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http://dx.doi.org/10.3807/KJOP.2013.24.6.331

Measurement of Large Mirror Surface using a Laser Tracker  

Jo, Eun-Ha (Department of Measurement Science, University of Science and Technology)
Yang, Ho-Soon (Department of Measurement Science, University of Science and Technology)
Lee, Yun-Woo (Space Optics Research Center, Korea Research Institute of Standards and Science)
Publication Information
Korean Journal of Optics and Photonics / v.24, no.6, 2013 , pp. 331-337 More about this Journal
Abstract
A large optical surface is fabricated by grinding, polishing and figuring. The grinding process is the most rapid and has the largest amount of fabrication of all processes. If we measure the surface precisely and rapidly in the grinding process, it is possible to improve the efficiency of the fabrication process. Since the surface of grinding process is rough and not shiny, it is not easy to measure the surface using light so that we cannot use an interferometer. Therefore, we have to measure the surface using a mechanical method. We can measure the surface under the grinding process by using a laser tracker which is a portable 3-dimensional coordinate measuring machine. In this paper, we used the laser tracker to measure the surface error of 1 m diameter spherical mirror. This measurement result was compared to that of an interferometer. As a result, surface measurement error was found to be $0.2{\mu}m$ rms (root mean square) and $2.7{\mu}m$ PV (Peak to Valley), which is accurate enough to apply to the rough surface under the grinding stage.
Keywords
Large optics; Laser tracker; Metrology;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
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