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Temperature Measurement of Silicon Wafers Using Phase Estimation of Acoustic Wave  

Joonhyuk Kang (한국정보통신대학교 공학부)
Lee, Seokwon (우송대 디지털정보통신학과)
Publication Information
The Transactions of the Korean Institute of Electrical Engineers C / v.52, no.11, 2003 , pp. 493-495 More about this Journal
Abstract
Accurate temperature measurement is a key factor to implement the rapid thermal processing(RTP). A temperature estimation method using acoustic wave has been proposed to overcome the inaccuracy and contamination problem of the previous methods. The proposed method, however, may suffer from the offset and low resolution problem since it is implemented in the time domain. This paper presents a temperature estimation method using the phase detection of acoustic wave. Based on the frequency domain approach, the proposed technique increases the resolution of the measured temperature and reduces the effect of noise. We investigate the performance of the proposed method via experiments.
Keywords
temperature measurement; RTP; phase estimation; acustic wave; frequency domain;
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  • Reference
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