Error analysis and performance test of the volumetric interferometer for three dimensional coordinate measurements |
이혁교
(한국과학기술원 기계공학과)
주지영 (한국과학기술원 기계공학과) 김승우 (한국과학기술원 기계공학과) |
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Absolute distance measurement by two-point diffraction interferometry
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2 |
Absolute distance measurement by wavelength shift interferometry with a laser diode light: some systematic error sources
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DOI |
3 |
Temperature-induced optical phase shifts in fibers
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DOI |
4 |
Interferometric laser rangefinder using a frequency modulated diode laser
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DOI |
5 |
Development of a coordinate measuring system with tracking laser interferometer
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DOI ScienceOn |
6 |
Absolute interferometric distance measurement using a FM-demodulation technique
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DOI |
7 |
Dispersive white-light interferometry for absolute distance measurement with dielectric multilayer systems on the target
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DOI |
8 |
Volumetric interferometry using spherical wave interference for three-dimensional coordinate metrology
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과학기술학회마을 DOI ScienceOn |
9 |
Grating interferometer for flatness testing
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DOI |
10 |
Optical ranging by wavelength multiplexed interferometry
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DOI |
11 |
Digital wave-front measuring interferometry: some systematic error sources
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DOI |
12 |
General methods for generating phase-shifting interferometry algorithms
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DOI |
13 |
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14 |
Guide to the expression of uncertainty in measurement
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15 |
Two-wavelength double heterodyne interferometry using a matched grating technique
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DOI |
16 |
Absolute interferometry with a 670-nm external cavity diode laser
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DOI |
17 |
New design of precision CMM based upon volumetric phase-measuring interferometry
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18 |
Design of a high-accuracy CMM based on multi-lateration techniques
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DOI ScienceOn |
19 |
White-light scanning fiber Michelson interferometer for absolute position-distance measurement
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DOI |
20 |
Absolute two-dimensional sub-micron metrology for electron beam lithography : A theory of calibration with applications
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DOI ScienceOn |
21 |
An exact algorithm for self-calibration of two-dimentional precision metrology stages
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DOI ScienceOn |
22 |
Automatic laser tracking interferometer system for robot metrology
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DOI ScienceOn |