• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.575-576
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• 2013

• 한국전산유체공학회:학술대회논문집
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• 2008.03b
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• pp.581-584
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• 2008

A generation of a particle beam is the key technique in a flow cytometry that measures the fluorescence and light scattering of individual cell and other particulate or molecular analytes in biomedical research. Recent methods performing this function require a laborious and time-consuming assembly. In the present work, we propose a novel device for the generation of an axisymmetrical focusing beam of microparticles (3-D focusing) in a single capillary without sheath flows. This work uses the concept that the particles migrate toward the centerline of the channel when they lag behind the parabolic velocity profile. Particle focusing of spherical particles was successfully made with a beam diameter of about 10 ${\mu}$m. Proposed device provides crucial solutions for simple and innovative 3-D particle focusing method for the applications to the MEMS-based micro-flow cytometry. We believe that this device can be utilized in a wide variety of applications, such as biomedical/ biochemical engineering.

• Particle and aerosol research
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• v.13 no.2
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• pp.53-63
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• 2017

As semiconductor process was highly integrated, particle contamination became a major issue. Because particle contamination is related with process yields directly, particles with a diameter larger than half pitch of gate should be controlled. PBMS (Particle beam mass spectrometry) is one of powerful nano particle measurement device. It can measure 5~500 nm particles at ~ 100 mtorr condition in real time by in-situ method. However its usage is restricted to research filed only, due to its big device volume and high price. Therefore aperture changeable aerodynamic lenses (ACALs) which can control particle focusing characteristics by changing its aperture diameter was proposed in this study. Unlike conventional aerodynamic lenses which changes particle focusing efficiency when operating condition is changed, ACALs can maintain particle focusing efficiency. Therefore, it can be used for a multi-monitoring system that connects one PBMS and several process chambers, which greatly improves the commercialization possibility of the PBMS. ACALs was designed based on Stokes number and evaluated by numerical method. Numerical analysis results showed aperture diameter changeable aerodynamic lenses can focus 5 to 100 nm standard particles at 0.1 to 10 torr upstream pressure.

• Proceedings of the KSRS Conference
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• 2005.10a
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• pp.601-603
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• 2005

Refocusing methods are used to compensate optical performance degradation of high resolution satellite camera during on-orbit operation. Due to mechanical vibration during launch and thermal vacuum environment of space where camera is exposed, the alignment of optical system may have error. The focusing error is dominant of misalignment and caused by the de-space error of secondary mirror of catoptric camera, which is most sensitive to vibration and space environment. The high resolution camera of SPOT, Pleiades and KOMPSAT2 have refocusing device to adjust focusing during orbital operation while QuickBird of US does not use on orbit refocusing method. For the Korsch type optical configuration which is preferred for large aperture space remote sensing camera, secondary mirror and folding mirror are available as refocusing element.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1623-1628
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• 2008

A temperature gradient focusing (TGF) via Joule heating phenomenon was numerically studied. The governing transport equations are implemented into a quasi-1D numerical model to predict the resulting temperature, velocity, and concentration profiles along a microchannel of varying width under an applied electric field. The model is used to analyze the effects of varying certain geometrical parameters of a microchannel on the focusing performance of the device. We show the effects of varying width of the microchannel having a fixed length, and propose the optimal geometry of the device. This method can be easily implemented into lab-on-a-chip (LOC) applications where focusing is required based on its simple design.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.11a
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• pp.65-69
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• 2004

The small form factor optical data storage devices are developing rapidly nowadays. Since it is designed for portable and compatibility with flash memory, its components such as disk, head, focusing actuator, and spindle motor should be assembled within 5 m thickness. The thickness of focusing actuator is within 2 mm and the total working range is $+/-100{\mu}m$, with the resolution of less than $1{\mu}m$. Since the thickness is limited tightly, it is hard to place the yoke that closes the magnetic circuit and hard to make strong flux density without yoke. Therefore, Halbach array is adopted to increase the magnetic flux of one side without yoke. The proposed Halbach array type focusing actuator has the advantage of thin actuation structure with sacrificing less flux density than conventional magnetic array. The optical head unit is moved on the swing arm type tracking actuator. Focusing coil is attached to swing arm, and Halbach magnet array is positioned at the bottom of deck along the tracking line, and focusing actuator exerts force by the Fleming's left hand rule. The working range and resolution of focusing actuator are analyzed with FEM and experiment.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.10a
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• pp.885-886
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• 2012

• The KSFM Journal of Fluid Machinery
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• v.14 no.2
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• pp.17-24
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• 2011

Temperature gradient focusing (TGF) of analytes via Joule heating is achieved when electric field is applied along a microchannel of varying width. The effect of varying width of the microchannel for the focusing performance of the device was numerically studied. The governing equations were implemented into a quasi-1D numerical model along a microchannel. The validity of the numerical model was verified by a comparison between numerical and experimental results. The distributions of temperature, velocity, and concentration along a microchannel were predicted by the numerical results. The narrower middle width and wider outside width of the channel having the fixed length contribute to improve the focusing performance of the device. However, too narrow middle width of the channel generates a higher temperature which can cause the problems including sample denaturation and buffer solution boiling. Therefore, the channel geometry should be optimized to prevent these problems. The optimal widths of the microchannel for the improvement on TGF were proposed and this model can be easily applied to lab-on-a-chip (LOC) applications where focusing is required based on its simple design.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.34 no.1
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• pp.61-66
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• 2010

In our previous work, 3-dimensional hydrodynamic focusing microfluidic device (3D-HFMD) has been developed with the help of locally increased aspect ratio of thickness to width without any horizontal separation wall. In this study, we have investigated 3-dimensional hydrodynamic focusing behaviors inside the 3D-HFMD according to the various geometric and flow conditions. The parametric study has been extensively carried out for the effects of geometric and flow conditions on 3-dimensional hydrodynamic focusing with both 3D-HFMD and previous microfluidic device design based on three-dimensional computational fluid dynamics (CFD) simulations. The CFD simulations suggested the proper design window of channel geometry and flow conditions.

• Transactions on Electrical and Electronic Materials
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• v.3 no.1
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• pp.30-37
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• 2002

A focusing grating coupler (FGC) was not fabricated by the 'Continuous Path Control'writing strategy but by an electron-beam lithography system of more general exposure mode, which matches not only the address grid with the grating period but also an integer multiple of the address grid resolution (5 nm). To more simplify the fabrication, we are able to reduce a process step without large decrease of pattern quality by excluding a conducting material or layer such as metal (Al, Cr, Au), which are deposited on top or bottom of an e-beam resist to prevent charge build-up during e-beam exposure. A grating pitch period and an aperture feature size of the FGC designed and fabricated by e-beam lithography and reactive ion etching were ranged over 384.3 nm to 448.2 nm, and 0.5 $\times$ 0.5 mm$^2$area, respectively. This fabrication method presented will reduce processing time and improve the grating quality by means of a consideration of the address grid resolution, grating direction, pitch size and shapes when exposing. Here our investigations concentrate on the design and efficient fabrication results of the FGC for coupling from slab waveguide to a spot in free space.