Fabrication Technology of the Focusing Grating Coupler using Single-step Electron Beam Lithography |
Kim, Tae-Youb
(Data Storage Device Team, Advanced Micro-Electronics Research Laboratory Electrics and Telecommunication Research Institute)
Kim, Yark-Yeon (Data Storage Device Team, Advanced Micro-Electronics Research Laboratory Electrics and Telecommunication Research Institute) Han, Gee-Pyeong (Data Storage Device Team, Advanced Micro-Electronics Research Laboratory Electrics and Telecommunication Research Institute) Paek, Mun-Cheol (Data Storage Device Team, Advanced Micro-Electronics Research Laboratory Electrics and Telecommunication Research Institute) Kim, Hae-Sung (Millimeter-wave Innovation Technology Research Center, Dongguk University) Lim, Byeong-Ok (Millimeter-wave Innovation Technology Research Center, Dongguk University) Kim, Sung-Chan (Millimeter-wave Innovation Technology Research Center, Dongguk University) Shin, Dong-Hoon (Millimeter-wave Innovation Technology Research Center, Dongguk University) Rhee, Jin-Koo (Millimeter-wave Innovation Technology Research Center, Dongguk University) |
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