• 제목/요약/키워드: Gate current

검색결과 1,533건 처리시간 0.024초

Fabrication of Sputtered Gated Silicon Field Emitter Arrays with Low Gate Leakage Currents by Using Si Dry Etch

  • Cho, Eou Sik;Kwon, Sang Jik
    • Transactions on Electrical and Electronic Materials
    • /
    • 제14권1호
    • /
    • pp.28-31
    • /
    • 2013
  • A volcano shaped gated Si-FEA (silicon field emitter array) was simply fabricated using sputtering as a gate electrode deposition and lift-off for the removal of the oxide mask, respectively. Due to the limited step coverage of well-controlled sputtering and the high aspect ratio in Si dry etch caused by high RF power, it was possible to obtain Si FEAs with a stable volcano shaped gate structure and to realize the restriction of gate leakage current in field emission characteristics. For 100 tip arrays and 625 tip arrays, gate leakage currents were restricted to less than 1% of the anode current in spite of the volcano-shaped gate structure. It was also possible to keep the emitters stable without any failure between the Si cathode and gate electrode in field emission for a long time.

증착시 도핑된 비정질 Si 게이트를 갖는 MOS 캐패시터와 트랜지스터의 전기적 특성 (Electrical Properties of MOS Capacitors and Transistors with in-situ doped Amorphous Si Gate)

  • 이상돈;이현창;김재성;김봉렬
    • 전자공학회논문지A
    • /
    • 제31A권6호
    • /
    • pp.107-116
    • /
    • 1994
  • In this paper, The electrical properties of MOS capacitors and transistoras with gate of in-situ doped amorphous Si and poly Si doped by POCI$_3$. Under constant current F-N stress, MOS capacitors with in-situ doped amorphous Si gate have shown the best resistance to degradation in reliabilty properties such as increase of leakage current, shift of gate voltage (V$_{g}$). shift of flat band voltage (V$_{fb}$) and charge to breakdown(Q$_{bd}$). Also, MOSFETs with in-situ doped amorphous Si gate have shown to have less degradation in transistor properties such as threshold voltage, transconductance and drain current. These improvements observed in MOS devices with in-situ doped amorphous Si gate is attributed to less local thinning spots at the gate/SiO$_2$ interface, caused by the large grain size and the smoothness of the surface at the gate/SiO$_2$ interface.

  • PDF

높은 항복 전압 특성을 가지는 이중 게이트 AlGaN/GaN 고 전자 이동도 트랜지스터 (A Dual Gate AlGaN/GaN High Electron Mobility Transistor with High Breakdown Voltages)

  • 하민우;이승철;허진철;서광석;한민구
    • 대한전기학회논문지:전기물성ㆍ응용부문C
    • /
    • 제54권1호
    • /
    • pp.18-22
    • /
    • 2005
  • We have proposed and fabricated a dual gate AlGaN/GaN high electron mobility transistor (HEMT), which exhibits the low leakage current and the high breakdown voltage for the high voltage switching applications. The additional gate between the main gate and the drain is specially designed in order to decrease the electric field concentration at the drain-side of the main gate. The leakage current of the proposed HEMT is decreased considerably and the breakdown voltage increases without sacrificing any other electric characteristics such as the transconductance and the drain current. The experimental results show that the breakdown voltage and the leakage current of proposed HEMT are 362 V and 75 nA while those of the conventional HEMT are 196 V and 428 nA, respectively.

Analysis of Failure in Miniature X-ray Tubes with Gated Carbon Nanotube Field Emitters

  • Kang, Jun-Tae;Kim, Jae-Woo;Jeong, Jin-Woo;Choi, Sungyoul;Choi, Jeongyong;Ahn, Seungjoon;Song, Yoon-Ho
    • ETRI Journal
    • /
    • 제35권6호
    • /
    • pp.1164-1167
    • /
    • 2013
  • We correlate the failure in miniature X-ray tubes with the field emission gate leakage current of gated carbon nanotube emitters. The miniature X-ray tube, even with a small gate leakage current, exhibits an induced voltage on the gate electrode by the anode bias voltage, resulting in a very unstable operation and finally a failure. The induced gate voltage is apparently caused by charging at the insulating spacer of the miniature X-ray tube through the gate leakage current of the field emission. The gate leakage current could be a criterion for the successful fabrication of miniature X-ray tubes.

비대칭 이중게이트 MOSFET의 차단전류에 대한 전도중심 의존성 분석 (Analysis of Conduction-Path Dependent Off-Current for Asymmetric Double Gate MOSFET)

  • 정학기
    • 한국정보통신학회논문지
    • /
    • 제19권3호
    • /
    • pp.575-580
    • /
    • 2015
  • 비대칭 이중게이트(double gate; DG) MOSFET는 단채널 효과를 감소시킬 수 있는 새로운 구조의 트랜지스터이다. 본 연구에서는 비대칭 DGMOSFET의 전도중심에 따른 차단전류를 분석하고자 한다. 전도중심은 채널 내 캐리어의 이동이 발생하는 상단게이트에서의 평균거리로써 상하단 게이트 산화막 두께를 달리 제작할 수 있는 비대칭 DGMOSFET에서 산화막 두께에 따라 변화하는 요소이며 상단 게이트 전압에 따른 차단전류에 영향을 미치고 있다. 전도중심을 구하고 이를 이용하여 상단 게이트 전압에 따른 차단전류를 계산함으로써 전도중심이 차단전류에 미치는 영향을 산화막 두께 및 채널길이 등을 파라미터로 분석할 것이다. 차단전류를 구하기 위하여 포아송방정식으로부터 급수 형태의 해석학적 전위분포를 유도하였다. 결과적으로 전도중심의 위치에 따라 차단전류는 크게 변화하였으며 이에 따라 문턱전압 및 문턱전압이하 스윙이 변화하는 것을 알 수 있었다.

온도변화에 따른 GaAs MESFET′s 노이즈 특성 연구 (A study on the GaAs MESFET′s noise characteristics with temperature dependency)

  • 김시한;이명수;박지홍;안형근;한득영
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2002년도 하계학술대회 논문집
    • /
    • pp.322-325
    • /
    • 2002
  • In this study, noise figures of 0.3 $\mu\textrm{m}$-GaAs MESFETs are predicted experimentally with different temperatures. Both the noise figure and the gate leakage current are obtained with wide range of temperatures(27$^{\circ}C$∼300$^{\circ}C$). From the results, gate leakage current increases with temperatures. It is expected that gate leakage current contributes directly to the increase of shot noise current. It is therefore highly recommended to apply an accurate noise analysis to the design of the devices and modules at high temperatures. Fini,Uy the relation between the gate currents resulting in the increase of noise and the noise figures of submicron GaAs MESFETs are traced with different temperatures

  • PDF

Cooper pair transistor에서 gate voltage에 의한 임계전류의 진동 (Oscillation of Critical Current by Gate Voltage in Cooper Pair Transistor)

  • 송운;정연욱;김남
    • Progress in Superconductivity
    • /
    • 제11권2호
    • /
    • pp.158-161
    • /
    • 2010
  • We measured the critical current of a Cooper pair transistor consisting of two Josephson junctions and a gate electrode. The Cooper pair transistors were fabricated by using electron-beam lithography and double-angle evaporation technique. The Gate voltage dependence of critical current was measured by observing voltage jumps at various gate voltages while sweeping bias current. The observed oscillation was 2e-periodic, which shows the Cooper pair transistor had low level of quasiparticle poisoning.

Gate Leakage Current of Power GaAs MESFET's at High Temperature

  • Won Chang-sub;Ahn Hyungkeun;Han Deuk-Young
    • 전력전자학회:학술대회논문집
    • /
    • 전력전자학회 2001년도 Proceedings ICPE 01 2001 International Conference on Power Electronics
    • /
    • pp.44-46
    • /
    • 2001
  • Increase of gate leakage current causes decrease of gain and increase of noise. In this paper, gate leakage current of GaAs MESEFTs' has been traced with different temperatures from $27^{\circ}C\;to\;350^{\circ}C$ to obtain the zero voltage saturation current $J_s$ which is critical to the temperature dependency of total current. From the results, thermal leakage current coefficient has been proposed to compensate for the total current due to the thermionic emission, tunneling, generation and/or hole injection.

  • PDF

이중 Gate를 갖는 Trench Emitter IGBT의 특성 (The Characteristics of a Dual gate Trench Emitter IGBT)

  • 강영수;정상구
    • 대한전기학회논문지:전기물성ㆍ응용부문C
    • /
    • 제49권9호
    • /
    • pp.523-526
    • /
    • 2000
  • A dual gate trench emitter IGBT structure is proposed and studied numerically using the device simulator MEDICI. The on-state forward voltage drop latch-up current density turn-off time and breakdown voltage of the proposed structure are compared with those of the conventional DMOS-IGBT and trench gate IGBT structures. The proposed structure forms an additional channel and increases collector current level resulting in reduction of on -state forward voltage drop. In addition the trench emitter increases latch-up current density by 148% in comparison with that for the conventional DMOS-IGBT and by 83% compared with that for the trench gate IGBT without degradation in breakdown voltage when the half trench gate width(Tgw) and trench emitter depth(Ted) are fixed at $1.5\mum\; and\; 2\mum$, respectively

  • PDF

Dual Gate Emitter Switched Thyristor의 Latch-up 전류 특성 (Characteristics of Latch-up Current of the Dual Gate Emitter Switched Thyristor)

  • 이응래;오정근;이형규;주병권;김남수
    • 한국전기전자재료학회논문지
    • /
    • 제17권8호
    • /
    • pp.799-805
    • /
    • 2004
  • Two dimensional MEDICI simulator is used to study the characteristics of latch-up current of Dual Gate Emitter Switched Thyristor. The simulation is done in terms of the current-voltage characteristics, latch-up current density, ON-voltage drop and electrical property with the variations of p-base impurity concentrations. Compared with the other power devices such as MOS Controlled Cascade Thyristor(MCCT), Conventional Emitter Switched Thyristor(C-EST) and Dual Channel Emitter Switched Thyristor(DC-EST), Dual Gate Emitter Switched Thyristor(DG-EST) shows to have the better electrical characteristics, which is the high latch-up current density and low forward voltage-drop. The proposed DG-EST which has a non-planer p-base structure under the floating $N^+$ emitter indicates to have the better characteristics of latch-up current and breakover voltage.