• Korean Journal of Optics and Photonics
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• v.14 no.5
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• pp.504-508
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• 2003

We present a new point-diffraction interferometer, which has been devised for the three-dimensional profile measurement of light scattering rough surfaces. The interferometer system has multiple sources of two-point-diffraction and a CCD camera composed of an array of two-dimensional photodetectors. Each diffraction source is an independent two-point-diffraction interferometer made of a pair of single-mode optical fibers, which are housed in a ceramic ferrule to emit two spherical wave fronts by means of diffraction at their free ends. The two spherical wave fronts then interfere with each other and subsequently generate a unique fringe pattern on the test surface. A He-Ne source provides coherent light to the two fibers through a 2${\times}$l optical coupler, and one of the fibers is elongated by use of a piezoelectric tube to produce phase shifting. The xyz coordinates of the target surface are determined by fitting the measured phase data into a global model of multilateration. Measurement has been performed for the warpage inspection of chip scale packages (CSPs) that are tape-mounted on ball grid arrays (BGAs) and backside profile of a silicon wafer in the middle of integrated-circuit fabrication process. When a diagonal profile is measured across the wafer, the maximum discrepancy turns out to be 5.6 ${\mu}{\textrm}{m}$ with a standard deviation of 1.5 ${\mu}{\textrm}{m}$.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.9
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• pp.1728-1735
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• 1992

Holographic interferometry technique has been used for the measurement of whole-field deformation with high sensitivity. However there are some difficulties in quantitatively analyzing the holographic fringes. Recently, quantitative and automatic fringe analysis by using phase shifting method in interferometry has been studied in many fields. In this paper, a real time holographic interferometry system and a phase shifting method combined with digital image processing technique are employed to record and quantitatively analyze holographic fringe patterns. To evaluate our system and analyze errors, comparison of measured deformation with theoretical deformation of cantilever beam was carried out. The accuracy of 4.5% in our system was verified We have tried to apply this method to quantitatively measure the deformation of turbine blade under the bending force.

• Korean Journal of Optics and Photonics
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• v.24 no.6
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• pp.331-337
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• 2013

A large optical surface is fabricated by grinding, polishing and figuring. The grinding process is the most rapid and has the largest amount of fabrication of all processes. If we measure the surface precisely and rapidly in the grinding process, it is possible to improve the efficiency of the fabrication process. Since the surface of grinding process is rough and not shiny, it is not easy to measure the surface using light so that we cannot use an interferometer. Therefore, we have to measure the surface using a mechanical method. We can measure the surface under the grinding process by using a laser tracker which is a portable 3-dimensional coordinate measuring machine. In this paper, we used the laser tracker to measure the surface error of 1 m diameter spherical mirror. This measurement result was compared to that of an interferometer. As a result, surface measurement error was found to be $0.2{\mu}m$ rms (root mean square) and $2.7{\mu}m$ PV (Peak to Valley), which is accurate enough to apply to the rough surface under the grinding stage.

• Korean Journal of Optics and Photonics
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• v.11 no.5
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• pp.317-322
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• 2000

We present a compensation method of the phase change upon reflection in the scannll1g whIte light interferometry. which pracl1cally allows precIse 3-D profIle mappmg for compo~Ite target surfaces comprising of multipledissinular matenals. The compensation method estimates the vanatlon 01 pbase change with the spectral distribution of the light source through first-order approximation, and then diIectly compensates the measurement errors by perIormmg two-wavelength white light intetferomctric measurements. Experimental results prove that the proposed self-compensatIOn mcthod is capable of reducing the measmement error in step height gauging within $\pm2nm$..

• Korean Journal of Optics and Photonics
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• v.13 no.6
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• pp.521-529
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• 2002

We have recently proposed the new concept of a phase-measuring volumetric interferometer that enables us to accurately measure the xyz-coordinates of the probe without metrology frames. The interferometer is composed of a movable target and a fixed photo-detector array. The target is made of point diffraction sources to emit two spherical wavefronts, whose interference is monitored by an array of photo-detectors. Phase shifting is applied to obtain the precise phase values of the photo-detectors. Then the measured phases are fitted to a geometric model of multilateration so as to determine the xyz-location of the target by minimizing least square errors. The proposed interferometer has been designed and built with a volumetric uncertainty of less than 1.0 $\mu\textrm{m}$ within a cubic working volume of side 120 mm. Here, in this paper, we also present error sources, an evaluated uncertainty, and test results from the prototype system. The self-calibration of two-dimensional precision metrology stages is applied to test the performance of the interferometer.

• Korean Journal of Optics and Photonics
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• v.5 no.2
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• pp.191-197
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• 1994

We investigated the properties of various methods of 3 dimensional profilometry to choose the phase shifting technique for the reconstruction of the shape of a given specimen. The pattern was generated by a Twyman-Green interferometer and a PZT was used to shift the fringes on the target surface. The shape was calculated with Hariharan algorithm within the uncertainty of a scaling factor. The optical noise inherent in the laser source was observed to influence the final outcome to a great extent and the need for an exact calibration was noted. noted.

• Applied Chemistry for Engineering
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• v.23 no.6
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• pp.577-582
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• 2012

In this work, vibrational circular dichroism (VCD) technique was applied for the determination of %EE of chiral compounds. It may provide an easy way to determine the %EE with a proper accuracy within 2% error ranges as well as the absolute configuration of enantiomers. We demonstrated herein a flow cell VCD (FT-VCD) technique for time-dependent %EE measurements. The simultaneous monitoring of the mole fraction and %EE for two chiral species (epichlorohydrin and glycidol mixture) in the mixture was shown to be successful without any further separation steps. Thus, we demonstrate that FT-VCD is an appropriate analytical tool to monitor the kinetics of reactions involving chiral molecules. FT-VCD also provides a convenient nondestructive approach for the time dependent determination of the optical purity of individual components in a reaction mixture containing chiral molecules.

• Korean Journal of Optics and Photonics
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• v.15 no.3
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• pp.258-262
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• 2004

The uncertainty of the detector-based candela scale is limited by the area measurement uncertainty of radiometric apertures. The apertures were fabricated with a diamond-turning machine which trimmed the edge of the apertures as sharply as a knife edge. The positions of the apertures were controlled by a digital feedback algorithm to scan the laser spot with the beam waist less than 5 ${\mu}{\textrm}{m}$. The knife edge scan yielded a set of coordinates on the edges of the aperture. The areas of the apertures were obtained by fitting the coordinates to the ellipses. The relative standard uncertainty of the measurement was estimated to be 8${\times}$10$^{-5}$.

• Korean Journal of Optics and Photonics
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• v.15 no.6
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• pp.539-546
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• 2004

An improved low coherence interferometer system and a new analysis method for the accurate measurement of the optical path difference error of an AWG (Arrayed-Waveguide Grating) are described. The use of software simplifies the experimental setup by eliminating the hardware (clock generator). In addition, the actual distances between the peak positions of the adjacent interference signals are calculated using interpolation methods. The wavelength transmission characteristics of the AWG are calculated assuming the measured phase errors. The calculated AWG characteristic is quite similar to the actual measurement result, confirming accuracy of the proposed measurement setup.

• Journal of the Korean Chemical Society
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• v.36 no.3
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• pp.442-445
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• 1992

Optical type hydrometer has been designed and constructed utilizing the fact that the refractive index of solution is varied in accordance with its specific gravity. Optical hydrometer produces the electric singal output with reflection of light in accordance with its specific gravity. This can be applied to continuous monitoring and/or automatic control of the specific gravity of solution. U-shaped glass rod was used a transfer medium of light, and the electronic circuit which utilize phase sensitive detection technique was designed to measure accurately the intensity of light. The specific gravity of sulfuric acid was measured with this hydrometer and the results show good linearity of output signal with its specific gravity.