Point-diffraction interferometer for 3-D profile measurement of light scattering rough surfaces |
김병창
(한국과학기술원 기계공학과)
이호재 (한국과학기술원 기계공학과) 김승우 (한국과학기술원 기계공학과) |
1 |
Absolute distance measurement by two point diffeaction interferometry
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DOI |
2 |
Grating interferometer for flatness testing
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DOI |
3 |
Warpage measurement on dieledtric rough surface of microelectronics devices by far infra red fizeau interferomery
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DOI ScienceOn |
4 |
Absolute interferometer three-dimensional profile measurement of rough surfaces
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5 |
Tow-wavelength phase shifri interferometry
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DOI |
6 |
The first measurement of a three-dimension coordinate by use of a laser tranking interferometer system based on trilateration
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DOI ScienceOn |
7 |
The mirau correlation microscope
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DOI |
8 |
Interferometric laser rangefinder using frequency modulated diode laser
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DOI |
9 |
Rough surface inter ferometry at 10.6 μm
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DOI |