Development of particle focusing device to monitor various low pressure processes |
Kim, Myungjoon
(Environmental System Research Division, Korea Institute of Machinery and Materials)
Kim, Dongbin (School of Mechanical Engineering, Sungkyunkwan University) Kang, Sang-Woo (Vacuum Center, Korea Research Institute of Standards and Science) Kim, Taesung (School of Mechanical Engineering, Sungkyunkwan University) |
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13 | Choi, H., Kim, H., Yoon, D., Lee, J.W., Kang, B.K., Kim, M.S., Park, J.G., Kwon, S.B., and Kim, T. (2013). Development of CO2 gas cluster cleaning method and its characterization. Microelectronic Engineering, 102, 87-90. DOI |
14 | Kim, D., Mun, J., Kim, H., Yun, J.Y., Kim, Y.J., Kim, T., Kim, T., and Kang, S.W. (2016). Development of particle characteristics diagnosis system for nanoparticle analysis in vacuum. Review of Scientific Instruments, 87(2), 023304 DOI |
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