Thermally Stable Co-Silicide Formed by Alloyed $Co_{1-x}Ta_x$ Films
(Cobalt/tantalum alloy 박막을 이용한 Co-silicide 형성 반응 및 열적 안정성 연구)
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- Proceedings of the Korean Ceranic Society Conference
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- 2000.10a
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- pp.159.2-159
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- 2000