simulated the power loss of IGBT with the speed profile of elevator by the changing IGBT type, the voltage between gate and emitter, the resistance of gate in converter and inverter for elevator. To optimize the power electronics with the satisfied life time, It is necessary that we calculate the power loss and the rise of temperature in IGBT with the adopting technology type, the resistence of gate, the voltage between gate and emitter.

• 대한전자공학회논문지
• /
• 제27권11호
• /
• pp.49-54
• /
• 1990

본 논문에서는 LDD(lightly doped drain)구조를 갖는 짧은 채널 MOSFET에서의 기생저항의 게이트 전압 의존도에 대한 모형을 제시하였다. 게이트 전극 밑에 위치한 LDD 영역에서는 게이트 전압에 의해 준 이차원적인 축적층(quasi two-dimensional accumulation layer)이 형성된다. 소오스 측 LDD 기생저항을 축적층의 저항과 벌크 LDD 저항의 병렬 연결로 취급하였으며 별크 LDD 저항은 채널의 반전층 끝으로부터 ${n^+}$영역의 경계까지 퍼짐 저항으로 근사하였다. 그리고 접합에서의 도우핑 농도 구배가 LDD 저항에 미치는 영향이 토의하였다. 본 모형의 결과로 선형 영역에서는 LDD 저항이 게이트 전압의 증가에 따라 감소하고, 포화영역에서는 채널과 LDD에서 속도포화를 고려한 결과, 게이트 전압에 대해 준 일차적으로 증가하는 것으나 나타나 발표된 실험결과들과 일치하였다.

• Transactions on Electrical and Electronic Materials
• /
• 제17권5호
• /
• pp.302-305
• /
• 2016

In this paper, a low on-resistance and high current driving capability trench gate power metal-oxide-semiconductor field-effect transistor (MOSFET) incorporating a current sensing feature is proposed and evaluated. In order to realize higher cell density, higher current driving capability, cost-effective production, and higher reliability, self-aligned trench etching and hydrogen annealing techniques are developed. While maintaining low threshold voltage and simultaneously improving gate oxide integrity, the double-layer gate oxide technology was adapted. The trench gate power MOSFET was designed with a 0.6 μm trench width and 3.0 μm cell pitch. The evaluated on-resistance and breakdown voltage of the device were less than 24 mΩ and 105 V, respectively. The measured sensing ratio was approximately 70:1. Sensing ratio variations depending on the gate applied voltage of 4 V ~ 10 V were less than 5.6%.

• 한국재료학회:학술대회논문집
• /
• 한국재료학회 2012년도 춘계학술발표대회
• /
• pp.67.1-67.1
• /
• 2012

Graphene has attracted much attention for future nanoelectronics due to its superior electrical properties. Owing to its extremely high carrier mobility and controllable carrier density, graphene is a promising material for practical applications, particularly as a channel layer of high-speed FET. Furthermore, the planar form of graphene is compatible with the conventional top-down CMOS fabrication processes and large-scale synthesis by chemical vapor deposition (CVD) process is also feasible. Despite these promising characteristics of graphene, much work must still be done in order to successfully develop graphene FET. One of the key issues is the process technique for gate dielectric formation because the channel mobility of graphene FET is drastically affected by the gate dielectric interface quality. Formation of high quality gate dielectric on graphene is still a challenging. Dirac voltage, the charge neutral point of the device, also strongly depends on gate dielectrics. Another performance killer in graphene FET is source/drain contact resistance, as the contact resistant between metal and graphene S/D is usually one order of magnitude higher than that between metal and silicon S/D. In this presentation, the key issues on graphene-based FET, including organic-inorganic hybrid gate dielectric formation, controlling of Dirac voltage, reduction of source/drain contact resistance, device structure optimization, graphene gate electrode for improvement of gate dielectric reliability, and CVD graphene transfer process issues are addressed.