• 제목/요약/키워드: GIDL

검색결과 30건 처리시간 0.035초

SGOI 기판을 이용한 1T-DRAM에 관한 연구 (Performance of capacitorless 1T-DRAM cell on silicon-germanium-on-insulator (SGOI) substrate)

  • 정승민;오준석;김민수;조원주
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
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    • pp.346-346
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    • 2010
  • A capacitorless one transistor dynamic random access memory (1T-DRAM) on silicon-germanium-on-insulator substrate was investigated. SGOI technology can make high effective mobility because of lattice mismatch between the Si channel and the SiGe buffer layer. To evaluate memory characteristics of 1T-DRAM, the floating body effect is generated by impact ionization (II) and gate induced drain leakage (GIDL) current. Compared with use of impact ionization current, the use of GIDL current leads to low power consumption and larger sense margin.

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저전력 응용을 위한 28 nm 금속 게이트/high-k MOSFET 디자인 (28 nm MOSFET Design for Low Standby Power Applications)

  • 임토우;장준용;김영민
    • 전기학회논문지
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    • 제57권2호
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    • pp.235-238
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    • 2008
  • This paper explores 28 nm MOSFET design for LSTP(Low Standby Power) applications using TCAD(Technology Computer Aided Design) simulation. Simulated results show that the leakage current of the MOSFET is increasingly dominated by GIDL(Gate Induced Drain Leakage) instead of a subthreshold leakage as the Source/Drain extension doping increases. The GIDL current can be reduced by grading lateral abruptness of the drain at the expense of a higher Source/Drain series resistance. For 28 nm MOSFET suggested in ITRS, we have shown Source/Drain design becomes even more critical to meet both leakage current and performance requirement.

GIDL과 SILC가 DRAM refresh 회로의 성능저하에 미치는 영향 (The effect of GIDL and SILC on the performance degradation of the refresh circuit in DRAM)

  • 이병진;윤병오;홍성희;유종근;전석희;박종태
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 1998년도 하계종합학술대회논문집
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    • pp.429-432
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    • 1998
  • The impact of hot carrier induced gate leakage current on the refresh time of memory devices has been examined. The maximum allowable supply voltage for cell transistor has been determined form the degradation of the refresh time. The desing guideline for cell capacitors and refresh circuits has been suggested.

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Rigorous Design of 22-nm Node 4-Terminal SOI FinFETs for Reliable Low Standby Power Operation with Semi-empirical Parameters

  • Cho, Seong-Jae;O'uchi, Shinichi;Endo, Kazuhiko;Kim, Sang-Wan;Son, Young-Hwan;Kang, In-Man;Masahara, Meishoku;Harris, James S.Jr;Park, Byung-Gook
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제10권4호
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    • pp.265-275
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    • 2010
  • In this work, reliable methodology for device design is presented. Based on this method, the underlap length has been optimized for minimizing the gateinduced drain leakage (GIDL) in a 22-nm node 4-terminal (4-T) silicon-on-insulator (SOI) fin-shaped field effect transistor (FinFET) by TCAD simulation. In order to examine the effects of underlap length on GIDL more realistically, doping profile of the source and drain (S/D) junctions, carrier lifetimes, and the parameters for a band-to-band tunneling (BTBT) model have been experimentally extracted from the devices of 90-nm channel length as well as pnjunction test element groups (TEGs). It was confirmed that the underlap length should be near 15 nm to suppress GIDL effectively for reliable low standby power (LSTP) operation.

채널 구조에 따른 1T-DRAM Cell의 메모리 특성 (Memory Characteristics of 1T-DRAM Cell by Channel Structure)

  • 장기현;정승민;박진권;조원주
    • 한국전기전자재료학회논문지
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    • 제25권2호
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    • pp.96-99
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    • 2012
  • We fabricated fully depleted (FD) SOI-based 1T-DRAM cells with planar channel or recessed channel and the electrical characteristics were investigated. In particular, the dependence of memory operating mode on the channel structure of 1T-DRAM cells was evaluated. As a result, the gate induced drain leakage current (GIDL) mode showed a better memory property for planar type 1T-DRAM. On the other hand, the impact ionization (II) mode is more effective for recessed type.

미세소자에서 누설전류의 분석과 열화 (Analysis and Degradation of leakage Current in submicron Device)

  • 배지철;이용재
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1996년도 추계학술대회 논문집
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    • pp.113-116
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    • 1996
  • The drain current of the MOSFET in the off state(i.e., Id when Vgs=0V) is undesired but nevertheless important leakage current device parameter in many digital CMOS IC applications (including DRAMs, SRAMs, dynamic logic circuits, and portable systems). The standby power consumed by devices in the off state have added to the total power consumed by the IC, increasing heat dissipation problems in the chip. In this paper, hot-carrier-induced degra- dation and gate-induced-drain-leakage curr- ent under worse case in P-MOSFET\`s have been studied. First of all, the degradation of gate-induced- drain-leakage current due to electron/hole trapping and surface electric field in off state MOSFET\`s which has appeared as an additional constraint in scaling down p-MOSFET\`s. The GIDL current in p-MOSFET\`s was decreased by hot-electron stressing, because the trapped charge were decreased surface-electric-field. But the GIDL current in n-MOS77T\`s under worse case was increased.

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3차원 SONOS 낸드 플래쉬 메모리 셀 적용을 위한 String 형태의 폴리실리콘 박막형 트랜지스터의 특성 연구 (A Study on Poly-Si TFT characteristics with string structure for 3D SONOS NAND Flash Memory Cell)

  • 최채형;최득성;정승현
    • 마이크로전자및패키징학회지
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    • 제24권3호
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    • pp.7-11
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    • 2017
  • 본 논문은 3차원 낸드 플래쉬 기억 소자에 적용을 위해 소노스(SONOS) 형태로 기억 저장 절연막을 채용하고 채널로 폴리실리콘을 사용한 박막형 트랜지스터에 대해 연구하였다. 셀의 source/drain에는 불순물을 주입 하지 않았고, 셀 양 끝단에는 선택 트랜지스터를 배치하였다. 셀의 채널과 선택 트랜지스터의 source/drain 불순물 농도 변화에 대한 평가를 진행하여 공정 최적화를 하였다. 선택 트랜지스터의 농도 증가 시 채널 전류의 상승 및 삭제특성이 개선됨을 확인 하였는데 이는 GIDL에 의한 홀 생성이 증가하였기 때문이다. 최적화된 공정 변수에 대해 삭제와 쓰기 후 문턱전압의 프로그램 윈도우는 대략 2.5V를 얻었다. 터널 산화막 공정 온도에 대한 평가 결과 온도 증가 시 swing 및 신뢰성 항목인 bake 결과가 개선됨을 확인하였다.

저온 다결정 실리콘 박막 트랜지스터의 비정상적인 Hump 현상 분석 (Analysis of An Anomalous Hump Phenomenon in Low-temperature Poly-Si Thin Film Transistors)

  • 김유미;정광석;윤호진;양승동;이상율;이희덕;이가원
    • 한국전기전자재료학회논문지
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    • 제24권11호
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    • pp.900-904
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    • 2011
  • In this paper, we investigated an anomalous hump phenomenon under the positive bias stress in p-type LTPS TFTs. The devices with inferior electrical performance also show larger hump phenomenon. which can be explained by the sub-channel induced from trapped electrons under thinner gate oxide region. We can confirm that the devices with larger hump have larger interface trap density ($D_{it}$) and grain boundary trap density ($N_{trap}$) extracted by low-high frequency capacitance method and Levinson-Proano method, respectively. From the C-V with I-V transfer characteristics, the trapped electrons causing hump seem to be generated particularly from the S/D and gate overlapped region. Based on these analysis, the major cause of an anomalous hump phenomenon under the positive bias stress in p-type poly-Si TFTs is explained by the GIDL occurring in the S/D and gate overlapped region and the traps existing in the channel edge region where the gate oxide becomes thinner, which can be inferred by the fact that the magnitude of the hump is dependent on the average trap densities.

0.3 um급 Inverse-T Gate 모스와 LDD 모스의 전류구동력 및 신뢰성 특성비교 (Characterization of Current Drivability and Reliability of 0.3 um Inverse T-Gate MOS Compared with Those of Conventional LDD MOS)

  • 윤창주;김천수;이진호;김대용;이진효
    • 전자공학회논문지A
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    • 제30A권8호
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    • pp.72-80
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    • 1993
  • We fabricated 0.3um gate length inverse-T gate MOS(ITMOS) and conventional lightly doped drain oxide spacer MOS(LDDMOS), and studied electrical characteristics for comparison. Threshold voltage of 0.3um gate length device was 0.58 V for ITMOS and 0.6V for LDDMOS. Measured subthreshold characteristics showed a slope of 85mV/decades for both ITLDD and LDDMOS. Maximum transconductance at V S1ds T=V S1gs T=3.3V was 180mS/mm for ITMOS and 163mS/mm for LDDMOS respectively. GIDL current was observed to be 0.1pA/um for ITOMS and 0.8pA/um for LDDMOS. Substrate current of ITMOS as a function of drain current was found to be reduced by a foactor of 2.5 compared with that of LDDMOS.

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박막트랜지스터를 이용한 1T-DRAM에 관한 연구 (A study of 1T-DRAM on thin film transistor)

  • 김민수;정승민;조원주
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
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    • pp.345-345
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    • 2010
  • 1T-DRAM cell with solid phase (SPC) crystallized poly-Si thin film transistor was fabricated and electrical characteristics were evaluated. The fabricated device showed kink effect by negative back bias. Kink current is due to the floating body effect and it can be used to memory operation. Current difference between "1" state and "0" state was defined and the memory properties can be improved by using gate induced drain leakage (GIDL) current.

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