The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지

A Study for Optimum Design and Fabrication of Microscale Solenoid RF Chip Inductors

극소형 솔레노이드 RF 칩 인덕터의 설계 및 제작에 대한 연구

  • Published : 2003.11.01
Download PDF
⟨ Previous Next ⟩

Abstract

In this study, microscale, high-performance, solenoid-type RF chip inductors were investigated. The size of the RF chip inductors fabricated in this work was 1.0${\times}$0.5${\times}$0.5㎣. 96% $Al_2$ $O_3$and I-type were used as the material and shape of the core, respectively. The copper (Cu) wire with 6 turns was employed as the coils. The diameter (40${\mu}{\textrm}{m}$) and position (middle) of the coil and the length (0.35mm) of solenoid were determined by a high-frequency structure simulator (HFSS) to maximize the performance of the inductors. High frequency characteristics of the inductance (L) and quality-factor (Q) of developed inductors were measured using an RF Impedance/Material Analyzer (HP4291B with HP16193A test fixture). The inductors developed have inductances of 10.8nH and quality factors of 25.2 to 50 over the frequency ranges of 250MHz to l GHz, and show results comparable to those measured for the inductors prepared by CoilCraf $t^{Tm}$ . The simulated data predicted the high-frequency data of the L and Q of the inductors developed well.l.

Keywords

References

  1. M. Denesh, J. R. Long, 'Differentially Driven Symmetric Microstrip Inductors,' IEEE Trans. on Microwave Theory and Techniques, vol. 50, no. 1, pp. 332-341, Jan, 2002 https://doi.org/10.1109/22.981285
  2. R. Groves, D. L. Harame, D. Jadus, 'Temperature Dependence of Q and Inductance in Spiral Inductors Fabricated in a Silicon-Germanium/BiCMOS Technology,' IEEE Journal of Solid-State Circuits, vol. 32, no. 9, pp. 1455-1459, Sep, 1997 https://doi.org/10.1109/4.628763
  3. I. Wolff and H. Kapusta, 'Modeling of Circular Spiral Inductors for MMICs,' IEEE MTT-s Digest, pp. 123-126, 1987
  4. Y. Kobayashi, S. Ishibashi, K. Shirakawa, J. Toriu, H. Matsuki, K. Murakami, 'New Type Micro Cloth-Inductor and Transformer with Thin Amorphous Wires and Multi-Thin Coils,' IEEE Trans. on Magnetics, vol. 28, no. 5, pp. 3012-3014, Sep, 1992 https://doi.org/10.1109/20.179701
  5. W. H. Hayt Jr., 'Engineering electrornagnetics,' 5th ed. New York: McGRAW-Hill, 1989
  6. R. F. Soohoo, 'Magnetic Thin Film Inductors for Integrated Circuit Applications,' IEEE Trans. on Magnetics, vol. MAG-IS, 1803, 1979
  7. C. H. Ahn and M. G. Allen, 'Micromachined Planar Inductors on Silicon Wafers for MEMS Applications,' IEEE Trans. on Industrial Electronics, vol. 45, no. 6, pp. 866-876, Dec, 1998 https://doi.org/10.1109/41.735330
  8. M. Yamaguchi, K. Suezawa, K. I. Arai, Y. Takahashi, S. Kikuchi, Y. Shimada, W. D. Li, S. Tanabe, and K. Ito, 'Microfabrication and characteristics of magnetic thin-film inductors in the ultrahigh frequency region,' J. Appl. Phys., vol. 85, no. 11, pp. 7919-7922, 1999 https://doi.org/10.1063/1.370608
  9. Myung-Hee jung, Iae-Wook Kim, Eui- jung Yun, 'Development of High-Performance Solenoid-Type RF Chip Inductors,' Jpn. J. Appl. Phys., vol. 39 (2000), pp. 4772-4776, Part 1, No.8, August 2000 https://doi.org/10.1143/JJAP.39.4772
  10. T. Tsutaoka, T. Kasagi, and K. Hatakeyama, 'Magnetic Field Effect on the Complex Permeability for a Mn-Zn Ferrite and its Composite Materials,' Journal of the European Ceramic Society, pp. 1531 -1535, 1999 https://doi.org/10.1016/S0955-2219(98)00474-9
  11. C. P. Yue and S. S. Wong, 'On-Chip Spiral Inductors with Patterned Ground Shields for Si-Based RF IC's,' IEEE Journal of Solid-State Circuits, vol. 33, no. 5, pp. 743-752, May 1998 https://doi.org/10.1109/4.668989
  12. Jun-Bo Yoon, Chul-Hi Han, Eui-Sik Yoon and Cheong- Ki Kim, 'Monolithic Fabrication of Electroplated Solenoid Inductors Using Three-Dimension Photolithography of a Thick Photoresist,' Jpn. J. Appl, Phys. Vol. 37, pp. 7081-7085, Part1, No. 12B, Dec 1998 https://doi.org/10.1143/JJAP.37.7081
  13. CoilCraft, 'Inductors Transformers Filters Catalog,' May 2001